Patent US5684856A successfully refreshed from Google Patents.
US5684856A
Expired / Lapsed
US
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Stage device and pattern transfer system using the same
Assignee: Canon Inc
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Filing: 1994-07-15
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Granted: 1997-11-04
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Expires: 2014-07-15
Abstract
Abstract A stage device includes a first, fine-motion driving system for moving a movable stage through a first range; and a second, relatively rough-motion driving system for moving the movable stage through a second range which is substantially of the same extent as the first range.
Inventors
- 👤 Hirohito Itoh
- 👤 Shinji Ohishi
- 👤 Kazunori Iwamoto
- 👤 Nobushige Korenaga
- 👤 Youzou Fukagawa
- 👤 Toshiya Asano
- 👤 Satoru Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 17:53
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7003; G03F9/7023; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716; G03F7/70725; G03F7/708; G03F7/70858; G03F7/709; H; H01; H01J; H01J37/00; H01J37/02; H01J37/20; H01J2237/00; H01J2237/20; H01J2237/202; H01J2237/20221; H01J2237/20228; H01J2237/20278; H01J2237/30; H01J2237/317; H01J2237/3175
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
55 words
A stage device, comprising: first, fine-motion driving means, comprising a linear motor, for moving a movable stage through a first range in a predetermined direction; and second, relatively rough-motion driving means for moving the movable stage through a second range in the predetermined direction, which is substantially of the same extent as the first range.
Claim 2
Dependent Claim
55 words
A stage device, comprising: first, fine-motion driving means, comprising a linear motor, for moving a movable stage through a first range in a predetermined direction; and second, relatively rough-motion driving means for moving the movable stage through a second range in the predetermined direction, which is substantially of the same extent as the first range.
Claim 3
Dependent Claim
15 words
A device according to claim 1, wherein said second driving means comprises a linear motor.
Claim 4
Dependent Claim
20 words
A device according to claim 1, wherein said second driving means uses a rotary drive force of a rotary motor.
Claim 5
Dependent Claim
15 words
A device according to claim 1, wherein said second driving means uses a gas pressure.
Claim 6
Dependent Claim
28 words
A device according to claim 4, wherein said second driving means comprises a gas cylinder and control means for controlling supply of a gas to said gas cylinder.
Claim 7
Dependent Claim
33 words
A device according to claim 1, wherein said second driving means and the movable stage are coupled with each other through a resilient member which is deformable with respect to the movement direction.
Claim 8
Dependent Claim
34 words
A device according to claim 6, further comprising means for detecting displacement of said resilient member, and control means for moving the movable stage on the basis of an output of said detecting means.
Claim 9
Dependent Claim
31 words
A device according to claim 6, further comprising second control means for controlling said second driving means in accordance with an acceleration curve which can be differentiated with respect to time.
Claim 10
Dependent Claim
25 words
A device according to claim 1, wherein said second driving means and the movable stage are disengageably coupled with each other through a disengageable clutch.
Claim 11
Dependent Claim
30 words
A device according to claim 1, wherein said second driving means and the movable stage are coupled with each other through a joint having a clearance in the movement direction.
Claim 12
Dependent Claim
20 words
A device according to claim 1, wherein the movable stage is moved in a direction having a component of gravity.
Claim 13
Dependent Claim
84 words
An exposure system including a stage device, comprising: first, fine-motion driving means, comprising a linear motor, for moving a movable stage through a first range in a predetermined direction; second, relatively rough-motion driving means for moving the movable stage through a second range in the predetermined direction, which is substantially of the same extent as the first range; and means for exposing a substrate placed on the movable stage with radiation energy generated by one of an X-ray source and an excimer laser source.
Claim 14
Dependent Claim
84 words
An exposure system including a stage device, comprising: first, fine-motion driving means, comprising a linear motor, for moving a movable stage through a first range in a predetermined direction; second, relatively rough-motion driving means for moving the movable stage through a second range in the predetermined direction, which is substantially of the same extent as the first range; and means for exposing a substrate placed on the movable stage with radiation energy generated by one of an X-ray source and an excimer laser source.
Claim 15
Dependent Claim
23 words
A system according to claim 12, wherein the substrate comprises a semiconductor wafer, and a circuit pattern is transferred thereto by said system.
Claim 16
Dependent Claim
17 words
A device according to claim 1, further comprising static pressure bearing means for guiding the movable stage.
Claim 17
Dependent Claim
17 words
A device according to claim 2, further comprising static pressure bearing means for guiding the movable stage.
Claim 18
Dependent Claim
49 words
An exposure method for manufacturing a semiconductor device, said method comprising the steps of: providing a stage device as recited in any one of claims 1 through 11; holding a substrate with the stage device; and exposing the substrate with radiation energy including one of X-rays and ultraviolet rays.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-11-03 | 2001-05-05 | 2001-11-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-11-03 | 2005-05-05 | 2005-11-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-11-03 | 2009-05-05 | 2009-11-04 | $7700.00 | Window Closed / Lapsed |