US5424544A — Inter-pixel thermal isolation for hybrid thermal …

Claim 1

Independent Claim 167 words

A hybrid thermal detector including a focal plane array mounted with a thermal isolation structure on an integrated circuit substrate, comprising: at least three thermal sensors in the focal plane array for providing a sensor signal output representative of thermal radiation incident to the focal plane array; a common electrode coupled to the thermal sensors, the common electrode having at least three slots formed intermediate the thermal sensors, the slots configured so that the common electrode supplies a potential to the thermal sensors; a non-reticulated, continuous optical coating sensitive to infrared radiation disposed over the common electrode; the thermal isolation structure disposed between the focal plane array and the integrated circuit substrate, the thermal isolation structure projecting from the integrated circuit substrate for mounting the focal plane array and for coupling the focal plane array to the integrated circuit substrate; and at least three contact pads, disposed on the integrated circuit substrate, for receiving the sensor signal output from the thermal sensors through the thermal isolation structure.

Claim 2

Dependent Claim 167 words

A hybrid thermal detector including a focal plane array mounted with a thermal isolation structure on an integrated circuit substrate, comprising: at least three thermal sensors in the focal plane array for providing a sensor signal output representative of thermal radiation incident to the focal plane array; a common electrode coupled to the thermal sensors, the common electrode having at least three slots formed intermediate the thermal sensors, the slots configured so that the common electrode supplies a potential to the thermal sensors; a non-reticulated, continuous optical coating sensitive to infrared radiation disposed over the common electrode; the thermal isolation structure disposed between the focal plane array and the integrated circuit substrate, the thermal isolation structure projecting from the integrated circuit substrate for mounting the focal plane array and for coupling the focal plane array to the integrated circuit substrate; and at least three contact pads, disposed on the integrated circuit substrate, for receiving the sensor signal output from the thermal sensors through the thermal isolation structure.

Claim 3

Dependent Claim 48 words

The detector of claim 1, wherein: each thermal sensor is associated with a pyroelectric element formed from barium strontium titanate; and the common electrode is coupled to one side of the pyroelectric element and a sensor signal electrode is coupled to the opposite side of the pyroelectric element.

Claim 4

Dependent Claim 38 words

The detector of claim 1, wherein the common electrode is formed from cermet having a metal concentration by weight of seventy percent to ninety percent and a corresponding ceramic concentration by weight of thirty percent to ten percent.

Claim 5

Dependent Claim 147 words

A hybrid thermal detector including a focal plane array mounted with a thermal isolation structure on an integrated circuit substrate, comprising: at least three thermal sensors in the focal plane array for providing a sensor signal output representative of thermal radiation incident to the focal plane array; a common electrode formed from cermet disposed over the thermal sensors for supplying a potential to the thermal sensors; an optical coating sensitive to infrared radiation disposed over the common electrode; the thermal isolation structure disposed between the focal plane array and the integrated circuit substrate, the thermal isolation structure projecting from the integrated circuit substrate for mounting the focal plane array and for coupling the thermal sensors to the integrated circuit substrate; and at least three contact pads, disposed on the integrated circuit substrate, for receiving the sensor signal output from the thermal sensors through the thermal isolation structure.

Claim 6

Dependent Claim 147 words

A hybrid thermal detector including a focal plane array mounted with a thermal isolation structure on an integrated circuit substrate, comprising: at least three thermal sensors in the focal plane array for providing a sensor signal output representative of thermal radiation incident to the focal plane array; a common electrode formed from cermet disposed over the thermal sensors for supplying a potential to the thermal sensors; an optical coating sensitive to infrared radiation disposed over the common electrode; the thermal isolation structure disposed between the focal plane array and the integrated circuit substrate, the thermal isolation structure projecting from the integrated circuit substrate for mounting the focal plane array and for coupling the thermal sensors to the integrated circuit substrate; and at least three contact pads, disposed on the integrated circuit substrate, for receiving the sensor signal output from the thermal sensors through the thermal isolation structure.

Claim 7

Dependent Claim 24 words

The detector of claim 4, wherein the common electrode is formed from cermet having a thermal conductivity of less than 2×10 -2 watts/centimeter/° C.

Claim 8

Dependent Claim 28 words

The detector of claim 4, wherein the optical coating has at least three slots formed therein, the slots disposed intermediate the thermal sensors to improve inter-pixel thermal isolation.

Claim 9

Dependent Claim 32 words

The detector of claim 4, wherein the optical coating has at least three slots formed therein, the slots disposed entirely around the periphery of the thermal sensors to improve inter-pixel thermal isolation.

Claim 10

Dependent Claim 75 words

The detector of claim 4, wherein: the optical coating has at least three first slots formed therein, the first slots disposed entirely around the periphery of the thermal sensors to improve inter-pixel thermal isolation; and the common electrode has at least three second slots formed therein, the second slots disposed intermediate the thermal sensors to improve inter-pixel thermal isolation, the second slots configured so that the common electrode supplies a potential to the thermal sensors.

Claim 11

Dependent Claim 13 words

The detector of claim 4, wherein the optical coating is formed from parylene.

