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US5721687A Expired / Lapsed US ⏱️ 0.0 years remaining

Ultrahigh vacuum focused ion beam micromill and articles therefrom

Assignee: Los Alamos National Security LLC
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Filing: 1995-02-01
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Granted: 1998-02-24
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Expires: 2015-02-01
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Abstract

Abstract An ultrahigh vacuum focused ion beam micromilling apparatus and process are disclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters.

Inventors

  • 👤 Bruce C. Lamartine
  • 👤 Roger A. Stutz

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 16:34
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/305; H01J37/3053; H01J37/3056; H01J2237/00; H01J2237/30; H01J2237/304; H01J2237/30405; H01J2237/30411

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 113 words
A process of machining a bandpass filter microstructure having a milled depth to milled horizontal cut ratio of greater than about 10 within a target substrate comprising: placing a target substrate within an ultrahigh vacuum environment; producing a computer data file adapted for operation of a computer-controlled focused ion beam so as to form a milled bandpass filter microstructure in said target substrate; and, exposing said target substrate to said computer-controlled focused ion beam, said computer-controlled focused ion beam controlled by software utilizing said computer data file whereby a milled bandpass filter microstructure having a milled depth to milled horizontal cut ratio of greater than about 10 is formed in said target substrate.
Claim 2
Dependent Claim 113 words
A process of machining a bandpass filter microstructure having a milled depth to milled horizontal cut ratio of greater than about 10 within a target substrate comprising: placing a target substrate within an ultrahigh vacuum environment; producing a computer data file adapted for operation of a computer-controlled focused ion beam so as to form a milled bandpass filter microstructure in said target substrate; and, exposing said target substrate to said computer-controlled focused ion beam, said computer-controlled focused ion beam controlled by software utilizing said computer data file whereby a milled bandpass filter microstructure having a milled depth to milled horizontal cut ratio of greater than about 10 is formed in said target substrate.
Claim 3
Dependent Claim 116 words
A process of machining a data storage medium microstructure having a milled depth to milled horizontal cut ratio of greater than about 10 within a target substrate comprising: placing a target substrate within an ultrahigh vacuum environment; producing a computer data file adapted for operation of a computer-controlled focused ion beam so as to form a milled data storage medium microstructure in said target substrate; and, exposing said target substrate to said computer-controlled focused ion beam, said computer-controlled focused ion beam controlled by software utilizing said computer data file whereby a milled data storage medium microstructure having a milled depth to milled horizontal cut ratio of greater than about 10 is formed in said target substrate.
Claim 4
Dependent Claim 116 words
A process of machining a data storage medium microstructure having a milled depth to milled horizontal cut ratio of greater than about 10 within a target substrate comprising: placing a target substrate within an ultrahigh vacuum environment; producing a computer data file adapted for operation of a computer-controlled focused ion beam so as to form a milled data storage medium microstructure in said target substrate; and, exposing said target substrate to said computer-controlled focused ion beam, said computer-controlled focused ion beam controlled by software utilizing said computer data file whereby a milled data storage medium microstructure having a milled depth to milled horizontal cut ratio of greater than about 10 is formed in said target substrate.

References Cited (Backward Citations)

US5402410A Cited
US5401972A Cited
US5453594A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2001-02-23 2001-08-25 2002-02-24 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2005-02-23 2005-08-25 2006-02-24 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2009-02-23 2009-08-25 2010-02-24 $7700.00 Window Closed / Lapsed

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