Patent US5716264A successfully refreshed from Google Patents.
US5716264A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polishing apparatus
Assignee: Ebara Corp
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Filing: 1996-07-18
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Granted: 1998-02-10
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Expires: 2016-07-18
Abstract
Abstract A polishing apparatus is employed to polish an object to be polished by urging the surface of the object to be polished against the surface of a polishing cloth and causing a relative movement therebetween, while supplying a polishing liquid into an area between the object to be polished and the polishing cloth. A plurality of nozzles spray respective fluid jets to strike against the surface of the cloth. The plurality of nozzles include more than one type of nozzle which vary flow velocity, flow rate, angle of spray, and cross-sectional configuration of a jet. The plurality of nozzles have axes positioned at a location at different distances from the rotation axis of the polishing cloth.
Inventors
- 👤 Norio Kimura
- 👤 Ritsuo Kikuta
- 👤 You Ishii
- 👤 Masayoshi Hirose
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 14:31
CPC Classifications
B; B24; B24B; B24B53/00; B24B53/017
Claims Analysis
Total Claims: 65
Claim 1
Independent Claim
110 words
An apparatus for polishing an object by urging a surface of the object against a surface of a polishing cloth while causing relative movement therebetween and supplying a polishing liquid therebetween, said polishing apparatus including a dressing apparatus for dressing said polishing cloth to renew said polishing cloth for continued polishing, said dressing apparatus comprising: a plurality of nozzles for spraying respective fluid jets against said surface of said polishing cloth, said nozzles having respective axes located at different distances from a rotational axis of said polishing cloths; and means for varying impact pressure imparted by said fluid jets to said surface of said polishing cloth over different areas thereof.
Claim 2
Independent Claim
110 words
An apparatus for polishing an object by urging a surface of the object against a surface of a polishing cloth while causing relative movement therebetween and supplying a polishing liquid therebetween, said polishing apparatus including a dressing apparatus for dressing said polishing cloth to renew said polishing cloth for continued polishing, said dressing apparatus comprising: a plurality of nozzles for spraying respective fluid jets against said surface of said polishing cloth, said nozzles having respective axes located at different distances from a rotational axis of said polishing cloths; and means for varying impact pressure imparted by said fluid jets to said surface of said polishing cloth over different areas thereof.
Claim 3
Dependent Claim
45 words
An apparatus as claimed in claim 1, wherein said means comprises means for providing that a flow velocity of said fluid jet from at least one said nozzle is different than a flow velocity of said fluid jet from at least one other said nozzle.
Claim 4
Dependent Claim
21 words
An apparatus as claimed in claim 2, wherein flow velocities of said fluid jets from all of said nozzles are different.
Claim 5
Dependent Claim
41 words
An apparatus as claimed in claim 1, wherein said means comprises means for providing that a flow rate of said fluid jet from at least one said nozzle is different than a flow rate of at least one other said nozzle.
Claim 6
Dependent Claim
21 words
An apparatus as claimed in claim 4, wherein flow rates of said fluid jets of all of said nozzles are different.
Claim 7
Dependent Claim
47 words
An apparatus as claimed in claim 1, wherein said means comprises means for providing that an angle of spray of said fluid jet from at least one said nozzle is different than an angle of spray of said fluid jet from at least one other said nozzle.
Claim 8
Dependent Claim
22 words
An apparatus as claimed in claim 6, wherein angles of spray of said fluid jets of all of said nozzles are different.
Claim 9
Dependent Claim
32 words
An apparatus as claimed in claim 1, wherein said means comprises at least one said nozzle having a cross-sectional configuration different from a cross-sectional configuration of at least one other said nozzle.
Claim 10
Dependent Claim
16 words
An apparatus as claimed in claim 8, wherein all of said nozzles have different cross-sectional configurations.
Claim 11
Dependent Claim
45 words
An apparatus as claimed in claim 1, wherein said means comprises means for providing that a cross-sectional configuration of said fluid jet from at least one said nozzle is different than a cross-sectional configuration of said fluid jet from at least one other said nozzle.
Claim 12
Dependent Claim
18 words
An apparatus as claimed in claim 10, wherein cross-sectional configurations of all of said fluid jets are different.
Claim 13
Dependent Claim
30 words
An apparatus as claimed in claim 1, wherein said nozzles are connected to respective fluid supply sources that provide at least one of different supply pressure and different flow rate.
