US5723908A
Expired / Lapsed
US
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Multilayer wiring structure
Assignee: Toshiba Corp
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Filing: 1994-03-11
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Granted: 1998-03-03
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Expires: 2014-03-11
Abstract
Abstract A multilayer wiring structure comprising a substrate, two line layers, and an interlayer insulating film. The first line layer consists of strip-shaped power/ground lines which extend parallel to one another. The second line layer is located above or below the first line layer, extends substantially parallel to the first line layer. The second line layer consists of strip-shaped signal lines which extend parallel to one another and at an angle to the strip-shaped power/ground lines of the first line layer in a skewed position.
Inventors
- 👤 Yumi Fuchida
- 👤 Jun Hanari
- 👤 Kazuhiro Matsumoto
- 👤 Junichi Kudo
- 👤 Kunio Yoshihara
- 👤 Ayako Takagi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 11:24
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/427; H10W20/43; H10W42/00; H10W42/20; H10W42/261; H10W42/267; H05; H05K; H05K1/00; H05K1/02; H05K1/0213; H05K1/0216; H05K1/0218; H05K1/0296; H05K1/0298; H10W90/00; H10W90/701; H10W90/751; H10W90/754
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
89 words
A multilayer wiring structure comprising: a substrate; a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction; a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction; and an interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction.
Claim 2
Dependent Claim
89 words
A multilayer wiring structure comprising: a substrate; a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction; a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction; and an interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction.
Claim 3
Dependent Claim
23 words
The multilayer wiring structure according to claim 1, wherein said first direction extends at 90° to said second direction in a skewed position.
Claim 4
Dependent Claim
46 words
The multilayer wiring structure according to claim 1, wherein said first line layer comprises plural of said strip-shaped lines having a width W pg and arranged at intervals S pg , said width W pg being equal to or less than said intervals S pg .
Claim 5
Dependent Claim
31 words
The multilayer wiring structure according to claim 1, wherein said at first line layer comprises a strip-shaped power line and a strip-shaped ground line which are located in the same level.
Claim 6
Dependent Claim
18 words
The multilayer wiring structure according to claim 4, comprising plural alternately arranged of said power and ground lines.
Claim 7
Dependent Claim
26 words
The multilayer wiring structure according to claim 1, wherein said first line layer consists of a plurality of power lines which are connected at one end.
Claim 8
Dependent Claim
26 words
The multilayer wiring structure according to claim 1, wherein said first line layer consists of a plurality of power lines which are connected at both ends.
Claim 9
Dependent Claim
26 words
The multilayer wiring structure according to claim 1, wherein said first line layer consists of a plurality of ground lines which are connected at one end.
Claim 10
Dependent Claim
26 words
The multilayer wiring structure according to claim 1, wherein said first line layer consists of a plurality of ground lines which are connected at both ends.
Claim 11
Dependent Claim
148 words
A multilayer wiring structure comprising: a substrate; a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction; a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction; an interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction; and wherein said at least one of the strip-shaped power line and the strip-shaped ground line of said first line layer have a width W pg and the at least one strip-shaped signal line of said second line layer has a width W s , said width W s being equal to or less than said width W pg .
Claim 12
Dependent Claim
148 words
A multilayer wiring structure comprising: a substrate; a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction; a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction; an interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction; and wherein said at least one of the strip-shaped power line and the strip-shaped ground line of said first line layer have a width W pg and the at least one strip-shaped signal line of said second line layer has a width W s , said width W s being equal to or less than said width W pg .
Claim 13
Dependent Claim
132 words
A multilayer wiring structure comprising: a substrate; a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction; a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction; an interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction; and a third line layer arranged at a different level from said second line layer and essentially consisting of at least one strip-shaped signal line and in which said first line layer is located between said second line layer and said third line layer.
Claim 14
Dependent Claim
132 words
A multilayer wiring structure comprising: a substrate; a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction; a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction; an interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction; and a third line layer arranged at a different level from said second line layer and essentially consisting of at least one strip-shaped signal line and in which said first line layer is located between said second line layer and said third line layer.
Claim 15
Dependent Claim
142 words
A multilayer wiring structure comprising: a substrate; a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction; a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction; an interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction; a third line layer arranged at a level adjacent to said second line layer and essentially consisting of at least one strip-shaped signal line; and a fourth line layer arranged at another level adjacent to said third line layer and essentially consisting of at least one of a power line and a ground line.
Claim 16
Dependent Claim
142 words
A multilayer wiring structure comprising: a substrate; a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction; a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction; an interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction; a third line layer arranged at a level adjacent to said second line layer and essentially consisting of at least one strip-shaped signal line; and a fourth line layer arranged at another level adjacent to said third line layer and essentially consisting of at least one of a power line and a ground line.
