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US5696452A
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Arrangement and method for improving room-temperature testability of CMOS integrated circuits optimized for cryogenic temperature operation
Assignee: Intersil Americas LLC
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Filing: 1995-08-08
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Granted: 1997-12-09
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Expires: 2015-08-08
Abstract
Abstract Room temperature-testing of an MOS field effect transistor architecture, whose parameters have been optimized for operation at cryogenic temperatures, is facilitated by applying a prescribed reverse body-to-source voltage bias, that modifies the variation of the drain-to-source current vs. gate-to-source voltage characteristic, so as to shift the gate threshold voltage to a value corresponding to the device operating at its optimally designed cryogenic temperature. The magnitude of this back bias voltage is set at a value which adds to the number of charges required to balance the gate voltage before an inversion condition is achieved. In effect, the back bias causes the depletion layer beneath the gate to be expanded into the body beneath the gate, thereby compensating for what would otherwise be depletion mode operation, if the cryogenically designed MOS device were placed at room temperature. This allows the cryogenic performance of the MOS field effect transistor to be tested at room temperature, thereby substantially reducing manufacturing cost. Upon completion of testing of the circuit to evaluate its performance at cryogenic temperatures, the back-bias is removed, so as to allow normal operation in the circuit's intended cryogenic environment.
Inventors
- 👤 Donald F. Hemmenway
- 👤 John T. Gasner
- 👤 William R. Young
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:06
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/2607; G01R31/2621
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
140 words
A method of testing a semiconductor circuit device comprising the steps of: (a) providing a semiconductor circuit device which, during normal operation, is to be used at a first temperature; (b) placing said semiconductor circuit device at a second temperature, different from said first temperature at which said semiconductor device is to be used; (c) applying a prescribed stimulus, that is exclusive of a stimulus normally applied at said first temperature, to said semiconductor device as placed at said second temperature in step (b), so as to cause said semiconductor device to behave as though said semiconductor device were at said first temperature; and (d) conducting a test of said semiconductor circuit device during the application of said prescribed stimulus of step (c), so as to obtain an evaluation of the performance of said semiconductor device at said first temperature.
Claim 2
Independent Claim
140 words
A method of testing a semiconductor circuit device comprising the steps of: (a) providing a semiconductor circuit device which, during normal operation, is to be used at a first temperature; (b) placing said semiconductor circuit device at a second temperature, different from said first temperature at which said semiconductor device is to be used; (c) applying a prescribed stimulus, that is exclusive of a stimulus normally applied at said first temperature, to said semiconductor device as placed at said second temperature in step (b), so as to cause said semiconductor device to behave as though said semiconductor device were at said first temperature; and (d) conducting a test of said semiconductor circuit device during the application of said prescribed stimulus of step (c), so as to obtain an evaluation of the performance of said semiconductor device at said first temperature.
Claim 3
Dependent Claim
16 words
A method according to claim 1, wherein said first temperature is lower than said second temperature.
Claim 4
Dependent Claim
14 words
A method according to claim 1, wherein said second temperature corresponds to room temperature.
Claim 5
Dependent Claim
15 words
A method according to claim 3, wherein said first temperature corresponds to a cryogenic temperature.
Claim 6
Dependent Claim
70 words
A method according to claim 1, wherein said semiconductor device comprises an insulated gate field effect transistor having a body, a source, a drain and a gate, and wherein step (c) comprises applying a prescribed reverse voltage bias to said body relative to said source, that increases the gate threshold voltage of said field effect transistor to a value as through said field effect transistor were at said first temperature.
Claim 7
Dependent Claim
79 words
A method according to claim 1, wherein said semiconductor device comprises a CMOS field effect transistor structure, that includes a first field effect transistor having a body, a source, a drain and a gate, and wherein step (c) comprises applying a prescribed reverse voltage bias to said body relative to said source, that increases the gate threshold voltage of said first field effect transistor to a value as through said first field effect transistor were at said first temperature.
Claim 8
Independent Claim
119 words
A method of testing a semiconductor circuit device comprising the steps of: (a) providing a semiconductor circuit device which, during normal operation, is to be used at a first temperature; (b) placing said semiconductor circuit device at a second temperature, different from said first temperature at which said semiconductor device is to be used; (c) applying a prescribed electrical stimulus to said semiconductor device that causes said semiconductor device to behave as though said semiconductor device were at said first temperature; and (d) conducting a test of said semiconductor circuit device during the application of said prescribed electrical stimulus of step (c), so as to obtain an evaluation of the performance of said semiconductor device at said first temperature.
Claim 9
Independent Claim
119 words
A method of testing a semiconductor circuit device comprising the steps of: (a) providing a semiconductor circuit device which, during normal operation, is to be used at a first temperature; (b) placing said semiconductor circuit device at a second temperature, different from said first temperature at which said semiconductor device is to be used; (c) applying a prescribed electrical stimulus to said semiconductor device that causes said semiconductor device to behave as though said semiconductor device were at said first temperature; and (d) conducting a test of said semiconductor circuit device during the application of said prescribed electrical stimulus of step (c), so as to obtain an evaluation of the performance of said semiconductor device at said first temperature.
