US5721168A
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US
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Method for forming a ring-shape capacitor
Assignee: Powerchip Semiconductor Corp
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Filing: 1996-12-02
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Granted: 1998-02-24
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Expires: 2016-12-02
Abstract
Abstract A method for forming a ring-shape capacitor in a dynamic random access memory is disclosed. The present invention includes forming a first dielectric layer on a substrate. After a silicon nitride layer is formed on the first dielectric layer, a first doped polysilicon layer is formed on the silicon nitride layer, and a second dielectric layer is formed on the first doped polysilicon layer. After removing portions of the second dielectric layer, the first doped polysilicon layer, the silicon nitride layer and the first dielectric layer by a first photoresist layer, a contact hole is formed. A second doped polysilicon layer is formed over the second dielectric layer, and the contact hole is thus filled by the second doped polysilicon layer. Thereafter, portions of the second doped polysilicon layer and the second dielectric layer are removed using a second photoresist layer as a mask, thereby exposing the first doped polysilicon layer. A third dielectric layer is formed on the second doped polysilicon layer, the first polysilicon layer, and on the sidewalls of the second dielectric layer. After etching back the third dielectric layer, a third doped polysilicon layer is formed. Further etching back the third doped polysilicon to expose the silicon nitride layer and the third dielectric layer, the third dielectric layer, the second dielectric layer, and the silicon nitride layer are removed, thereby forming a ring-shape polysilicon.
Inventors
- 👤 Shye-Lin Wu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 16:06
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/30; H10B12/31; H10B12/318; H10B12/01; H10B12/02; H10B12/03; H10B12/033
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
360 words
A method for forming a ring-shape capacitor in a dynamic random access memory, said method comprising: forming a first dielectric layer on a substrate having a structure formed therein and thereon; forming a silicon nitride layer on the first dielectric layer; forming a first doped polysilicon layer on the silicon nitride layer; forming a second dielectric layer on the first doped polysilicon layer; forming a first photoresist layer on the second dielectric layer, pattern of said first photoresist layer defining a storage node area over a portion of a source electrode of the structure; removing portions of the second dielectric layer, the first doped polysilicon layer, the silicon nitride layer and the first dielectric layer using the first photoresist layer as a mask, thereby exposing the substrate to form a contact hole; forming a second doped polysilicon layer over the second dielectric layer, said contact hole being filled by the second doped polysilicon layer; forming a second photoresist layer on the second doped polysilicon layer, pattern of said second photoresist layer defining and covering the storage node area; removing portions of the second doped polysilicon layer and the second dielectric layer using the second photoresist layer as a mask, thereby exposing the first doped polysilicon layer; forming a third dielectric layer on the second doped polysilicon layer and the first polysilicon layer, and on the sidewalls of the second dielectric layer; etching hack the third dielectric layer to expose the second doped polysilicon layer and the first doped polysilicon layer; forming a third doped polysilicon layer over the second doped polysilicon layer, the third dielectric layer and the first doped polysilicon layer; etching back the third doped polysilicon to expose the silicon nitride layer and the third dielectric layer; removing the third dielectric layer, the second dielectric layer, and the silicon nitride layer, thereby forming a ring-shape polysilicon comprising the reminder first, the second and the third doped polysilicon layers; forming a fourth dielectric layer on the surface of the ring-shape polysilicon and the first dielectric layer; and forming a conductive layer over the ring-shape polysilicon, thereby covering the ring-shape polysilicon to form a cell plate of the ring-shape capacitor.
