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Patent US5703979A successfully refreshed from Google Patents.
US5703979A
Expired / Lapsed
US
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Cylindrical fiber probe devices
Assignee: Nokia of America Corp
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Filing: 1995-10-26
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Granted: 1997-12-30
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Expires: 2015-10-26
Abstract
Abstract This invention involves a fiber probe device and a method of making it. The probe includes a relatively thick upper cylindrical region, typically in the form of a solid right circular cylinder, terminating in a tapered region that terminates in a relatively thin lower cylindrical region (tip), typically also in the form of a solid right circular cylinder, the lower region having a width (diameter) in the approximate range 0.01 μm to 150 μm.
Inventors
- 👤 Robert William Filas
- 👤 Herschel Maclyn Marchman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 21:49
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/02; H01J9/022; H01J9/025; B; B82; B82Y; B82Y20/00; B82Y35/00; C; C03; C03C; C03C25/00; C03C25/66; C03C25/68; G; G01; G01Q; G01Q60/00; G01Q60/18; G01Q60/22; G02; G02B; G02B6/00; G02B6/24; G02B6/241; G02B6/245; G02B6/36; G02B6/3616; G02B6/3624; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/875; Y10S977/878
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
70 words
A probe device comprising: a fiber segment having a relatively thick upper cylindrical region terminating in a tapered region that terminates in a relatively thin right cylindrical lower region; the lower cylindrical portion having a maximum width in the approximate range of 0.01 μm to 150 μm and terminating at its bottom extremity in an essentially planar end surface oriented perpendicular to the axis of the thin right cylindrical region.
Claim 2
Dependent Claim
70 words
A probe device comprising: a fiber segment having a relatively thick upper cylindrical region terminating in a tapered region that terminates in a relatively thin right cylindrical lower region; the lower cylindrical portion having a maximum width in the approximate range of 0.01 μm to 150 μm and terminating at its bottom extremity in an essentially planar end surface oriented perpendicular to the axis of the thin right cylindrical region.
Claim 3
Dependent Claim
25 words
The probe device of claim 1 in which the thin cylindrical region has a height in the approximate range of 0.05 μm to 30 μm.
Claim 4
Dependent Claim
25 words
The probe device of claim 1 in which the thin cylindrical region has a height in the approximate range of 1 μm to 10 μm.
Claim 5
Dependent Claim
27 words
The probe device of claim 1 in which the maximum width of the thin cylindrical region is in the approximate range of 0.05 μm to 0.2 μm.
Claim 6
Dependent Claim
27 words
The probe device of claim 1 in which the maximum width of the thin cylindrical region is in the approximate range of 0.05 μm to 0.5 μm.
Claim 7
Dependent Claim
21 words
The probe device recited in claim 1 further including a metallic layer located on the sidewall of the lower cylindrical region.
Claim 8
Dependent Claim
25 words
A metrological method including moving the probe device recited in claims 1, 2, 3, 4, 5, or 6 across a surface of a sample body.
Claim 9
Dependent Claim
132 words
A probe device comprising: a fiber segment having a relatively thick upper cylindrical region terminating in a tapered region that terminates in a relatively thin right cylindrical lower region; the thin right cylindrical lower region having a maximum width in the approximate range of 0.01 μm to 150 μm and terminating at its bottom extremity in an essentially planar end surface oriented perpendicular to the axis of the thin right cylindrical lower region, the fiber segment having at most one other right cylindrical region, said at most one other right cylindrical region being located above the thick upper cylindrical region, said at most one other right cylindrical region, said thin right cylindrical lower region, and said relatively thick upper cylindrical region having respective maximum widths that are mutually different from each other.
Claim 10
Dependent Claim
132 words
A probe device comprising: a fiber segment having a relatively thick upper cylindrical region terminating in a tapered region that terminates in a relatively thin right cylindrical lower region; the thin right cylindrical lower region having a maximum width in the approximate range of 0.01 μm to 150 μm and terminating at its bottom extremity in an essentially planar end surface oriented perpendicular to the axis of the thin right cylindrical lower region, the fiber segment having at most one other right cylindrical region, said at most one other right cylindrical region being located above the thick upper cylindrical region, said at most one other right cylindrical region, said thin right cylindrical lower region, and said relatively thick upper cylindrical region having respective maximum widths that are mutually different from each other.
Claim 11
Dependent Claim
25 words
The probe device of claim 8 in which the thin cylindrical region has a height in the approximate rnge of 0.05 μm to 30 μm.
Claim 12
Dependent Claim
25 words
The probe device of claim 8 in which the thin cylindrical region has a height in the approximate rnge of 1 μm to 10 μm.
Claim 13
Dependent Claim
26 words
The probe device of claim 8 in which the maximum width of the thin cylindrical regionis in the approximate rnge of 0.05 μm to 0.2 μm.
Claim 14
Dependent Claim
26 words
The probe device of claim 9 in which the maximum width of the thin cylindrical regionis in the approximate rnge of 0.05 μm to 0.2 μm.
Claim 15
Dependent Claim
20 words
The probe device of claim 8 further including a metallic layer located on the sidewall of the lower cylindrical region.
Claim 16
Dependent Claim
25 words
A metrological method including moving the probe device recited in claims 8, 9, 10, 11, 12, or 13 across a surface of a sample body.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-12-29 | 2001-06-30 | 2001-12-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-12-29 | 2005-06-30 | 2005-12-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-12-29 | 2009-06-30 | 2009-12-30 | $7700.00 | Window Closed / Lapsed |