US5680502A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin film heat treatment apparatus with conductively heated table and surrounding radiation shield
Assignee: Novellus Systems Inc
•
Filing: 1995-04-03
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Granted: 1997-10-21
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Expires: 2015-04-03
Abstract
Abstract The thin film heat treatment apparatus for heating the wafers or foil sheets provides a conductively heated table disposed within a vacuum chamber, a heat radiation preventing device that is installed adjacent to the conductively heated table and forms a space with the top of the heater table by surrounding the foil sheet or wafer placed on the top of the heater table.
Inventors
- 👤 Yong-Kil Kim
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:23
CPC Classifications
C; C30; C30B; C30B31/00; C30B31/06; C30B31/12
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
103 words
A thin film heat treatment apparatus for heating a vacuum chamber; and a head radiation preventing device installed adjacent to the heater table and forming an airtight space with a top of the heater table by covering the workpiece placed on the top of the heater table, the heat radiation preventing device comprising: a cylindrical main body having edges and a top side, the top side being attached to the edges of the main body, a cap with a fixed part protruding radially from the circumference of the cylindrical main body, and a lifting device attached to the fixed part of the cap.
Claim 2
Dependent Claim
103 words
A thin film heat treatment apparatus for heating a vacuum chamber; and a head radiation preventing device installed adjacent to the heater table and forming an airtight space with a top of the heater table by covering the workpiece placed on the top of the heater table, the heat radiation preventing device comprising: a cylindrical main body having edges and a top side, the top side being attached to the edges of the main body, a cap with a fixed part protruding radially from the circumference of the cylindrical main body, and a lifting device attached to the fixed part of the cap.
Claim 3
Dependent Claim
18 words
The thin film heat treatment apparatus of claim 1, wherein the cap is formed in a dome shape.
Claim 4
Dependent Claim
30 words
The thin film heat treatment apparatus of claim 2, wherein the inner surface of the top side facing the top of the heater table is coated with a reflecting film.
Claim 5
Dependent Claim
29 words
The thin film heat treatment apparatus of claim 2, further comprises a heat generating device which is disposed contacting the inner part of the top side of the cap.
Claim 6
Dependent Claim
20 words
The thin film heat treatment apparatus of claim 4, wherein the heat generating device further comprises an electric heating wire.
Claim 7
Dependent Claim
17 words
The thin film heat treatment apparatus of claim 5, wherein the cap has a gas outflow opening.
Claim 8
Dependent Claim
19 words
The thin film heat treatment apparatus of claim 4, wherein the heat generating device further comprises a halogen lamp.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-10-20 | 2001-04-21 | 2001-10-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-20 | 2005-04-21 | 2005-10-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-20 | 2009-04-21 | 2009-10-21 | $7700.00 | Window Closed / Lapsed |