Patent US6144567A successfully refreshed from Google Patents.
US5686151A
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Method of forming a metal oxide film
Assignee: Toshiba Corp
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Filing: 1996-02-20
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Granted: 1997-11-11
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Expires: 2016-02-20
Abstract
Abstract Disclosed is method of forming a metal oxide film including the steps of introducing a gas containing a metal compound having at least one element selected from the group consisting of carbon and a halogen element, into a process chamber accommodating a substrate, introducing a gas containing a compound having a hydroxyl group into the process chamber, introducing a gas containing oxygen which has been converted to a plasma state, into the process chamber, and forming the metal oxide film on the substrate using the gas containing a metal compound, the gas containing a compound having a hydroxyl group, and the gas containing oxygen which has been converted to a plasma state.
Inventors
- 👤 Keitaro Imai
- 👤 Masahiro Kiyotoshi
- 👤 Haruo Okano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 13:18
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6336; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/408; H10B; H10B53/00; H10B53/30; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/682; H10P14/69; H10P14/692; H10P14/6938; H10P14/69398; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/734
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
107 words
A method of forming a metal oxide film comprising the steps of: introducing a gas containing a metal compound selected from the group consisting of acetyl acetonate series organometallic complex compounds, into a process chamber accommodating a substrate; introducing a gas containing an alcohol having a hydroxyl group and an organic group into said process chamber directly; introducing a gas containing oxygen which has been converted to a plasma state, into said process chamber; and reacting said organometallic complex compound with said alcohol and said oxygen which has been converted to a plasma state to form the metal oxide film on the substrate within the process chamber.
Claim 2
Independent Claim
107 words
A method of forming a metal oxide film comprising the steps of: introducing a gas containing a metal compound selected from the group consisting of acetyl acetonate series organometallic complex compounds, into a process chamber accommodating a substrate; introducing a gas containing an alcohol having a hydroxyl group and an organic group into said process chamber directly; introducing a gas containing oxygen which has been converted to a plasma state, into said process chamber; and reacting said organometallic complex compound with said alcohol and said oxygen which has been converted to a plasma state to form the metal oxide film on the substrate within the process chamber.
Claim 3
Dependent Claim
32 words
The method according to claim 1, wherein said gas containing an alcohol is introduced to said process chamber in at least two times the amount of said gas containing a metal compound.
Claim 4
Dependent Claim
21 words
The method according to claim 1, wherein said metal oxide film is made of a material having a perovskite-type crystal structure.
Claim 5
Dependent Claim
33 words
The method according to claim 3, wherein said material having a perovskite-type crystal structure is a metal titanate containing at least one metal selected from the group consisting of strontium, barium, and calcium.
Claim 6
Dependent Claim
17 words
The method according to claim 1, wherein said metal oxide film is made of a superconducting material.
Claim 7
Dependent Claim
27 words
The method according to claim 1, wherein said organometallic complex compound is at least one selected from the group consisting of Sr(dpm) 2 and Ba(dpm) 2 .
Claim 8
Dependent Claim
38 words
The method according to claim 1, wherein said metal oxide film is at least one selected from the group consisting of a strontium oxide film, a barium oxide film, a calcium oxide film, and a titanium oxide film.
Claim 9
Dependent Claim
25 words
The method according to claim 1, wherein said organic group is removed by means of said oxygen which has been converted to a plasma state.
Claim 10
Independent Claim
118 words
A method of forming a metal oxide film comprising the steps of: introducing a gas containing a metal acetyl acetonate containing halogen into a process chamber accommodating a substrate; preparing a mixed gas including a gas containing a compound having a hydroxyl group and a gas containing oxygen; exciting said mixed gas at a power sufficient to generate hydroxyl free radicals but insufficient to dissociate said hydroxyl radicals into oxygen and hydrogen atoms, to produce a plasma; introducing the mixed gas in the plasma state into said process chamber, wherein said hydroxyl free radicals act to suppress binding of fluorine atoms from said metal acetyl acetonate to a metal; and forming the metal oxide film on the substrate.
