Patent US5677012A successfully refreshed from Google Patents.
US5677012A
Expired / Lapsed
US
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Plasma processing method and plasma processing apparatus
Assignee: Sumitomo Heavy Industries Ltd
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Filing: 1995-12-27
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Granted: 1997-10-14
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Expires: 2015-12-27
Abstract
Abstract A plasma processing apparatus comprises a vacuum chamber, a plasma beam generator arranged in the vacuum chamber, and a main hearth located in the vacuum chamber and is for carrying out a step of a plasma beam produced by the plasma beam generator to the main hearth. The plasma processing apparatus further comprises a permanent magnet and a hearth coil arranged in the vicinity of the main hearth to be concentric with a center axis of the main hearth to be concentric with a center axis of the main hearth. The meltability of a material and the flight distribution of the vapor particles derived from a vaporizable material are adjusted by varying an electric current supplied to the hearth coil.
Inventors
- 👤 Toshiyuki Sakemi
- 👤 Masaru Tanaka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 14:43
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32422; H01J37/32431; H01J37/32623; H01J37/3266
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
134 words
A plasma processing method which includes a beam source for producing a plasma beam and a hearth located in a vacuum chamber and having an incident surface for said plasma beam and which comprises a step of guiding said plasma beam produced by said beam source to the incident surface of said hearth, said method comprising the steps of: forming a stationary magnetic field by the use of an annular permanent magnet arranged in the vicinity of said hearth to be concentric with a center axis of said hearth; forming an adjusting magnetic field by the use of an electromagnetic coil concentrically arranged with respect to the center axis of said hearth; and superposing said adjustable magnetic field on said stationary magnetic field to vary a magnetic field in the vicinity of said hearth.
Claim 2
Dependent Claim
134 words
A plasma processing method which includes a beam source for producing a plasma beam and a hearth located in a vacuum chamber and having an incident surface for said plasma beam and which comprises a step of guiding said plasma beam produced by said beam source to the incident surface of said hearth, said method comprising the steps of: forming a stationary magnetic field by the use of an annular permanent magnet arranged in the vicinity of said hearth to be concentric with a center axis of said hearth; forming an adjusting magnetic field by the use of an electromagnetic coil concentrically arranged with respect to the center axis of said hearth; and superposing said adjustable magnetic field on said stationary magnetic field to vary a magnetic field in the vicinity of said hearth.
Claim 3
Dependent Claim
76 words
A plasma processing method as claimed in claim 1, which comprises the steps of guiding said plasma beam produced by said beam source to the incident surface of said hearth, evaporating and ionizing a vaporizable material put on said hearth to produce vapor particles, varying a current supplied to said electromagnetic coil to adjust flight distribution of said vapor particles, and adhering said vapor particles onto a surface of a substrate arranged opposite to said hearth.
Claim 4
Dependent Claim
34 words
A plasma processing method as claimed in claim 1, which comprises the step of varying a current supplied to said electromagnetic coil to adjust a melting rate of the material put on said hearth.
Claim 5
Dependent Claim
22 words
A plasma processing method as claimed in claim 1, further comprising the step of maintaining the hearth at a positive electric potential.
Claim 6
Dependent Claim
116 words
A plasma processing apparatus which includes a beam source for producing a plasma beam and a hearth located in a vacuum chamber and having an incident surface for said plasma beam and which is for carrying out a plasma processing operation comprising a step of guiding said plasma beam produced by said beam source to the incident surface of said hearth, said apparatus further comprising: an annular permanent magnet arranged in the vicinity of said hearth to be concentric with a center axis of said hearth; an electromagnetic coil arranged in vicinity of said annular permanent magnet to be concentric with the center axis of said hearth; and a power source connected to said electromagnetic coil.
Claim 7
Dependent Claim
116 words
A plasma processing apparatus which includes a beam source for producing a plasma beam and a hearth located in a vacuum chamber and having an incident surface for said plasma beam and which is for carrying out a plasma processing operation comprising a step of guiding said plasma beam produced by said beam source to the incident surface of said hearth, said apparatus further comprising: an annular permanent magnet arranged in the vicinity of said hearth to be concentric with a center axis of said hearth; an electromagnetic coil arranged in vicinity of said annular permanent magnet to be concentric with the center axis of said hearth; and a power source connected to said electromagnetic coil.
Claim 8
Dependent Claim
55 words
A plasma processing apparatus as claimed in claim 5, wherein said electromagnetic coil is excited so that magnetic flux generated at a center side of said coil by the current supplied from said power source has a direction coincident to that of another magnetic flux generated at a center side of said annular permanent magnet.
Claim 9
Dependent Claim
21 words
A plasma process apparatus as claimed in claim 5, wherein said power source maintains said hearth at a positive electric potential.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-10-13 | 2001-04-14 | 2001-10-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-13 | 2005-04-14 | 2005-10-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-13 | 2009-04-14 | 2009-10-14 | $7700.00 | Window Closed / Lapsed |