Abstract This is a system and method of forming an electrical contact to the optical coating of an infrared detector. The method may comprise: forming thermal isolation trenches 22 in a substrate 20; depositing a trench filler 24 in the thermal isolation trenches 22; depositing a common electrode layer 31 over the thermal isolation trenches 22; depositing an optical coating 26 above the common electrode layer 31; mechanically thinning the substrate to expose the trench filler 24; etching to remove the trench filler 24 in the bias contact area; depositing a contact metal 34 on the backside of the substrate 20, wherein the contact metal 34 connects to the common electrode layer 31 at bias contact areas 34 around a periphery of the thermal isolation trenches; and etching the contact metal 34 and the trench filler 24 to form pixel mesas of the contact metal 34 and the substrate 20. Bias contact vias 23 may be formed in the bias contact areas and then filled with bias contact metal 49. Alternately, the bias contact vias may also be filled with the contact metal 34. The thermal isolation trenches may be formed by laser vaporization, ion milling or other equivalent methods. In addition, an elevation layer may be formed between the optical coating and the substrate to provide greater tolerances for ion milling. The elevation layer may be filled with a trench filler and then removed after milling. Alternately, the elevation layer may be filled with a metal 49 to connect the bias contact metal to the common electrode in the bias contact areas.
A method of forming an electrical contact to an optical coating of an infrared detector, said method comprising: a. forming a common electrode over a substrate; b. forming a first elevation layer over portions of said common electrode in a sensing area; c. forming a second elevation layer over portions of said common electrode in a bias contact area around a periphery of said sensing area; d. forming said optical coating over said first and said second elevation layers and said common electrode; e. thinning a backside of said substrate; f. forming a contact metal on a backside of said substrate; g. forming a first mask over said contact metal; h. etching said contact metal, said substrate, and said first and second elevation layers to produce thermal isolation trenches throughout said detector and biasing vias around said periphery of said detector; i. removing said first mask and said first elevation layer from said detector; j. forming a second mask over said thermal isolation trenches; k. forming a bias metal in said biasing vias; and l. removing said second mask from said detector.
Claim 2
Independent Claim
182 words
A method of forming an electrical contact to an optical coating of an infrared detector, said method comprising: a. forming a common electrode over a substrate; b. forming a first elevation layer over portions of said common electrode in a sensing area; c. forming a second elevation layer over portions of said common electrode in a bias contact area around a periphery of said sensing area; d. forming said optical coating over said first and said second elevation layers and said common electrode; e. thinning a backside of said substrate; f. forming a contact metal on a backside of said substrate; g. forming a first mask over said contact metal; h. etching said contact metal, said substrate, and said first and second elevation layers to produce thermal isolation trenches throughout said detector and biasing vias around said periphery of said detector; i. removing said first mask and said first elevation layer from said detector; j. forming a second mask over said thermal isolation trenches; k. forming a bias metal in said biasing vias; and l. removing said second mask from said detector.
Claim 3
Dependent Claim
20 words
The method of claim 1, wherein said etching said contact metal, said substrate and said elevation layer includes ion milling.
Claim 4
Dependent Claim
17 words
The method of claim 2, wherein said second elevation layer is removed with said first elevation layer.
Claim 5
Dependent Claim
28 words
The method of claim 3, wherein said method further includes filling a vacancy of said second elevation layer with said contact metal when said contact metal is formed.
Claim 6
Dependent Claim
30 words
The method of claim 3, wherein said method further includes filling a vacancy of said second elevation layer with said bias contact metal when said bias contact metal is formed.
Claim 7
Dependent Claim
22 words
The method of claim 2, wherein said depositing a second elevation layer includes depositing a metal to form said second elevation layer.