Claim 12

Dependent Claim 48 words

The detector of claim 4, wherein: each thermal sensor is associated with a pyroelectric element formed from barium strontium titanate; and the common electrode is coupled to one side of the pyroelectric element and a sensor signal electrode is coupled to the opposite side of the pyroelectric element.

Claim 13

Dependent Claim 64 words

The detector of claim 4, wherein: each thermal sensor is associated with a pyroelectric element formed from barium strontium titanate; the common electrode is coupled to one side of the pyroelectric element and a sensor signal electrode is coupled to the opposite side of the pyroelectric element; and the common electrode forms at least three channels around the entire periphery of the pyroelectric element.

Claim 14

Independent Claim 201 words

A method of fabricating a hybrid thermal detection system having a focal plane array mounted with a thermal isolation structure on an integrated circuit substrate, comprising the steps of: forming the focal plane array from at least three thermal sensors that provide a sensor signal output representative of thermal radiation incident to the focal plane array; coupling a first side of the thermal sensors to a common electrode, the common electrode having at least three slots formed intermediate the thermal sensors, the slots configured so that the common electrode supplies a potential to the thermal sensors; forming a non-reticulated, continuous optical coating sensitive to infrared radiation disposed over the common electrode; providing the integrated circuit substrate with at least three contact pads for receiving the sensor signal output from the thermal sensors; forming the thermal isolation structure disposed between the focal plane array and the integrated circuit substrate, the thermal isolation structure formed in part from at least three mesa-type formations projecting from the integrated circuit substrate adjacent to the contact pads; and coupling a second side of the thermal sensors to the thermal isolation structure to establish a sensor signal flowpath from the thermal sensors to the integrated circuit substrate.

Claim 15

Independent Claim 201 words

A method of fabricating a hybrid thermal detection system having a focal plane array mounted with a thermal isolation structure on an integrated circuit substrate, comprising the steps of: forming the focal plane array from at least three thermal sensors that provide a sensor signal output representative of thermal radiation incident to the focal plane array; coupling a first side of the thermal sensors to a common electrode, the common electrode having at least three slots formed intermediate the thermal sensors, the slots configured so that the common electrode supplies a potential to the thermal sensors; forming a non-reticulated, continuous optical coating sensitive to infrared radiation disposed over the common electrode; providing the integrated circuit substrate with at least three contact pads for receiving the sensor signal output from the thermal sensors; forming the thermal isolation structure disposed between the focal plane array and the integrated circuit substrate, the thermal isolation structure formed in part from at least three mesa-type formations projecting from the integrated circuit substrate adjacent to the contact pads; and coupling a second side of the thermal sensors to the thermal isolation structure to establish a sensor signal flowpath from the thermal sensors to the integrated circuit substrate.

Claim 16

Dependent Claim 30 words

The method of fabricating the system as defined in claim 12, wherein the common electrode is formed from cermet having a thermal conductivity of less than 2×10 -2 watts/centimeter/° C.

Claim 17

Dependent Claim 56 words

The method of fabricating the system as defined in claim 12, further comprising the steps of: coupling one side of a pyroelectric element associated with each thermal sensor to the common electrode for receiving a potential; and coupling the opposite side of the pyroelectric element to an associated contact pad disposed on the integrated circuit substrate.

Claim 18

Independent Claim 188 words

A method of fabricating a hybrid thermal detection system having a focal plane array mounted with a thermal isolation structure on an integrated circuit substrate, comprising the steps of: forming the focal plane array from at least three thermal sensors that provide a sensor signal output representative of thermal radiation incident to the focal plane array; coupling a first side of the thermal sensors to a common electrode formed from thermally insulating material so that the common electrode provides a potential to the thermal sensors; forming an optical coating sensitive to infrared radiation disposed over the common electrode; providing the integrated circuit substrate with at least three contact pads for receiving the sensor signal output from the thermal sensors; forming the thermal isolation structure disposed between the focal plane array and the integrated circuit substrate, the thermal isolation structure formed in part from at least three mesa-type formations projecting from the integrated circuit substrate adjacent to the contact pads; and coupling a second side of the thermal sensors to the thermal isolation structure to establish a sensor signal flowpath from the thermal sensors to the integrated circuit substrate.

Claim 19

Independent Claim 188 words

A method of fabricating a hybrid thermal detection system having a focal plane array mounted with a thermal isolation structure on an integrated circuit substrate, comprising the steps of: forming the focal plane array from at least three thermal sensors that provide a sensor signal output representative of thermal radiation incident to the focal plane array; coupling a first side of the thermal sensors to a common electrode formed from thermally insulating material so that the common electrode provides a potential to the thermal sensors; forming an optical coating sensitive to infrared radiation disposed over the common electrode; providing the integrated circuit substrate with at least three contact pads for receiving the sensor signal output from the thermal sensors; forming the thermal isolation structure disposed between the focal plane array and the integrated circuit substrate, the thermal isolation structure formed in part from at least three mesa-type formations projecting from the integrated circuit substrate adjacent to the contact pads; and coupling a second side of the thermal sensors to the thermal isolation structure to establish a sensor signal flowpath from the thermal sensors to the integrated circuit substrate.