Claim 17
Dependent Claim
79 words
The multilayer wiring structure according to claim 12, wherein the strip-shaped signal line of said second line layer extends at about 90° to the strip-shaped signal line of said third line layer in a skewed position, and the at least one of the power line and ground line of said first line layer extends at about 90° to the at least one of the power line and the ground line of said fourth line layer in a skewed position.
Claim 18
Dependent Claim
161 words
A multilayer wiring structure comprising: a substrate; a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction; a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction; an interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction; a third line layer arranged at a level adjacent to said second line layer and essentially consisting of at least one of a power line and a ground line; a fourth line layer arranged at a level adjacent to said third line layer and including a signal line; and a fifth line layer arranged at a level adjacent to said fourth line layer and essentially consisting of at least one strip-shaped signal line.
Claim 19
Dependent Claim
161 words
A multilayer wiring structure comprising: a substrate; a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction; a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction; an interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction; a third line layer arranged at a level adjacent to said second line layer and essentially consisting of at least one of a power line and a ground line; a fourth line layer arranged at a level adjacent to said third line layer and including a signal line; and a fifth line layer arranged at a level adjacent to said fourth line layer and essentially consisting of at least one strip-shaped signal line.
Claim 20
Dependent Claim
99 words
A multilayer wiring structure comprising: a substrate; a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction; a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction; an interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction; and wherein said first line layer includes lines having different widths.
Claim 21
Dependent Claim
99 words
A multilayer wiring structure comprising: a substrate; a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction; a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction; an interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction; and wherein said first line layer includes lines having different widths.
Claim 22
Dependent Claim
120 words
A multilayer wiring structure comprising: a substrate; a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction; a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction; an interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction; and wherein said first line layer includes a first strip having a width and set at a potential and a second strip having a different width and set at a different potential.
Claim 23
Dependent Claim
120 words
A multilayer wiring structure comprising: a substrate; a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction; a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction; an interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction; and wherein said first line layer includes a first strip having a width and set at a potential and a second strip having a different width and set at a different potential.
Claim 24
Dependent Claim
136 words
A semiconductor device comprising: a semiconductor substrate having a major surface; a semiconductor element formed in the major surface of said semiconductor substrate; a multilayer wiring structure located above said semiconductor element; and a first interlayer insulating layer interposed between said semiconductor element and said multilayer wiring structure, said multilayer wiring structure comprising: a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction, a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction, and a second interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction.
Claim 25
Dependent Claim
136 words
A semiconductor device comprising: a semiconductor substrate having a major surface; a semiconductor element formed in the major surface of said semiconductor substrate; a multilayer wiring structure located above said semiconductor element; and a first interlayer insulating layer interposed between said semiconductor element and said multilayer wiring structure, said multilayer wiring structure comprising: a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction, a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction, and a second interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in a skewed position with respect to said second direction.
Claim 26
Dependent Claim
134 words
A semiconductor device comprising: a semiconductor substrate having a major surface; a semiconductor element formed in the major surface of said semiconductor substrate; a multilayer wiring structure located above said semiconductor element; and a first interlayer insulating layer interposed between said semiconductor element and said multilayer wiring structure, said multilayer wiring structure comprising: a substrate, a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction, a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction, and a second interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in parallel with said second direction.
Claim 27
Dependent Claim
134 words
A semiconductor device comprising: a semiconductor substrate having a major surface; a semiconductor element formed in the major surface of said semiconductor substrate; a multilayer wiring structure located above said semiconductor element; and a first interlayer insulating layer interposed between said semiconductor element and said multilayer wiring structure, said multilayer wiring structure comprising: a substrate, a first line layer essentially consisting of at least one of a strip-shaped power line and a strip-shaped ground line extending in a first direction, a second line layer located above or below said first line layer and essentially consisting of at least one strip-shaped signal line extending in a second direction, and a second interlayer insulating layer interposed between said first line layer and said second line layer, said first direction being in parallel with said second direction.
References Cited (Backward Citations)
EP0026807A1
Cited
US4857987A
Cited
US4866507A
Cited
US4924290A
Cited
EP0308714A2
Cited
JPH01196198A
Cited
US5103288A
Cited
US5148263A
Cited
US5095352A
Cited
EP0374842A2
Cited
US5119170A
Cited
EP0378211A2
Cited
US5185650A
Cited
JPH0367357A
Cited
US5136358A
Cited
EP0473144A2
Cited
JPH04245456A
Cited
US5406118A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-03-02 | 2001-09-01 | 2002-03-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-03-02 | 2005-09-01 | 2006-03-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-03-02 | 2009-09-01 | 2010-03-03 | $7700.00 | Window Closed / Lapsed |