Claim 2
Independent Claim
360 words
A method for forming a ring-shape capacitor in a dynamic random access memory, said method comprising: forming a first dielectric layer on a substrate having a structure formed therein and thereon; forming a silicon nitride layer on the first dielectric layer; forming a first doped polysilicon layer on the silicon nitride layer; forming a second dielectric layer on the first doped polysilicon layer; forming a first photoresist layer on the second dielectric layer, pattern of said first photoresist layer defining a storage node area over a portion of a source electrode of the structure; removing portions of the second dielectric layer, the first doped polysilicon layer, the silicon nitride layer and the first dielectric layer using the first photoresist layer as a mask, thereby exposing the substrate to form a contact hole; forming a second doped polysilicon layer over the second dielectric layer, said contact hole being filled by the second doped polysilicon layer; forming a second photoresist layer on the second doped polysilicon layer, pattern of said second photoresist layer defining and covering the storage node area; removing portions of the second doped polysilicon layer and the second dielectric layer using the second photoresist layer as a mask, thereby exposing the first doped polysilicon layer; forming a third dielectric layer on the second doped polysilicon layer and the first polysilicon layer, and on the sidewalls of the second dielectric layer; etching hack the third dielectric layer to expose the second doped polysilicon layer and the first doped polysilicon layer; forming a third doped polysilicon layer over the second doped polysilicon layer, the third dielectric layer and the first doped polysilicon layer; etching back the third doped polysilicon to expose the silicon nitride layer and the third dielectric layer; removing the third dielectric layer, the second dielectric layer, and the silicon nitride layer, thereby forming a ring-shape polysilicon comprising the reminder first, the second and the third doped polysilicon layers; forming a fourth dielectric layer on the surface of the ring-shape polysilicon and the first dielectric layer; and forming a conductive layer over the ring-shape polysilicon, thereby covering the ring-shape polysilicon to form a cell plate of the ring-shape capacitor.
Claim 3
Dependent Claim
30 words
The method according to claim 1, wherein said first dielectric layer is selected from the group consisting of tetraethoxysilane (TEOS), Borosilicate glass (BSG), Phosphosilicate glass (PSG) and Borophosphosilicate glass (BPSG).
Claim 4
Dependent Claim
30 words
The method according to claim 1, wherein said second dielectric layer is selected from the group consisting of tetraethoxysilane (TEOS), Borosilicate glass (BSG), Phosphosilicate glass (PSG) and Borophosphosilicate glass (BPSG).
Claim 5
Dependent Claim
30 words
The method according to claim 1, wherein said third dielectric layer is selected from the group consisting of tetraethoxysilane (TEOS), Borosilicate glass (BSG), Phosphosilicate glass (PSG) and Borophosphosilicate glass (BPSG).
Claim 6
Dependent Claim
22 words
The method according to claim 1, wherein said silicon nitride layer is formed by a low pressure chemical vapor deposition (LPCVD) method.
Claim 7
Dependent Claim
21 words
The method according to claim 1, wherein said silicon nitride layer is formed by a plasma-enhanced chemical vapor deposition (PECVD) method.
Claim 8
Dependent Claim
19 words
The method according to claim 1, wherein said first doped polysilicon layer is doped by an in-situ doping method.
Claim 9
Dependent Claim
18 words
The method according to claim 1, wherein said first doped polysilicon layer is doped by an ion-implant method.
Claim 10
Dependent Claim
19 words
The method according to claim 1, wherein said second doped polysilicon layer is doped by an in-situ doping method.
Claim 11
Dependent Claim
18 words
The method according to claim 1, wherein said second doped polysilicon layer is doped by an ion-implant method.
Claim 12
Dependent Claim
19 words
The method according to claim 1, wherein said third doped polysilicon layer is doped by an in-situ doping method.
Claim 13
Dependent Claim
18 words
The method according to claim 1, wherein said third doped polysilicon layer is doped by an ion-implant method.
Claim 14
Dependent Claim
38 words
The method according to claim 1, wherein said fourth dielectric layer is a member selected from the group consisting of a stacked oxide-nitride-oxide (ONO) layer, BST, lead zirconate titanate (PZT), Ta 2 O 5 and high dielectric material.
