Edge overlay measurement target for sub-0.5 micron ground rules

Claim 2

A target for determining bias or overlay error in a substrate formed by a lithographic process comprising: a pair of first arrays of elements on a substrate, each first array comprising a plurality of spaced, substantially parallel elements having a length and a width, ends of each element in each first array being aligned along straight lines parallel to each other at a first angle to the length of each element and forming an array edge, said first arrays being spaced from each other and having substantially parallel array edges; and at least one second array of elements on a substrate, said second array comprising a plurality of spaced, substantially parallel elements having a length and a width, ends of said elements being aligned along straight lines parallel to each other at a second angle to the length of each element and forming at least two array edges; said first and second arrays overlying each other such that: i) said elements of said first and second arrays are substantially parallel; ii) one of the edges of said second array intersects with one of the edges of one said first arrays; and iii) the other of the edges of said second array intersects with one of the edges of the other of said first arrays; whereby said bias or overlay error is determinable by locating the points of intersection of the edges of said second array with the edges of said first arrays and measuring the degree of separation of the intersection points.

Claim 3

The target of claim 1 wherein the width of each of said elements corresponds to the minimum critical dimension of the lithographic process.

Claim 4

The target of claim 1 wherein the width and spacing of said elements in said first and second arrays are equal.

Claim 5

The target of claim 1 wherein the elements in each of said spaced first arrays are substantially aligned with each other.

Claim 6

The target of claim 1 wherein said first angle is 90 degrees and said second angle is greater or less than 90 degrees.

Claim 7

The target of claim 1 wherein said second angle is 90 degrees and said first angle is greater or less than 90 degrees.

Claim 8

The target of claim 1 wherein the bias is proportional to the difference between the locations of said intersection points relative to a fixed point on one of said arrays.

Claim 9

The target of claim 1 wherein the length of the elements of said arrays are parallel to an X-axis for determining said bias or overlay error in the X direction.

Claim 10

The target of claim 8 further including: a pair of third arrays of elements on a substrate, each third array comprising a plurality of spaced, substantially parallel elements having a length and a width, ends of each element in each third array being aligned along straight lines parallel to each other at a third angle to the length of each element and forming an array edge, said third arrays being spaced from each other and having substantially parallel array edges; and at least one fourth array of elements on a substrate, said fourth array comprising a plurality of spaced, substantially parallel elements having a length and a width, ends of said elements being aligned along straight lines parallel to each other at a fourth angle to the length of each element and forming at least two array edges; the length of the elements of said arrays being aligned along a Y-axis; said third and fourth arrays overlying each other such that: i) said elements of said third and fourth arrays are substantially parallel; ii) one of the edges of said fourth array intersects with one of the edges of one said third arrays; and iii) the other of the edges of said fourth array intersects with one of the edges of the other of said third arrays; whereby said bias or overlay error is determinable in the Y direction by locating the points of intersection of the edges of said fourth array with the edges of said third arrays and measuring the degree of separation of the intersection points.

Claim 11

The target of claim 1 wherein the width of each of said elements is less than the length of each element.

Claim 12

The target of claim 1 wherein said first and second arrays are located on the same level on said substrate.

Claim 13

The target of claim 1 wherein said first and second arrays are located on different levels on said substrate.

Claim 14

The target of claim 9 wherein said second and fourth angles are 90 degrees and said first and third angles are greater or less than 90 degrees.

Claim 15

The target of claim 9 wherein the bias is proportional to the difference between the locations of said intersection points relative to a fixed point on one of said arrays.

Claim 16

The target of claim 9 wherein the overlay error is proportional to the sum of the locations of said intersection points relative to a fixed point on one of said arrays.

Claim 17

A target for determining bias or overlay error in a substrate formed by a lithographic process comprising: a pair of first vernier arrays of elements on said substrate, each first array comprising a plurality of spaced, substantially parallel elements having a length and a width, ends of each element in each first array being aligned along straight lines parallel to each other at a first angle to the length of each element and forming an array edge, said first arrays being spaced from each other and having substantially parallel array edges; at least one second vernier array of elements on said substrate, said second array comprising a plurality of spaced, substantially parallel elements having a length and a width, ends of said elements being aligned along straight lines parallel to each other at a second angle to the length of each element and forming at least two array edges; at least one of said first or second vernier arrays having element width and spacing between adjacent elements corresponding to a minimum feature formed in said lithographic process; said first and second vernier arrays overlying each other such that: i) said elements of said first and second arrays are substantially parallel; ii) one of the edges of said second array intersects with one of the edges of one said first arrays; and iii) the other of the edges of said second array intersects with one of the edges of the other of said first arrays; and at least one image shortening array on said substrate, said image shortening array comprising a plurality of spaced, substantially parallel elements having a length and a width, the element width and spacing between adjacent elements corresponding to a minimum feature formed in said lithographic process, said image shortening array having ends of said elements forming an array edge spaced from the edge of said first or second vernier arrays having corresponding element width and element spacing; whereby said bias or overlay error is determinable by: i) locating the points of intersection of the edges of said second vernier array with the edges of said first vernier arrays and measuring the degree of separation of the intersection points, and ii) measuring the separation between adjacent edges of the image shortening array and the one of the first or second vernier arrays having corresponding element width and element spacing.

