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US5689362A
Expired / Lapsed
US
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Acousto-optic deflector device
Assignee: Murata Manufacturing Co Ltd
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Filing: 1996-06-13
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Granted: 1997-11-18
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Expires: 2016-06-13
Abstract
Abstract An acousto-optic deflector device having a piezoelectric thin film and IDT formed on a substrate for deflecting a light by causing an SAW generated at an SAW generator region to interact with the light at a light waveguide region. The piezoelectric thin film is constructed of a first piezoelectric thin film having a relatively high resistance and a high piezoelectricity in the SAW generator region, and a second piezoelectric thin film having a smaller light propagation loss than the first piezoelectric thin film 3a in the light waveguide region.
Inventors
- 👤 Michio Kadota
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:34
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/29; G02F1/33; G02F1/335
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
124 words
An acousto-optic deflector device comprising: a substrate; a first piezoelectric thin film formed on the substrate and an interdigital transducer formed in contact with the first piezoelectric thin film to define a SAW generator region, said interdigital transducer being adapted to generate surface acoustic waves which are propagated through said first piezoelectric film along a propagation direction when an exciting voltage is applied thereto; a second piezoelectric thin film formed on the substrate in a light waveguide region which receives surface acoustic waves generated by the interdigital transducer; the first piezoelectric thin film exhibiting better piezoelectric characteristics and higher specific resistance than the second piezoelectric thin film, and the second piezoelectric thin film exhibiting less light propagation loss than the first piezoelectric thin film.
Claim 2
Dependent Claim
124 words
An acousto-optic deflector device comprising: a substrate; a first piezoelectric thin film formed on the substrate and an interdigital transducer formed in contact with the first piezoelectric thin film to define a SAW generator region, said interdigital transducer being adapted to generate surface acoustic waves which are propagated through said first piezoelectric film along a propagation direction when an exciting voltage is applied thereto; a second piezoelectric thin film formed on the substrate in a light waveguide region which receives surface acoustic waves generated by the interdigital transducer; the first piezoelectric thin film exhibiting better piezoelectric characteristics and higher specific resistance than the second piezoelectric thin film, and the second piezoelectric thin film exhibiting less light propagation loss than the first piezoelectric thin film.
Claim 3
Dependent Claim
39 words
The acousto-optic deflector device according to claim 1, wherein said first and second piezoelectric thin films are constructed of a thin film made of a material selected from the group consisting of ZnO, Ta 2 O 5 and AlN.
Claim 4
Dependent Claim
58 words
The acousto-optic deflector device according to claim 2, wherein said first piezoelectric thin film is constructed of a thin film made of a material selected from the group consisting of ZnO, Ta 2 O 5 and AlN, and said second piezoelectric thin film is constructed of a thin film made of a different material selected from that group.
Claim 5
Dependent Claim
20 words
The acousto-optic deflector device according to claim 1, wherein said first and second piezoelectric thin films are different in thickness.
Claim 6
Dependent Claim
38 words
The acousto-optic deflector device according to claim 1, wherein said first piezoelectric thin film is doped with an impurity to the extent that said first piezoelectric thin film has a specific resistance of 10 5 Ω·cm or larger.
Claim 7
Dependent Claim
44 words
The acousto-optic deflector device according to claim 5, wherein said impurity is at least one selected from the group consisting of Li, Cu, Ag, Au, Fe, Mn, Ni, Pd, Pt, Co, Rh, Co, Ir, Os, and oxides, nitrides and other compounds of these materials.
Claim 8
Dependent Claim
24 words
The acousto-optic deflector device according to claim 1, wherein said second piezoelectric thin film is constructed of a transparent or translucent piezoelectric thin film.
Claim 9
Dependent Claim
76 words
The acousto-optic deflector device according to claim 1, further including first and second prisms located on the surface of the second piezoelectric thin film, the first prism being for defracting an incoming light beam into the second piezoelectric film for propagation through the second piezoelectric thin film, the second prism being for receiving the light beam propagated through the second piezoelectric thin film and for defracting the light beam outside of the second piezoelectric thin film.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-11-17 | 2001-05-19 | 2001-11-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-11-17 | 2005-05-19 | 2005-11-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-11-17 | 2009-05-19 | 2009-11-18 | $7700.00 | Window Closed / Lapsed |