Abrasive particle, method for producing the same, and method of use of the same

Claim 1

An abrasive particle which has an average particle size of 2 μm or less, and which comprises (a) 100 parts by weight of at least one metal oxide selected from the group consisting of aluminum oxide and silicon oxide and (b) 5 to 25 parts by weight of cerium as cerium oxide.

Claim 7

A method for producing abrasive particles, which comprises a step of suspending in a solvent at least one compound selected from the group consisting of aluminum oxide having an average particle size of 2 μm or less in an amount of 100 parts by weight, silicon oxide having an average particle size of 2 μm or less in an amount of 100 parts by weight and precursor aluminum or silicon oxide which is converted by calcining to aluminum oxide or silicon oxide having an average particle size of 2 μm or less in an amount of 100 parts by weight to form a suspension; a step of mixing into the suspension a cerium compound in an amount of 5 to 25 parts by weight in terms of cerium, wherein the cerium compound is converted to cerium oxide by calcining to form a mixture; a step of drying the mixture; and a step of calcining the dried mixture to obtain the abrasive particles having an average particle size of 2 μm or less, each of which comprises (a) 100 parts by weight of at least one metal oxide selected from the group consisting of aluminum oxide and silicon oxide and (b) 5 to 25 parts by weight of cerium as cerium oxide.

Claim 8

A method for producing abrasive particles, which comprises a step of suspending in a solvent at least one compound selected from the group consisting of aluminum oxide having an average particle size of 2 μm or less in an amount of 100 parts by weight, silicon oxide having an average particle size of 2 μm or less in an amount of 100 parts by weight and precursor aluminum or silicon oxide which is converted by calcining to aluminum oxide or silicon oxide having an average particle size of 2 μm or less in an amount of 100 parts by weight to form a suspension; a step of mixing into the suspension a cerium compound in an amount of 5 to 25 parts by weight in terms of cerium, wherein the cerium compound is converted to cerium oxide by calcining to form a mixture; a step of drying the mixture; and a step of calcining the dried mixture to obtain the abrasive particles having an average particle size of 2 μm or less, each of which comprises (a) 100 parts by weight of at least one metal oxide selected from the group consisting of aluminum oxide and silicon oxide and (b) 5 to 25 parts by weight of cerium as cerium oxide.

Claim 15

A method for planarizing an insulating film on a semiconductor substrate, which comprises polishing the insulating film formed on the semiconductor substrate using a polishing agent which comprises abrasive particles having an average particle size of 2 μm or less, and each of the abrasive particles comprising (a) 100 parts by weight of at least a metal oxide selected from the group consisting of aluminum oxide and silicon oxide and (b) 5 to 25 parts by weight of cerium in the form of cerium oxide.

Claim 16

A method for planarizing an insulating film on a semiconductor substrate, which comprises polishing the insulating film formed on the semiconductor substrate using a polishing agent which comprises abrasive particles having an average particle size of 2 μm or less, and each of the abrasive particles comprising (a) 100 parts by weight of at least a metal oxide selected from the group consisting of aluminum oxide and silicon oxide and (b) 5 to 25 parts by weight of cerium in the form of cerium oxide.

Claim 20

A method for producing abrasive particles, which comprises a step of suspending in a solvent at least one compound selected from the group consisting of aluminum oxide having an average particle size of 2 μm or less in an amount of 100 parts by weight, silicon oxide having an average particle size of 2 μm or less in an amount of 100 parts by weight and precursor aluminum or silicon oxide which is converted by calcining at a temperature of from 600° C. to 1100° C. to aluminum oxide or silicon oxide having an average particle size of 2 μm or less in an amount of 100 parts by weight to form a suspension; a step of mixing into the suspension a cerium compound in an amount of 5 to 25 parts by weight in terms of cerium, wherein the cerium compound is converted to cerium oxide by calcining to form a mixture; a step of drying the mixture; and a step of calcining the dried mixture to obtain the abrasive particles having an average particle size of 2 μm or less, each of which comprises (a) 100 parts by weight of at least one metal oxide selected from the group consisting of aluminum oxide and silicon oxide and (b) 5 to 25 parts by weight of cerium as cerium oxide, wherein said aluminum oxide is a transition alumina mainly containing γ-alumina.

Claim 21

A method for producing abrasive particles, which comprises a step of suspending in a solvent at least one compound selected from the group consisting of aluminum oxide having an average particle size of 2 μm or less in an amount of 100 parts by weight, silicon oxide having an average particle size of 2 μm or less in an amount of 100 parts by weight and precursor aluminum or silicon oxide which is converted by calcining at a temperature of from 600° C. to 1100° C. to aluminum oxide or silicon oxide having an average particle size of 2 μm or less in an amount of 100 parts by weight to form a suspension; a step of mixing into the suspension a cerium compound in an amount of 5 to 25 parts by weight in terms of cerium, wherein the cerium compound is converted to cerium oxide by calcining to form a mixture; a step of drying the mixture; and a step of calcining the dried mixture to obtain the abrasive particles having an average particle size of 2 μm or less, each of which comprises (a) 100 parts by weight of at least one metal oxide selected from the group consisting of aluminum oxide and silicon oxide and (b) 5 to 25 parts by weight of cerium as cerium oxide, wherein said aluminum oxide is a transition alumina mainly containing γ-alumina.