US5674574A
Expired / Lapsed
US
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Vapor delivery system for solid precursors and method regarding same
Assignee: Micron Technology Inc
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Filing: 1996-05-20
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Granted: 1997-10-07
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Expires: 2016-05-20
Abstract
Abstract A vapor delivery system for vaporization and delivery of a solid precursor includes a housing having an inlet for receiving a carrier gas. A rotatable substrate surface is contained in the housing having a solid precursor material applied thereon. A focused thermal beam is positioned for impingement on the solid precursor material. A drive mechanism moves one of the rotatable surface and the focused thermal beam relative to the other such that with rotation of the rotatable substrate surface the focused thermal beam continuously impinges on a different contact area of the solid precursor material for vaporization thereof. The housing further has an outlet for transport of the vaporized precursor material therefrom. The rotatable surface may be a cylindrical surface or a circular platen surface. A CVD system having a vapor delivery system is also provided along with a device for use in the delivery system. A method for delivering the vaporized solid precursor to a CVD process chamber includes providing a surface having a solid precursor material applied thereon. A focused thermal beam is directed at the surface. The surface is rotated and one of the rotating surface and the focused thermal beam are indexed relative to the other such that the directed beam is repetitively moved from impinging upon one path of solid precursor material to a next path of solid precursor material to vaporize the solid precursor material on the surface. The vaporized solid precursor material is then transported to the process chamber.
Inventors
- 👤 David R. Atwell
- 👤 Donald L. Westmoreland
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:35
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/4481
Claims Analysis
Total Claims: 46
Claim 1
Independent Claim
119 words
A vapor delivery system for a solid precursor, comprising: a housing defining a sealed interior volume having an inlet for receiving a carrier gas; a rotatable substrate surface contained in the housing having a solid precursor material applied thereon; a focused thermal beam positioned for impingement on the solid precursor material; a drive mechanism for moving one of the rotatable surface and focused thermal beam relative to the other such that with rotation of the rotatable surface the focused thermal beam continuously impinges on a different contact area of the solid precursor material for vaporization thereof, the housing having an outlet for transport of the vaporized precursor material using the carrier gas from the interior volume of the housing.
Claim 2
Dependent Claim
119 words
A vapor delivery system for a solid precursor, comprising: a housing defining a sealed interior volume having an inlet for receiving a carrier gas; a rotatable substrate surface contained in the housing having a solid precursor material applied thereon; a focused thermal beam positioned for impingement on the solid precursor material; a drive mechanism for moving one of the rotatable surface and focused thermal beam relative to the other such that with rotation of the rotatable surface the focused thermal beam continuously impinges on a different contact area of the solid precursor material for vaporization thereof, the housing having an outlet for transport of the vaporized precursor material using the carrier gas from the interior volume of the housing.
Claim 3
Dependent Claim
37 words
The system according to claim 1, wherein the rotatable substrate surface is a cylindrical surface having a longitudinal axis therethrough, the system further including an additional drive mechanism for rotating the cylindrical surface about the longitudinal axis.
Claim 4
Dependent Claim
39 words
The system according to claim 2, wherein the focused thermal beam is in a fixed position directed through a beam port in the housing, and further wherein the drive mechanism moves the cylindrical surface linearly along the longitudinal axis.
Claim 5
Dependent Claim
36 words
The system according to claim 2, wherein the drive mechanism moves the focused thermal beam directed through a beam port in the housing linearly across the cylindrical surface in a direction common with the longitudinal axis.
Claim 6
Dependent Claim
20 words
The system according to claim 1, wherein the solid precursor material applied is a substantially uniform layer of precursor material.
Claim 7
Dependent Claim
15 words
The system according to claim 1, wherein the rotatable substrate surface includes a cooled substrate.
Claim 8
Dependent Claim
42 words
The system according to claim 1, wherein the rotatable substrate surface is a circular platen surface having a longitudinal axis through a center thereof, the system further including an additional drive mechanism for rotating the circular platen surface about the longitudinal axis.
Claim 9
Dependent Claim
39 words
The system according to claim 7, wherein the drive mechanism moves the focused thermal beam directed through a beam port in the housing between an edge of the circular platen surface and the center of the circular platen surface.