Claim 20

Dependent Claim 37 words

The method of fabricating the system as defined in claim 15, further comprising the step of forming at least three slots in the optical coating around the periphery of the thermal sensors to improve inter-pixel thermal isolation.

Claim 21

Dependent Claim 74 words

The method of fabricating the system as defined in claim 15, further comprising the steps of: forming at least three first slots in the optical coating around the periphery of the thermal sensors to improve inter-pixel thermal isolation; and forming at least three second slots in the common electrode intermediate the thermal sensors to improve inter-pixel thermal isolation, the second slots configured so that the common electrode supplies the potential to the thermal sensors.

Claim 22

Dependent Claim 56 words

The method of fabricating the system as defined in claim 15, further comprising the steps of: coupling one side of a pyroelectric element associated with each thermal sensor to the common electrode for receiving a potential; and coupling the opposite side of the pyroelectric element to an associated contact pad disposed on the integrated circuit substrate.

Claim 23

Dependent Claim 19 words

The method of fabricating the system as defined in claim 15, wherein the common electrode is formed from cermet.

Claim 24

Dependent Claim 19 words

The method of fabricating the system as defined in claim 15, wherein the optical coating is formed from parylene.

Claim 25

Dependent Claim 149 words

A hybrid thermal detector including a focal plane array mounted with a thermal isolation structure on an integrated circuit substrate, comprising: at least three thermal sensors in the focal plane array for providing a sensor signal output representative of thermal radiation incident to the focal plane array; a common electrode formed from thermally insulating material disposed over the thermal sensors for supplying a potential to the thermal sensors; an optical coating sensitive to infrared radiation disposed over the common electrode; the thermal isolation structure disposed between the focal plane array and the integrated circuit substrate, the thermal isolation structure projecting from the integrated circuit substrate for mounting the focal plane array and for coupling the thermal sensors to the integrated circuit substrate; and at least three contact pads, disposed on the integrated circuit substrate, for receiving the sensor signal output from the thermal sensors through the thermal isolation structure.

Claim 26

Dependent Claim 149 words

A hybrid thermal detector including a focal plane array mounted with a thermal isolation structure on an integrated circuit substrate, comprising: at least three thermal sensors in the focal plane array for providing a sensor signal output representative of thermal radiation incident to the focal plane array; a common electrode formed from thermally insulating material disposed over the thermal sensors for supplying a potential to the thermal sensors; an optical coating sensitive to infrared radiation disposed over the common electrode; the thermal isolation structure disposed between the focal plane array and the integrated circuit substrate, the thermal isolation structure projecting from the integrated circuit substrate for mounting the focal plane array and for coupling the thermal sensors to the integrated circuit substrate; and at least three contact pads, disposed on the integrated circuit substrate, for receiving the sensor signal output from the thermal sensors through the thermal isolation structure.

Claim 27

Dependent Claim 13 words

The detector of claim 21, wherein the common electrode is formed from cermet.

Claim 28

Dependent Claim 15 words

The detector of claim 21, wherein the common electrode is formed from a metal oxide.

Claim 29

Dependent Claim 27 words

The detector of claim 21, wherein the common electrode is formed from a thermally insulating material having a thermal conductivity of less than 2×10 -2 watts/centimeter/° C.

Claim 30

Dependent Claim 30 words

The detector of claim 21, wherein the common electrode is formed from a thermally insulating material chosen from the group consisting of tantalum nitride, tantalum oxide, and titanium oxide nitride.

Claim 31

Dependent Claim 28 words

The detector of claim 21, wherein the optical coating has at least three slots formed therein, the slots disposed intermediate the thermal sensors to improve inter-pixel thermal isolation.

Claim 32

Dependent Claim 32 words

The detector of claim 21, wherein the optical coating has at least three slots formed therein, the slots disposed entirely around the periphery of the thermal sensors to improve inter-pixel thermal isolation.

Claim 33

Dependent Claim 43 words

The detector of claim 21, wherein the common electrode has at least three slots formed therein, the slots disposed intermediate the thermal sensors to improve inter-pixel thermal isolation, the slots configured so that the common electrode supplies a potential to the thermal sensors.

Claim 34

Dependent Claim 75 words

The detector of claim 21, wherein: the optical coating has at least three first slots formed therein, the first slots disposed entirely around the periphery of the thermal sensors to improve inter-pixel thermal isolation; and the common electrode has at least three second slots formed therein, the second slots disposed intermediate the thermal sensors to improve inter-pixel thermal isolation, the second slots configured so that the common electrode supplies a potential to the thermal sensors.

Claim 35

Dependent Claim 48 words

The detector of claim 21, wherein: each thermal sensor is associated with a pyroelectric element formed from barium strontium titanate; and the common electrode is coupled to one side of the pyroelectric element and a sensor signal electrode is coupled to the opposite side of the pyroelectric element.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1998-06-12	1998-12-12	1999-06-13	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2002-06-12	2002-12-12	2003-06-13	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2006-06-12	2006-12-12	2007-06-13	$7700.00	Window Closed / Lapsed

Inter-pixel thermal isolation for hybrid thermal detectors

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