Claim 15
Independent Claim
360 words
A method for forming a ring-shape capacitor in a dynamic random access memory, said method comprising: forming a first oxide layer on a substrate having a structure formed therein and thereon; forming a silicon nitride layer on the first oxide layer; forming a first doped polysilicon layer on the silicon nitride layer; forming a second oxide layer on the first doped polysilicon layer; forming a first photoresist layer on the second oxide layer, pattern of said first photoresist layer defining a storage node area over a portion of a source electrode of the structure; removing portions of the second oxide layer, the first doped polysilicon layer, the silicon nitride layer and the first oxide layer using the first photoresist layer as a mask, thereby exposing the substrate to form a contact hole; forming a second doped polysilicon layer over the second oxide layer, said contact hole being filled by the second doped polysilicon layer; forming a second photoresist layer on the second doped polysilicon layer, pattern of said second photoresist layer defining and covering the storage node area; removing portions of the second doped polysilicon layer and the second oxide layer using the second photoresist layer as a mask, thereby exposing the first doped polysilicon layer; forming a third oxide layer on the second doped polysilicon layer and the first polysilicon layer, and on the sidewalls of the second oxide layer; etching back the third oxide layer to expose the second doped polysilicon layer and the first doped polysilicon layer; forming a third doped polysilicon layer over the second doped polysilicon layer, the third oxide layer and the first doped polysilicon layer; etching hack the third doped polysilicon to expose the silicon nitride layer and the third oxide layer; removing the third oxide layer, the second oxide layer, and the silicon nitride layer, thereby forming a ring-shape polysilicon comprising the remained first, the second and the third doped polysilicon layers; forming a fourth oxide layer on the surface of the ring-shape polysilicon and the first oxide layer; and forming a conductive layer over the ring-shape polysilicon, thereby covering the ring-shape polysilicon to form a cell plate of the ring-shape capacitor.
Claim 16
Independent Claim
360 words
A method for forming a ring-shape capacitor in a dynamic random access memory, said method comprising: forming a first oxide layer on a substrate having a structure formed therein and thereon; forming a silicon nitride layer on the first oxide layer; forming a first doped polysilicon layer on the silicon nitride layer; forming a second oxide layer on the first doped polysilicon layer; forming a first photoresist layer on the second oxide layer, pattern of said first photoresist layer defining a storage node area over a portion of a source electrode of the structure; removing portions of the second oxide layer, the first doped polysilicon layer, the silicon nitride layer and the first oxide layer using the first photoresist layer as a mask, thereby exposing the substrate to form a contact hole; forming a second doped polysilicon layer over the second oxide layer, said contact hole being filled by the second doped polysilicon layer; forming a second photoresist layer on the second doped polysilicon layer, pattern of said second photoresist layer defining and covering the storage node area; removing portions of the second doped polysilicon layer and the second oxide layer using the second photoresist layer as a mask, thereby exposing the first doped polysilicon layer; forming a third oxide layer on the second doped polysilicon layer and the first polysilicon layer, and on the sidewalls of the second oxide layer; etching back the third oxide layer to expose the second doped polysilicon layer and the first doped polysilicon layer; forming a third doped polysilicon layer over the second doped polysilicon layer, the third oxide layer and the first doped polysilicon layer; etching hack the third doped polysilicon to expose the silicon nitride layer and the third oxide layer; removing the third oxide layer, the second oxide layer, and the silicon nitride layer, thereby forming a ring-shape polysilicon comprising the remained first, the second and the third doped polysilicon layers; forming a fourth oxide layer on the surface of the ring-shape polysilicon and the first oxide layer; and forming a conductive layer over the ring-shape polysilicon, thereby covering the ring-shape polysilicon to form a cell plate of the ring-shape capacitor.
Claim 17
Dependent Claim
30 words
The method according to claim 14, wherein said first oxide layer is selected from the group consisting of tetraethoxysilane (TEOS), Borosilicate glass (BSG), Phosphosilicate glass (PSG) and Borophosphosilicate glass (BPSG).
Claim 18
Dependent Claim
30 words
The method according to claim 14, wherein said second oxide layer is selected from the group consisting of tetraethoxysilane (TEOS), Borosilicate glass (BSG), Phosphosilicate glass (PSG) and Borophosphosilicate glass (BPSG).
Claim 19
Dependent Claim
30 words
The method according to claim 14, wherein said third oxide layer is selected from the group consisting of tetraethoxysilane (TEEOS), Borosilicate glass (BSG), Phosphosilicate glass (PSG) and Borophosphosilicate glass (BPSG).