Claim 10
Dependent Claim
51 words
The system according to claim 1, wherein the focused thermal beam is an infrared laser beam and further wherein the housing includes a beam port having an infrared transparent window through which the infrared laser beam is directed, the outlet port being positioned in close proximity to the infrared transparent window.
Claim 11
Dependent Claim
36 words
The system according to claim 1, wherein the housing includes a beam port having a transparent window through which the focused thermal beam is directed, the transparent window including means for quick replacement of the window.
Claim 12
Dependent Claim
35 words
The system according to claim 1, wherein the housing includes a beam port having a window through which the focused thermal beam is directed, the window being gas purged to prevent deposition on the window.
Claim 13
Dependent Claim
33 words
The system according to claim 1, wherein the solid precursor material is contained in first regions at the surface of the rotatable substrate surface which are separated by second regions of substrate material.
Claim 14
Dependent Claim
20 words
The system according to claim 12, wherein the first regions are sized as a function of the focused thermal beam.
Claim 15
Dependent Claim
191 words
A CVD system having a vapor delivery system for delivering a vaporized solid precursor to a CVD processing chamber, comprising: a carrier gas source for providing a carrier gas; a housing defining a sealed interior volume having a carrier gas inlet for receiving the carrier gas from the carrier gas source; a rotatable member positioned in the interior volume of the housing, the rotatable member including a surface having a solid precursor material applied thereon; a first drive mechanism connected to the rotatable member for rotating the surface about a longitudinal axis of the rotatable member; a thermal source positioned for directing a focused thermal beam through a beam port of the housing for impingement on the solid precursor material; and a second drive mechanism for moving one of the rotatable member and focused beam relative to the other such that with rotation of the rotatable member surface the focused beam continuously impinges on a different contact area of the solid precursor material for vaporization thereof, the housing having a carrier gas outlet for transport of the vaporized precursor material from the interior volume of the housing to the processing chamber.
Claim 16
Dependent Claim
191 words
A CVD system having a vapor delivery system for delivering a vaporized solid precursor to a CVD processing chamber, comprising: a carrier gas source for providing a carrier gas; a housing defining a sealed interior volume having a carrier gas inlet for receiving the carrier gas from the carrier gas source; a rotatable member positioned in the interior volume of the housing, the rotatable member including a surface having a solid precursor material applied thereon; a first drive mechanism connected to the rotatable member for rotating the surface about a longitudinal axis of the rotatable member; a thermal source positioned for directing a focused thermal beam through a beam port of the housing for impingement on the solid precursor material; and a second drive mechanism for moving one of the rotatable member and focused beam relative to the other such that with rotation of the rotatable member surface the focused beam continuously impinges on a different contact area of the solid precursor material for vaporization thereof, the housing having a carrier gas outlet for transport of the vaporized precursor material from the interior volume of the housing to the processing chamber.
Claim 17
Dependent Claim
72 words
The system according to claim 14, wherein the rotatable member is a cylinder with a cylindrical surface having the solid precursor material thereon and with the longitudinal axis extending from a first end thereof to a second end thereof, and further wherein the focused beam is in a fixed position directed through the beam port in the housing and the second drive mechanism moves the cylindrical surface linearly along the longitudinal axis.
Claim 18
Dependent Claim
66 words
The system according to claim 14, wherein the rotatable member is a cylinder with a cylindrical surface having the solid precursor material thereon and with the longitudinal axis extending from a first end thereof to a second end thereof, and further wherein the focused beam is moved between the first end of the cylinder and the second end of the cylinder by the second drive mechanism.
Claim 19
Dependent Claim
58 words
The system according to claim 14, wherein the rotatable member is a platen with the surface having solid precursor material thereon and with the longitudinal axis extending through the center of the platen, and further wherein the second drive mechanism moves the focused beam between an outer edge portion of the platen and the center of the platen.