Claim 10
Dependent Claim
74 words
A method according to claim 7, wherein operational condition corresponds to a first temperature, and said second operational condition corresponds to a second temperature, and wherein step (b) comprises placing said semiconductor circuit device at said second step (c) comprises applying a prescribed electrical voltage bias to said semiconductor device at said second temperature, that causes an attribute of said semiconductor device to behave as though said semiconductor device were at said first temperature.
Claim 11
Dependent Claim
16 words
A method according to claim 8, wherein said first temperature is lower than said second temperature.
Claim 12
Dependent Claim
14 words
A method according to claim 8, wherein said second temperature corresponds to room temperature.
Claim 13
Dependent Claim
15 words
A method according to claim 10, wherein said first temperature corresponds to a cryogenic temperature.
Claim 14
Dependent Claim
70 words
A method according to claim 8, wherein said semiconductor device comprises an insulated gate field effect transistor having a body, a source, a drain and a gate, and wherein step (c) comprises applying a prescribed reverse voltage bias to, said body relative to said source, that increases the gate threshold voltage of said field effect transistor to a value as through said field effect transistor were at said first temperature.
Claim 15
Dependent Claim
79 words
A method according to claim 8, wherein said semiconductor device comprises a CMOS field effect transistor structure, that includes a first field effect transistor having a body, a source, a drain and a gate, and wherein step (c) comprises applying a prescribed reverse voltage bias to said body relative to said source, that increases the gate threshold voltage of said first field effect transistor to a value as through said first field effect transistor were at said first temperature.
Claim 16
Dependent Claim
120 words
A method according to claim 8, wherein said semiconductor device comprises a field effect transistor having a body, a source, a drain and a gate, and wherein (b) comprises placing said semiconductor circuit device at room temperature, step (c) comprises applying a prescribed reverse voltage bias to said body relative to said source, that increases the gate threshold voltage of said field effect transistor to a value as through said field effect transistor were at a cryogenic temperature, and step (d) comprises conducting a test of said field effect transistor during the application of said prescribed reverse voltage bias in step (c), so as to obtain an evaluation of the performance of said field effect transistor at said cryogenic temperature.
Claim 17
Dependent Claim
104 words
A semiconductor circuit architecture comprising a semiconductor body containing a semiconductor device whose parameters have been established for operation at cryogenic temperatures, but which, if operated under the same biasing conditions at room temperature, would not function as designed, and a circuit arrangement that is operative to apply a prescribed voltage bias to said semiconductor body at room temperature, which prescribed voltage bias modifies the variation of an electrical characteristic of said device to a value corresponding to the device operating at its designed cryogenic temperature, thereby allowing the performance of said semiconductor device for cryogenic temperature operation to be evaluated at room temperature.
Claim 18
Dependent Claim
104 words
A semiconductor circuit architecture comprising a semiconductor body containing a semiconductor device whose parameters have been established for operation at cryogenic temperatures, but which, if operated under the same biasing conditions at room temperature, would not function as designed, and a circuit arrangement that is operative to apply a prescribed voltage bias to said semiconductor body at room temperature, which prescribed voltage bias modifies the variation of an electrical characteristic of said device to a value corresponding to the device operating at its designed cryogenic temperature, thereby allowing the performance of said semiconductor device for cryogenic temperature operation to be evaluated at room temperature.
Claim 19
Dependent Claim
124 words
A semiconductor circuit architecture according to claim 15, wherein said semiconductor device comprises an MOS field effect transistor having a body containing source and drain regions, and an insulated gate overlying a channel region of said body between said source and drain regions, and wherein said prescribed voltage bias comprises a back body bias, which reverse-biases a junction between said body and said source region, so as to modify drain-to-source current vs. gate-to-source voltage characteristics of said MOS field effect device and shift the gate threshold voltage to a value corresponding to MOS device operation at said cryogenic temperature, and thereby prevent depletion mode operation, were said MOS field effect device operated at room temperature at the same biasing conditions employed for cryogenic operation.
Claim 20
Dependent Claim
60 words
A semiconductor circuit architecture according to claim 15, wherein said semiconductor circuit device comprises a CMOS field effect transistor architecture, wherein body portions of a plurality of common polarity channel MOS devices are electrically tied together, and wherein said circuit arrangement comprises one or more bond pads through which back biasing of said common polarity channel MOS devices is effected.
Claim 21
Dependent Claim
78 words
A semiconductor circuit architecture according to claim 15, wherein said semiconductor circuit device comprises a CMOS field effect transistor architecture, wherein body portions of a plurality of common polarity channel MOS devices are electrically tied together, and wherein said circuit arrangement comprises an internal circuit of said body, exclusive of said common polarity channel MOS devices, which is connected to supply said prescribed voltage bias to said electrically tied together common polarity channel MOS devices at room temperature.
References Cited (Backward Citations)
US4916389A
Cited
US5325054A
Cited
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