Claim 18

A target for determining bias or overlay error in a substrate formed by a lithographic process comprising: a pair of first vernier arrays of elements on said substrate, each first array comprising a plurality of spaced, substantially parallel elements having a length and a width, ends of each element in each first array being aligned along straight lines parallel to each other at a first angle to the length of each element and forming an array edge, said first arrays being spaced from each other and having substantially parallel array edges; at least one second vernier array of elements on said substrate, said second array comprising a plurality of spaced, substantially parallel elements having a length and a width, ends of said elements being aligned along straight lines parallel to each other at a second angle to the length of each element and forming at least two array edges; at least one of said first or second vernier arrays having element width and spacing between adjacent elements corresponding to a minimum feature formed in said lithographic process; said first and second vernier arrays overlying each other such that: i) said elements of said first and second arrays are substantially parallel; ii) one of the edges of said second array intersects with one of the edges of one said first arrays; and iii) the other of the edges of said second array intersects with one of the edges of the other of said first arrays; and at least one image shortening array on said substrate, said image shortening array comprising a plurality of spaced, substantially parallel elements having a length and a width, the element width and spacing between adjacent elements corresponding to a minimum feature formed in said lithographic process, said image shortening array having ends of said elements forming an array edge spaced from the edge of said first or second vernier arrays having corresponding element width and element spacing; whereby said bias or overlay error is determinable by: i) locating the points of intersection of the edges of said second vernier array with the edges of said first vernier arrays and measuring the degree of separation of the intersection points, and ii) measuring the separation between adjacent edges of the image shortening array and the one of the first or second vernier arrays having corresponding element width and element spacing.

Claim 19

The target of claim 16 wherein the width of each of said elements corresponds to the minimum critical dimension of the lithographic process.

Claim 20

The target of claim 16 wherein the width and spacing of said elements in said arrays are equal.

Claim 21

The target of claim 16 wherein the elements in each of said spaced first vernier arrays and said image shortening array are substantially aligned with each other.

Claim 22

The target of claim 16 wherein said first angle is 90 degrees and said second angle is greater or less than 90 degrees.

Claim 23

The target of claim 16 wherein said second angle is 90 degrees and said first angle is greater or less than 90 degrees.

Claim 24

The target of claim 16 wherein the bias is proportional to the difference between the locations of said intersection points relative to a fixed point on one of said arrays.

Claim 25

The target of claim 16 wherein the overlay error is proportional to the sum of the locations of said intersection points relative to a fixed point on one of said arrays.

Claim 26

The target of claim 16 wherein the length of the elements of said arrays are aligned parallel to an X-axis for determining said bias or overlay error in the X direction.

Claim 27

The target of claim 24 further including additional vernier and image shortening arrays having elements whose lengths are parallel to a Y-axis for determining said bias or overlay error in the Y direction.

Claim 28

The target of claim 16 wherein the width of each of said elements is less than the length of each element.

Claim 29

The target of claim 16 wherein said first and second vernier arrays are located on the same level on said substrate.

Claim 30

The target of claim 16 wherein said first and second vernier arrays are located on different levels on said substrate.

Claim 31

A target for determining overlay error in a substrate formed by a lithographic process comprising: first and second sets of image shortening arrays on said substrate, each image shortening array comprising a plurality of spaced, substantially parallel elements having a length and a width, the element width and spacing between adjacent elements corresponding to a minimum feature formed in said lithographic process, said image shortening array having ends of said elements forming an array edge; said first set of image shortening arrays located on one level of said substrate and comprising a first pair of said arrays having substantially parallel array edges and spaced from each other in an X direction and a second pair of said arrays having substantially parallel array edges and spaced from each other in a Y direction and; said second set of image shortening arrays located on another level of said substrate and comprising a third pair of said arrays having substantially parallel array edges and spaced from each other in an X direction different from the X direction spacing of said first pair of arrays and a fourth pair of said arrays having substantially parallel array edges and spaced from each other in a Y direction different from the Y direction spacing of said second pair of arrays; said first and second sets of arrays being overlaid such that each of said first and third pairs of arrays are separated in the X direction and each of said second and fourth pairs of arrays are separated in the Y direction, whereby overlay error is determinable by determining the center of each set of image shortening arrays using edges of each pair of arrays and measuring any difference between the centers of said first and second set of image shortening arrays.

Claim 32

A target for determining overlay error in a substrate formed by a lithographic process comprising: first and second sets of image shortening arrays on said substrate, each image shortening array comprising a plurality of spaced, substantially parallel elements having a length and a width, the element width and spacing between adjacent elements corresponding to a minimum feature formed in said lithographic process, said image shortening array having ends of said elements forming an array edge; said first set of image shortening arrays located on one level of said substrate and comprising a first pair of said arrays having substantially parallel array edges and spaced from each other in an X direction and a second pair of said arrays having substantially parallel array edges and spaced from each other in a Y direction and; said second set of image shortening arrays located on another level of said substrate and comprising a third pair of said arrays having substantially parallel array edges and spaced from each other in an X direction different from the X direction spacing of said first pair of arrays and a fourth pair of said arrays having substantially parallel array edges and spaced from each other in a Y direction different from the Y direction spacing of said second pair of arrays; said first and second sets of arrays being overlaid such that each of said first and third pairs of arrays are separated in the X direction and each of said second and fourth pairs of arrays are separated in the Y direction, whereby overlay error is determinable by determining the center of each set of image shortening arrays using edges of each pair of arrays and measuring any difference between the centers of said first and second set of image shortening arrays.

Claim 33

The target of claim 29 wherein the width of each of said elements corresponds to the minimum critical dimension of the lithographic process.

Claim 34

The target of claim 29 wherein the width and spacing of said elements in said arrays are equal.

Claim 35

The target of claim 29 wherein the elements in each of said image shortening arrays are substantially aligned with each other.

Claim 36

The target of claim 29 wherein the width of each of said elements is less than the length of each element.