Claim 14
Dependent Claim
42 words
An apparatus as claimed in claim 1, wherein each said nozzle has connected thereto a respective fluid supply line, and each said fluid supply line has a valve or orifice to control selectively the supply of fluid to the respective said nozzle.
Claim 15
Dependent Claim
21 words
An apparatus as claimed in claim 1, further comprising means to blend cavitation bubbles into at least one said fluid jet.
Claim 16
Dependent Claim
26 words
An apparatus as claimed in claim 1, further comprising a cover covering said nozzles and polishing cloth to prevent splashing of fluid from said fluid jets.
Claim 17
Dependent Claim
108 words
A dressing apparatus for dressing a polishing cloth to be employed in a polishing apparatus used for polishing an object by urging a surface of the object against a surface of the polishing cloth while causing relative movement therebetween and supplying a polishing liquid therebetween, said dressing apparatus comprising: a plurality of nozzles for spraying respective fluid jets against the surface of the polishing cloth, said nozzles having respective axes to be located at different distances from a rotational axis of the polishing cloth; and means for varying impact pressure to be imparted by said fluid jets to the surface of the polishing cloth over different areas thereof.
Claim 18
Dependent Claim
108 words
A dressing apparatus for dressing a polishing cloth to be employed in a polishing apparatus used for polishing an object by urging a surface of the object against a surface of the polishing cloth while causing relative movement therebetween and supplying a polishing liquid therebetween, said dressing apparatus comprising: a plurality of nozzles for spraying respective fluid jets against the surface of the polishing cloth, said nozzles having respective axes to be located at different distances from a rotational axis of the polishing cloth; and means for varying impact pressure to be imparted by said fluid jets to the surface of the polishing cloth over different areas thereof.
Claim 19
Dependent Claim
45 words
An apparatus as claimed in claim 16, wherein said means comprises means for providing that a flow velocity of said fluid jet from at least one said nozzle is different than a flow velocity of said fluid jet from at least one other said nozzle.
Claim 20
Dependent Claim
21 words
An apparatus as claimed in claim 17, wherein flow velocities of said fluid jets from all of said nozzles are different.
Claim 21
Dependent Claim
41 words
An apparatus as claimed in claim 16, wherein said means comprises means for providing that a flow rate of said fluid jet from at least one said nozzle is different than a flow rate of at least one other said nozzle.
Claim 22
Dependent Claim
21 words
An apparatus as claimed in claim 19, wherein flow rates of said fluid jets of all of said nozzles are different.
Claim 23
Dependent Claim
47 words
An apparatus as claimed in claim 16, wherein said means comprises means for providing that an angle of spray of said fluid jet from at least one said nozzle is different than an angle of spray of said fluid jet from at least one other said nozzle.
Claim 24
Dependent Claim
22 words
An apparatus as claimed in claim 21, wherein angles of spray of said fluid jets of all of said nozzles are different.
Claim 25
Dependent Claim
32 words
An apparatus as claimed in claim 16, wherein said means comprises at least one said nozzle having a cross-sectional configuration different from a cross-sectional configuration of at least one other said nozzle.
Claim 26
Dependent Claim
16 words
An apparatus as claimed in claim 23, wherein all of said nozzles have different cross-sectional configurations.
Claim 27
Dependent Claim
45 words
An apparatus as claimed in claim 16, wherein said means comprises means for providing that a cross-sectional configuration of said fluid jet from at least one said nozzle is different than a cross-sectional configuration of said fluid jet from at least one other said nozzle.
Claim 28
Dependent Claim
18 words
An apparatus as claimed in claim 25, wherein cross-sectional configurations of all of said fluid jets are different.
Claim 29
Dependent Claim
30 words
An apparatus as claimed in claim 16, wherein said nozzles are connected to respective fluid supply sources that provide at least one of different supply pressure and different flow rate.
Claim 30
Dependent Claim
42 words
An apparatus as claimed in claim 16, wherein each said nozzle has connected thereto a respective fluid supply line, and each said fluid supply line has a valve or orifice to control selectively the supply of fluid to the respective said nozzle.
Claim 31
Dependent Claim
21 words
An apparatus as claimed in claim 16, further comprising means to blend cavitation bubbles into at least one said fluid jet.