Claim 11
Independent Claim
118 words
A method of forming a metal oxide film comprising the steps of: introducing a gas containing a metal acetyl acetonate containing halogen into a process chamber accommodating a substrate; preparing a mixed gas including a gas containing a compound having a hydroxyl group and a gas containing oxygen; exciting said mixed gas at a power sufficient to generate hydroxyl free radicals but insufficient to dissociate said hydroxyl radicals into oxygen and hydrogen atoms, to produce a plasma; introducing the mixed gas in the plasma state into said process chamber, wherein said hydroxyl free radicals act to suppress binding of fluorine atoms from said metal acetyl acetonate to a metal; and forming the metal oxide film on the substrate.
Claim 12
Dependent Claim
17 words
The method according to claim 9, wherein said compound having a hydroxyl group is H 2 O.
Claim 13
Dependent Claim
17 words
The method according to claim 9, wherein said metal oxide film is made of a superconducting material.
Claim 14
Dependent Claim
27 words
The method according to claim 9, wherein said organometallic complex compound is at least one selected from the group consisting of Sr(hfa) 2 and Ba(hfa) 2 .
Claim 15
Dependent Claim
21 words
The method according to claim 9, wherein said metal oxide film is made of a material having a perovskite-type crystal structure.
Claim 16
Dependent Claim
33 words
The method according to claim 13, wherein said material having a perovskite-type crystal structure is a metal titanate containing at least one metal selected from the group consisting of strontium, barium, and calcium.
Claim 17
Dependent Claim
11 words
The method according to claim 9, wherein said halogen is fluorine.
Claim 18
Independent Claim
107 words
A method of forming a metal oxide film comprising the steps of: introducing a gas containing a metal compound selected from the group consisting of halogen-containing acetyl acetonate series organometallic complex compounds, into a process chamber accommodating a substrate; introducing a gas containing an alcohol having a hydroxyl group and an organic group into said process chamber directly; introducing a gas containing oxygen which has been converted to a plasma state, into said process chamber; and reacting said organometallic complex compound with said alcohol and said oxygen which has been converted to a plasma state to form the metal oxide film on the substrate within process chamber.
Claim 19
Independent Claim
107 words
A method of forming a metal oxide film comprising the steps of: introducing a gas containing a metal compound selected from the group consisting of halogen-containing acetyl acetonate series organometallic complex compounds, into a process chamber accommodating a substrate; introducing a gas containing an alcohol having a hydroxyl group and an organic group into said process chamber directly; introducing a gas containing oxygen which has been converted to a plasma state, into said process chamber; and reacting said organometallic complex compound with said alcohol and said oxygen which has been converted to a plasma state to form the metal oxide film on the substrate within process chamber.
Claim 20
Dependent Claim
32 words
The method according to claim 16, wherein said gas containing an alcohol is introduced to said process chamber in at least two times the amount of said gas containing a metal compound.
Claim 21
Dependent Claim
21 words
The method according to claim 16, wherein said metal oxide film is made of a material having a perovskite-type crystal structure.
Claim 22
Dependent Claim
33 words
The method according to claim 18, wherein said material having a perovskite-type crystal structure is a metal titanate containing at least one metal selected from the group consisting of strontium, barium and calcium.
Claim 23
Dependent Claim
17 words
The method according to claim 16, wherein said metal oxide film is made of a superconducting material.
Claim 24
Dependent Claim
37 words
The method according to claim 16, wherein said metal oxide film is at least one selected from the group consisting of a strontium oxide film, barium oxide film, a calcium oxide film, and a titanium oxide film.
Claim 25
Dependent Claim
11 words
The method according to claim 16, wherein said halogen is fluorine.
Claim 26
Dependent Claim
25 words
The method according to claim 16, wherein said organic group is removed by means of said oxygen which has been converted to a plasma state.
References Cited (Backward Citations)
US4771015A
Cited
JPS63178408A
Cited
JPS63303070A
Cited
US5262396A
Cited
JPH0285370A
Cited
JPH0337101A
Cited
JPH03174304A
Cited
US5124180A
Cited
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