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US5677002A
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Chemical vapor deposition of tantalum- or niobium-containing coatings
Assignee: Entegris Inc
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Filing: 1995-05-30
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Granted: 1997-10-14
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Expires: 2015-05-30
Abstract
Abstract Niobium and tantalum compounds suitable for use as chemical vapor deposition source reagents, and a process for depositing niobium- or tantalum-containing coatings using the compounds. The compounds have formula M(OR.sup.1).sub.x (R.sup.2 --C(GH)--C--C(G)--R.sup.3).sub.y wherein M is tantalum or niobium; G is oxygen or sulfur; and R 1 , R 2 , and R 3 are independently selected hydrocarbyl, fluoroalkyl or alkoxy groups,
Inventors
- 👤 Peter S. Kirlin
- 👤 Brian A. Vaartstra
- 👤 Douglas Gordon
- 👤 Timothy E. Glassman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:48
CPC Classifications
C; C07; C07F; C07F9/00; C23; C23C; C23C16/00; C23C16/06; C23C16/18; C23C16/22; C23C16/30; C23C16/40; C23C16/405
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
162 words
A process for forming a tantalum- or niobium-containing coating on a substrate, comprising the steps of: providing a vapor of a compound of the formula: M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is oxygen or sulfur; R 1 is C 1 -C 6 hydrocarbyl or fluoroalkyl; and R 2 and R 3 are independently selected from C 2 -C 6 hydrocarbyl, C 2 -C 6 fluoroalkyl and C 1 -C 6 alkoxy groups, with the provisos that when G is oxygen: R 2 and R 3 are not simultaneously both phenyl when either one of R 2 and R 3 is ethoxy, the other is not phenyl; when either one of R 2 and R 3 is t-butyl, the other is not heptafluoropropyl; when either one of R 2 and R 3 is ethyl, the other is not methyl; and exposing said vapor to the substrate for deposition of said tantalum- or niobium-containing coating thereon.
Claim 2
Dependent Claim
162 words
A process for forming a tantalum- or niobium-containing coating on a substrate, comprising the steps of: providing a vapor of a compound of the formula: M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is oxygen or sulfur; R 1 is C 1 -C 6 hydrocarbyl or fluoroalkyl; and R 2 and R 3 are independently selected from C 2 -C 6 hydrocarbyl, C 2 -C 6 fluoroalkyl and C 1 -C 6 alkoxy groups, with the provisos that when G is oxygen: R 2 and R 3 are not simultaneously both phenyl when either one of R 2 and R 3 is ethoxy, the other is not phenyl; when either one of R 2 and R 3 is t-butyl, the other is not heptafluoropropyl; when either one of R 2 and R 3 is ethyl, the other is not methyl; and exposing said vapor to the substrate for deposition of said tantalum- or niobium-containing coating thereon.
Claim 3
Dependent Claim
20 words
A process according to claim 1, wherein the substrate is held at a temperature of 250° C. to 1000° C.
Claim 4
Dependent Claim
18 words
A process according to claim 1, additionally comprising directing said vapor to said substrate in a carrier gas.
Claim 5
Dependent Claim
24 words
A process according to claim 1, wherein said vapor is provided by flash vaporization of a composition comprising said compound and a solvent therefor.
Claim 6
Dependent Claim
10 words
A process according to claim 1, wherein M is tantalum.
Claim 7
Dependent Claim
10 words
A process according to claim 1, wherein M is niobium.
Claim 8
Dependent Claim
10 words
A process according to claim 1, wherein G is oxygen.
Claim 9
Dependent Claim
17 words
A process according to claim 1, wherein R1 is selected from the group consisting of C1-C4 alkyls.
Claim 10
Dependent Claim
12 words
A process according to claim 1, wherein the compound is tantalum tetraisopropoxytetramethylheptanedionate.
Claim 11
Dependent Claim
12 words
A process according to claim 1, wherein the compound is tantalum tetraethoxytetramethylheptanedionate.
Claim 12
Dependent Claim
21 words
A process according to claim 1, wherein the compound is selected from the group consisting of niobium tetraisopropoxytetramethylheptanedionate and niobium tetraethoxytetramethylheptanedionate.
Claim 13
Dependent Claim
17 words
A process according to claim 1, wherein the tantalum- or niobium-containing coating comprises a complex oxide compound.
Claim 14
Dependent Claim
22 words
A process according to claim 4, wherein said flash vaporization is carried out at a temperature of from 140° to 260° C.
Claim 15
Dependent Claim
34 words
A process according to claim 1, wherein the step of exposing said vapor to the substrate is conducted in the presence of a gas selected from the group consisting of oxygen and nitrous oxide.
Claim 16
Dependent Claim
17 words
A process according to claim 1, wherein said coating is SrBi 2 Ta 2 O 9 .
Claim 17
Dependent Claim
17 words
A process according to claim 1, wherein said coating is SrBi 2 Nb 2 O 9 .
Claim 18
Dependent Claim
17 words
A process according to claim 1, wherein the tantalum- or niobium-containing coating comprises a ferroelectric oxide compound.
Claim 19
Dependent Claim
182 words
A process for forming a tantalum- or niobium-containing coating, selected from the group consisting of SrBi 2 Ta 2 O 9 and SrBi 2 Nb 2 O 9 , on a substrate, comprising the steps of: providing a vapor of a compound of the formula: M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is oxygen or sulfur; R 1 is C 1 -C 6 hydrocarbyl or fluoroalkyl; and R 2 and R 3 are independently selected from C 2 -C 6 hydrocarbyl, C 2 -C 6 fluoroalkyl and C 1 -C 6 alkoxy groups, with the provisos that when G is oxygen: R 2 and R 3 are not simultaneously both phenyl; when either one of R 2 and R 3 is ethoxy, the other is not phenyl; when either one of R 2 and R 3 is t-butyl, the other is not heptafluoropropyl; when either one of R 2 and R 3 is ethyl, the other is not methyl; and exposing said vapor to the substrate for deposition of said tantalum or niobium-containing coating thereon.
Claim 20
Dependent Claim
182 words
A process for forming a tantalum- or niobium-containing coating, selected from the group consisting of SrBi 2 Ta 2 O 9 and SrBi 2 Nb 2 O 9 , on a substrate, comprising the steps of: providing a vapor of a compound of the formula: M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is oxygen or sulfur; R 1 is C 1 -C 6 hydrocarbyl or fluoroalkyl; and R 2 and R 3 are independently selected from C 2 -C 6 hydrocarbyl, C 2 -C 6 fluoroalkyl and C 1 -C 6 alkoxy groups, with the provisos that when G is oxygen: R 2 and R 3 are not simultaneously both phenyl; when either one of R 2 and R 3 is ethoxy, the other is not phenyl; when either one of R 2 and R 3 is t-butyl, the other is not heptafluoropropyl; when either one of R 2 and R 3 is ethyl, the other is not methyl; and exposing said vapor to the substrate for deposition of said tantalum or niobium-containing coating thereon.
Claim 21
Dependent Claim
17 words
A process according to claim 18, wherein said coating is SrBi 2 Ta 2 O 9 .
Claim 22
Dependent Claim
17 words
A process according to claim 18, wherein said coating is SrBi 2 Nb 2 O 9 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-10-13 | 2001-04-14 | 2001-10-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-13 | 2005-04-14 | 2005-10-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-13 | 2009-04-14 | 2009-10-14 | $7700.00 | Window Closed / Lapsed |