Claim 32
Independent Claim
96 words
A method of dressing a polishing cloth employed in a polishing operation wherein a surface of an object is polished by urging said surface against a surface of the polishing cloth while causing relative rotation therebetween and supplying a polishing liquid therebetween, said method comprising: spraying fluid jets against said surface of said polishing cloth from a plurality of respective nozzles having respective axes located at different distances from a rotational axis of said polishing cloth; and varying impact pressure imparted by said fluid jets to said surface of said polishing cloth over different areas thereof.
Claim 33
Independent Claim
96 words
A method of dressing a polishing cloth employed in a polishing operation wherein a surface of an object is polished by urging said surface against a surface of the polishing cloth while causing relative rotation therebetween and supplying a polishing liquid therebetween, said method comprising: spraying fluid jets against said surface of said polishing cloth from a plurality of respective nozzles having respective axes located at different distances from a rotational axis of said polishing cloth; and varying impact pressure imparted by said fluid jets to said surface of said polishing cloth over different areas thereof.
Claim 34
Dependent Claim
43 words
A method as claimed in claim 30, wherein said varying comprises providing that a flow velocity of said fluid jet from at least one said nozzle is different than a flow velocity of said fluid jet from at least one other said nozzle.
Claim 35
Dependent Claim
21 words
A method as claimed in claim 31, wherein flow velocities of said fluid jets from all of said nozzles are different.
Claim 36
Dependent Claim
39 words
A method as claimed in claim 30, wherein said varying comprises providing that a flow rate of said fluid jet from at least one said nozzle is different than a flow rate of at least one other said nozzle.
Claim 37
Dependent Claim
21 words
A method as claimed in claim 33, wherein flow rates of said fluid jets of all of said nozzles are different.
Claim 38
Dependent Claim
45 words
A method as claimed in claim 30, wherein said varying comprises providing that an angle of spray of said fluid jet from at least one said nozzle is different than an angle of spray of said fluid jet from at least one other said nozzle.
Claim 39
Dependent Claim
22 words
A method as claimed in claim 35, wherein angles of spray of said fluid jets of all of said nozzles are different.
Claim 40
Dependent Claim
34 words
A method as claimed in claim 30, wherein said varying comprises providing that at least one said nozzle has a cross-sectional configuration different from a cross-sectional configuration of at least one other said nozzle.
Claim 41
Dependent Claim
16 words
A method as claimed in claim 37, wherein all of said nozzles have different cross-sectional configurations.
Claim 42
Dependent Claim
43 words
A method as claimed in claim 30, wherein said varying comprises providing that a cross-sectional configuration of said fluid jet from at least one said nozzle is different than a cross-sectional configuration of said fluid jet from at least one other said nozzle.
Claim 43
Dependent Claim
18 words
An apparatus as claimed in claim 39, wherein cross-sectional configurations of all of said fluid jets are different.
Claim 44
Dependent Claim
29 words
A method as claimed in claim 30, comprising connecting said nozzles to respective fluid supply sources that provide at least one of different supply pressure and different flow rate.
Claim 45
Dependent Claim
35 words
A method as claimed in claim 30, comprising connecting each said nozzle to a respective fluid supply line having a valve or orifice to control selectively the supply of fluid to the respective said nozzle.
Claim 46
Dependent Claim
19 words
A method as claimed in claim 30, further comprising blending cavitation bubbles into at least one said fluid jet.
Claim 47
Dependent Claim
24 words
A method as claimed in claim 30, further comprising covering said nozzles and polishing cloth to prevent splashing of fluid from said fluid jets.
Claim 48
Dependent Claim
14 words
A method as claimed in claim 30, wherein said fluid jets comprise water jets.
Claim 49
Independent Claim
98 words
An apparatus for polishing an object by urging a surface of the object against a surface of a polishing cloth while causing relative movement therebetween and supplying a polishing liquid therebetween, said polishing apparatus including a dressing apparatus for dressing said polishing cloth to renew said polishing cloth for continued polishing, said dressing apparatus comprising: at least one nozzle for spraying a fluid jet against said surface of said polishing cloth; and means for moving said nozzle over said surface of said polishing cloth and for varying the time that said fluid jet impacts onto different areas thereof.