Claim 20
Independent Claim
86 words
A device for use in a delivery system for delivering vaporized solid precursor to a CVD process chamber, the delivery system including directing a focused thermal beam on the device, the device comprising a substrate having a surface with solid precursor material applied thereon such that, when the device is rotated, the focused thermal beam directed thereon impinges on a pattern of the solid precursor material, wherein the pattern of the solid precursor material includes areas of solid precursor material separated by areas of substrate material.
Claim 21
Independent Claim
86 words
A device for use in a delivery system for delivering vaporized solid precursor to a CVD process chamber, the delivery system including directing a focused thermal beam on the device, the device comprising a substrate having a surface with solid precursor material applied thereon such that, when the device is rotated, the focused thermal beam directed thereon impinges on a pattern of the solid precursor material, wherein the pattern of the solid precursor material includes areas of solid precursor material separated by areas of substrate material.
Claim 22
Dependent Claim
19 words
The device according to claim 18, wherein the focused thermal beam is generated from a focused high intensity lamp.
Claim 23
Dependent Claim
16 words
The device according to claim 18, wherein the focused thermal beam is an IR laser beam.
Claim 24
Dependent Claim
21 words
The device according to claim 18, wherein the pattern is circular and sized as a function of the focused laser beam.
Claim 25
Dependent Claim
21 words
The device according to claim 18, wherein the surface is a cylindrical surface having a longitudinal axis therethrough for rotation thereabout.
Claim 26
Dependent Claim
25 words
The device according to claim 18, wherein the surface is a circular platen surface having a longitudinal axis through a center thereof for rotation thereabout.
Claim 27
Independent Claim
101 words
A method for delivering a vaporized solid precursor to a CVD process chamber, the method comprising the steps of: providing a surface having a solid precursor material applied thereon; directing a focused thermal beam at the surface; rotating the surface and indexing one of the rotating surface and directed focused thermal beam relative to the other such that the directed beam is repetitively moved from impinging upon one path of solid precursor material to a next path of solid precursor material to vaporize the solid precursor material on the surface; and transporting the vaporized solid precursor material to the processing chamber.
Claim 28
Independent Claim
101 words
A method for delivering a vaporized solid precursor to a CVD process chamber, the method comprising the steps of: providing a surface having a solid precursor material applied thereon; directing a focused thermal beam at the surface; rotating the surface and indexing one of the rotating surface and directed focused thermal beam relative to the other such that the directed beam is repetitively moved from impinging upon one path of solid precursor material to a next path of solid precursor material to vaporize the solid precursor material on the surface; and transporting the vaporized solid precursor material to the processing chamber.
Claim 29
Dependent Claim
43 words
The method according to claim 24, wherein the surface is a cylindrical surface rotated about a longitudinal axis therethrough with the paths extending about the longitudinal axis, and further wherein the indexing step includes indexing the cylindrical surface linearly along the longitudinal axis.
Claim 30
Dependent Claim
52 words
The method according to claim 24, wherein the surface is a cylindrical surface rotated about a longitudinal axis therethrough with the paths extending about the longitudinal axis, and further wherein the indexing step includes indexing the directed laser beam linearly across the cylindrical surface in a direction common with the longitudinal axis.
Claim 31
Dependent Claim
60 words
The method according to claim 24, wherein the surface is a circular platen surface rotated about a longitudinal axis through a center thereof with the paths extending about the longitudinal axis, and further wherein the indexing step includes indexing the focused thermal beam between an outer edge portion of the platen surface and the center of the circular platen surface.
Claim 32
Dependent Claim
41 words
The method according to claim 24, wherein the surface is positioned in a sealed interior volume and the focused thermal beam is focused through a quick change transparent window, and further wherein the method includes replacing the quick change transparent window.
Claim 33
Dependent Claim
41 words
The method according to claim 24, wherein the providing step includes the steps of: making a solution of a solid precursor and a solvent; coating the surface with the solution; and removing the solvent from the solution coated on the surface.
Claim 34
Dependent Claim
18 words
The method according to claim 29, wherein the coating step includes one of spinning, spraying, pressing, and dipping.
Claim 35
Dependent Claim
14 words
The method according to claim 29, further including the step of roughening the surface.