Claim 20
Independent Claim
361 words
A method for forming a ring-shape capacitor in a dynamic random access memory, said method comprising: forming a first tetraethoxysilane (TIEOS) layer on a substrate having a structure formed therein and thereon; forming a silicon nitride layer on the first TEOS layer; forming a first doped polysilicon layer on the silicon nitride layer; forming a second TEOS layer on the first doped polysilicon layer; forming a first photoresist layer on the second TEOS layer, pattern of said first photoresist layer defining a storage node area over a portion of a source electrode of the structure; removing portions of the second TEOS layer, the first doped polysilicon layer, the silicon nitride layer and the first TEOS layer using the first photoresist layer as a mask, thereby exposing the substrate to form a contact hole; forming a second doped polysilicon layer over the second TEOS layer, said contact hole being filled by the second doped polysilicon layer; forming a second photoresist layer on the second doped polysilicon layer, pattern of said second photoresist layer defining and covering the storage node area; removing portions of the second doped polysilicon layer and the second TEOS layer using the second photoresist layer as a mask, thereby exposing the first doped polysilicon layer; forming a third TEOS layer on the second doped polysilicon layer and the first polysilicon layer, and on the sidewalls of the second TEOS layer; etching hack the third TEOS layer to expose the second doped polysilicon layer and the first doped polysilicon layer; forming a third doped polysilicon layer over the second doped polysilicon layer, the third TIEOS layer and the first doped polysilicon layer; etching back the third doped polysilicon to expose the silicon nitride layer and the third TIEOS layer; removing the third TEOS layer, the second TEOS layer, and the silicon nitride layer, thereby forming a ring-shape polysilicon comprising the remained first, the second and the third doped polysilicon layers; forming a fourth TEOS layer on the surface of the ring-shape polysilicon and the first TEOS layer; and forming a conductive layer over the ring-shape polysilicon, thereby covering the ring-shape polysilicon to form a cell plate of the ring-shape capacitor.
Claim 21
Independent Claim
361 words
A method for forming a ring-shape capacitor in a dynamic random access memory, said method comprising: forming a first tetraethoxysilane (TIEOS) layer on a substrate having a structure formed therein and thereon; forming a silicon nitride layer on the first TEOS layer; forming a first doped polysilicon layer on the silicon nitride layer; forming a second TEOS layer on the first doped polysilicon layer; forming a first photoresist layer on the second TEOS layer, pattern of said first photoresist layer defining a storage node area over a portion of a source electrode of the structure; removing portions of the second TEOS layer, the first doped polysilicon layer, the silicon nitride layer and the first TEOS layer using the first photoresist layer as a mask, thereby exposing the substrate to form a contact hole; forming a second doped polysilicon layer over the second TEOS layer, said contact hole being filled by the second doped polysilicon layer; forming a second photoresist layer on the second doped polysilicon layer, pattern of said second photoresist layer defining and covering the storage node area; removing portions of the second doped polysilicon layer and the second TEOS layer using the second photoresist layer as a mask, thereby exposing the first doped polysilicon layer; forming a third TEOS layer on the second doped polysilicon layer and the first polysilicon layer, and on the sidewalls of the second TEOS layer; etching hack the third TEOS layer to expose the second doped polysilicon layer and the first doped polysilicon layer; forming a third doped polysilicon layer over the second doped polysilicon layer, the third TIEOS layer and the first doped polysilicon layer; etching back the third doped polysilicon to expose the silicon nitride layer and the third TIEOS layer; removing the third TEOS layer, the second TEOS layer, and the silicon nitride layer, thereby forming a ring-shape polysilicon comprising the remained first, the second and the third doped polysilicon layers; forming a fourth TEOS layer on the surface of the ring-shape polysilicon and the first TEOS layer; and forming a conductive layer over the ring-shape polysilicon, thereby covering the ring-shape polysilicon to form a cell plate of the ring-shape capacitor.
References Cited (Backward Citations)
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