Claim 50
Independent Claim
98 words
An apparatus for polishing an object by urging a surface of the object against a surface of a polishing cloth while causing relative movement therebetween and supplying a polishing liquid therebetween, said polishing apparatus including a dressing apparatus for dressing said polishing cloth to renew said polishing cloth for continued polishing, said dressing apparatus comprising: at least one nozzle for spraying a fluid jet against said surface of said polishing cloth; and means for moving said nozzle over said surface of said polishing cloth and for varying the time that said fluid jet impacts onto different areas thereof.
Claim 51
Dependent Claim
18 words
An apparatus as claimed in claim 46, further comprising means to blend cavitation bubbles into said fluid jet.
Claim 52
Dependent Claim
27 words
An apparatus as claimed in claim 46, further comprising a cover covering said nozzle and said polishing cloth to prevent splashing of fluid from said fluid jet.
Claim 53
Dependent Claim
42 words
An apparatus as claimed in claim 46, wherein said polishing cloth is mounted on a rotatable turntable, and further comprising means for varying the speed of rotation of said turntable during movement of said nozzle over said surface of said polishing cloth.
Claim 54
Dependent Claim
32 words
An apparatus as claimed in claim 46, wherein said nozzle is supported by a nozzle support member, and said means comprises means for moving said nozzle support member over the polishing cloth.
Claim 55
Dependent Claim
92 words
A dressing apparatus for dressing a polishing cloth to be employed in a polishing apparatus used for polishing an object by urging a surface of the object against a surface of the polishing cloth while causing relative movement therebetween and supplying a polishing liquid therebetween, said dressing apparatus comprising: at least one nozzle for spraying a fluid jet against the surface of the polishing cloth; and means for moving said nozzle over the surface of the polishing cloth and for varying the time that said fluid jet impacts onto different areas thereof.
Claim 56
Dependent Claim
92 words
A dressing apparatus for dressing a polishing cloth to be employed in a polishing apparatus used for polishing an object by urging a surface of the object against a surface of the polishing cloth while causing relative movement therebetween and supplying a polishing liquid therebetween, said dressing apparatus comprising: at least one nozzle for spraying a fluid jet against the surface of the polishing cloth; and means for moving said nozzle over the surface of the polishing cloth and for varying the time that said fluid jet impacts onto different areas thereof.
Claim 57
Dependent Claim
18 words
An apparatus as claimed in claim 51, further comprising means to blend cavitation bubbles into said fluid jet.
Claim 58
Dependent Claim
32 words
An apparatus as claimed in claim 51, wherein said nozzle is supported by a nozzle support member, and said means comprises means for moving said nozzle support member over the polishing cloth.
Claim 59
Independent Claim
83 words
A method of dressing a polishing cloth employed in a polishing operation wherein a surface of an object is polished by urging said surface against a surface of the polishing cloth while causing relative rotation therebetween and supplying a polishing liquid therebetween, said method comprising: spraying a fluid jet from a nozzle against said surface of said polishing cloth; and moving said nozzle over said surface of said polishing cloth and varying the time that said fluid jet impacts onto different areas thereof.
Claim 60
Independent Claim
83 words
A method of dressing a polishing cloth employed in a polishing operation wherein a surface of an object is polished by urging said surface against a surface of the polishing cloth while causing relative rotation therebetween and supplying a polishing liquid therebetween, said method comprising: spraying a fluid jet from a nozzle against said surface of said polishing cloth; and moving said nozzle over said surface of said polishing cloth and varying the time that said fluid jet impacts onto different areas thereof.
Claim 61
Dependent Claim
16 words
A method as claimed in claim 54, further comprising blending cavitation bubbles into said fluid jet.
Claim 62
Dependent Claim
25 words
A method as claimed in claim 54, further comprising covering said nozzle and said polishing cloth to prevent splashing of fluid from said fluid jet.
Claim 63
Dependent Claim
15 words
A method as claimed in claim 54, wherein said fluid jet comprises a water jet.
Claim 64
Dependent Claim
40 words
A method as claimed in claim 54, wherein said polishing cloth is mounted on a rotatable turntable, and further comprising varying the speed of rotation of said turntable during movement of said nozzle over said surface of said polishing cloth.
Claim 65
Dependent Claim
30 words
A method as claimed in claim 54, wherein said nozzle is supported by a nozzle support member, and said moving comprises moving said nozzle support member over said polishing cloth.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-02-09 | 2001-08-11 | 2002-02-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-02-09 | 2005-08-11 | 2006-02-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-02-09 | 2009-08-11 | 2010-02-10 | $7700.00 | Window Closed / Lapsed |