Claim 36
Dependent Claim
34 words
The method according to claim 24, wherein the providing step includes the step of coating the surface by sublimation of the solid precursor material and condensation of the solid precursor material on the surface.
Claim 37
Dependent Claim
14 words
The method according to claim 32, further including the step of roughening the surface.
Claim 38
Dependent Claim
14 words
The method according to claim 24, further including the step of cooling the surface.
Claim 39
Dependent Claim
25 words
The method according to claim 24, further including the step of controlling a rate of vaporization as a function of the focused thermal beam power.
Claim 40
Dependent Claim
32 words
The method according to claim 24, further including the step of controlling a rate of vaporization as a function of a thickness of the solid precursor material uniformly coated on the surface.
Claim 41
Independent Claim
115 words
A method for delivering a vaporized solid precursor to a CVD process chamber, the method comprising the steps of: providing a cylindrical surface having a solid precursor material thereon and a longitudinal axis therethrough, the cylindrical surface positioned in a sealed volume; directing a focused thermal beam at the cylindrical surface; rotating the cylindrical surface about the longitudinal axis and moving one of the cylindrical surface and focused thermal beam relative to the other to continuously direct the focused thermal beam at a different contact area of the cylindrical surface to vaporize the solid precursor material; and transporting the vaporized solid precursor material using a carrier gas from the sealed volume to the processing chamber.
Claim 42
Independent Claim
115 words
A method for delivering a vaporized solid precursor to a CVD process chamber, the method comprising the steps of: providing a cylindrical surface having a solid precursor material thereon and a longitudinal axis therethrough, the cylindrical surface positioned in a sealed volume; directing a focused thermal beam at the cylindrical surface; rotating the cylindrical surface about the longitudinal axis and moving one of the cylindrical surface and focused thermal beam relative to the other to continuously direct the focused thermal beam at a different contact area of the cylindrical surface to vaporize the solid precursor material; and transporting the vaporized solid precursor material using a carrier gas from the sealed volume to the processing chamber.
Claim 43
Dependent Claim
29 words
The method according to claim 37, wherein the moving step includes moving the focused thermal beam linearly across the cylindrical surface in a direction common with the longitudinal axis.
Claim 44
Dependent Claim
28 words
The method according to claim 37, wherein the moving step includes moving the focused thermal beam between a first end and a second end of the cylindrical surface.
Claim 45
Independent Claim
130 words
A method for delivering a vaporized solid precursor to a CVD process chamber, the method comprising the steps of: providing a circular platen surface having a solid precursor material thereon and a longitudinal axis through the center thereof, the circular platen surface positioned in a sealed volume; directing a focused thermal beam at the circular platen surface; rotating the circular platen surface about the longitudinal axis and moving the focused thermal beam between an edge of the circular platen surface and the center of the circular platen surface to continuously direct the focused thermal beam at a different contact area of the circular platen surface to vaporize the solid precursor material; and transporting the vaporized solid precursor material using a carrier gas from the sealed volume to the processing chamber.
Claim 46
Independent Claim
130 words
A method for delivering a vaporized solid precursor to a CVD process chamber, the method comprising the steps of: providing a circular platen surface having a solid precursor material thereon and a longitudinal axis through the center thereof, the circular platen surface positioned in a sealed volume; directing a focused thermal beam at the circular platen surface; rotating the circular platen surface about the longitudinal axis and moving the focused thermal beam between an edge of the circular platen surface and the center of the circular platen surface to continuously direct the focused thermal beam at a different contact area of the circular platen surface to vaporize the solid precursor material; and transporting the vaporized solid precursor material using a carrier gas from the sealed volume to the processing chamber.
References Cited (Backward Citations)
US4585624A
Cited
US4658115A
Cited
US4791273A
Cited
US5476547A
Cited
US5277938A
Cited
US5447569A
Cited
US5356673A
Cited
US5529634A
Cited
US5405659A
Cited
US5384289A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-10-06 | 2001-04-07 | 2001-10-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-06 | 2005-04-07 | 2005-10-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-06 | 2009-04-07 | 2009-10-07 | $7700.00 | Window Closed / Lapsed |