Patent US5670712A successfully refreshed from Google Patents.
US5670712A
Expired / Lapsed
US
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Method and apparatus for magnetic force control of a scanning probe
Assignee: University of California
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Filing: 1994-08-15
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Granted: 1997-09-23
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Expires: 2014-08-15
Abstract
Abstract A method and apparatus of magnetic force control for a scanning probe, wherein a first magnetic source having a magnetic moment is provided on the scanning probe and a second magnetic source is disposed external to the scanning probe to apply a magnetic field in a direction other than parallel, and preferably perpendicular, to the orientation of the magnetic moment, from the second magnetic source to the first magnetic source to produce a torque related to the amplitude of the applied magnetic field acting on the probe. By controlling the amplitude of the applied magnetic field, the deflection of the scanning probe is maintained constant during scanning by the scanning probe. An output signal related to the amplitude of the magnetic field applied by the second magnetic source is produced and is indicative of a surface force applied to the probe. The invention can also be used to apply large forces during scanning for applications such as nanolithography or elasticity mapping.
Inventors
- 👤 Jason Cleveland
- 👤 Paul Hansma
- 👤 William Ducker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 02:28
CPC Classifications
G; G01; G01Q; G01Q10/00; G01Q10/04; G01Q10/06; G01Q20/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/865; Y10S977/872; Y10S977/873
Claims Analysis
Total Claims: 53
Claim 1
Independent Claim
90 words
A method of magnetic force control for a scanning probe, comprising the steps of: disposing a first magnetic source on said scanning probe, said first magnetic source having a magnetic moment along a first predetermined direction; disposing a second magnetic source external to said scanning probe to apply a magnetic field from said second magnetic source to said first magnetic source in a direction substantially perpendicular to said first direction so as to produce a torque acting on said scanning probe related to the amplitude of the applied magnetic field.
Claim 2
Independent Claim
90 words
A method of magnetic force control for a scanning probe, comprising the steps of: disposing a first magnetic source on said scanning probe, said first magnetic source having a magnetic moment along a first predetermined direction; disposing a second magnetic source external to said scanning probe to apply a magnetic field from said second magnetic source to said first magnetic source in a direction substantially perpendicular to said first direction so as to produce a torque acting on said scanning probe related to the amplitude of the applied magnetic field.
Claim 3
Dependent Claim
32 words
The method of claim 1, further comprising the steps of: controlling the amplitude of said magnetic field to maintain the deflection of said scanning probe constant during scanning by said scanning probe.
Claim 4
Dependent Claim
40 words
The method of claim 2, wherein said controlling step comprises: sensing the deflection of said scanning probe as caused by a surface force during said scanning; and applying said magnetic field with an amplitude derived based on the sensed deflection.
Claim 5
Dependent Claim
44 words
The method of claim 3, wherein said scanning probe comprises a rocking beam balance having a pivot portion and a cantilever portion extending from said pivot portion, and wherein disposing said first magnetic source comprises disposing said first magnetic source on said cantilever portion.
Claim 6
Dependent Claim
38 words
The method of claim 3, wherein said scanning probe comprises a cantilever portion having a fixed end and a free end, and wherein disposing said first magnetic source comprises disposing said first magnetic source on said cantilever portion.
Claim 7
Dependent Claim
28 words
The method of claim 3, wherein the step of disposing said second magnetic source comprises applying a uniform magnetic field perpendicular to said orientation of said magnetic moment.
Claim 8
Dependent Claim
27 words
The method of claim 6, wherein the step of disposing said first magnetic source comprises orienting said magnetic dipole in a direction parallel to said scanning probe.
Claim 9
Dependent Claim
28 words
The method of claim 1, wherein said step of disposing said second magnetic source comprises applying a uniform magnetic field perpendicular to said orientation of said magnetic moment.
Claim 10
Dependent Claim
27 words
The method of claim 1, wherein the step of disposing said first magnetic source comprises orienting said magnetic moment in a direction parallel to said scanning probe.
Claim 11
Dependent Claim
44 words
The method of claim 1, wherein said scanning probe comprises a rocking beam balance having a pivot portion and a cantilever portion extending from said pivot portion, and wherein disposing said first magnetic source comprises disposing said first magnetic source on said cantilever portion.
Claim 12
Dependent Claim
19 words
The method of claim 10, wherein disposing said first magnetic source comprises disposing a magnet on said cantilever portion.
Claim 13
Dependent Claim
20 words
The method of claim 10, wherein disposing said first magnetic source comprises disposing a magnetic film on said cantilever portion.
Claim 14
Dependent Claim
38 words
The method of claim 1, wherein said scanning probe comprises a cantilever portion having a fixed end and a free end, and wherein disposing said first magnetic source comprises disposing said first magnetic source on said cantilever portion.
Claim 15
Dependent Claim
23 words
The method of claim 13, wherein disposing said first magnetic source comprises disposing a magnet on said free end of said cantilever portion.
Claim 16
Dependent Claim
20 words
The method of claim 13, wherein disposing said first magnetic source comprises disposing a magnetic film on said cantilever portion.
Claim 17
Independent Claim
42 words
The method of any one of claims 10, 11, 12, 13, 14 or 15, wherein disposing said first magnetic source comprises disposing said first magnetic source to have a magnetic moment that lies in a direction that is along said cantilever portion.
Claim 18
Independent Claim
42 words
The method of any one of claims 10 or 13, wherein disposing said first magnetic source comprises magnetizing a magnetic film after depositing said magnetic film on said cantilever portion to provide the orientation of the magnetic moment of said magnetic film.
Claim 19
Independent Claim
48 words
The method of any one of claims 10 or 13, wherein disposing said first magnetic source comprises patterning a magnetic film to form a structure that lies along said cantilever portion and constraining the magnetic moment of said magnetic film to lie in a direction along said structure.
Claim 20
Dependent Claim
27 words
The method of claim 1, further comprising the step of: contacting a surface with a tip portion of said scanning probe during scanning by said scanning probe.
Claim 21
Dependent Claim
33 words
The method of claim 1, further comprising the step of: maintaining a tip portion of said scanning probe in spaced relation to a surface to be scanned during scanning by said scanning probe.
Claim 22
Independent Claim
52 words
The method of any one of claims 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, or 13, further comprising the step of: producing an output signal related to the amplitude of said magnetic field applied by said second magnetic source indicative of a surface force applied to said scanning probe.
Claim 23
Dependent Claim
76 words
A magnetic force control apparatus for a scanning probe, comprising: a probe provided with a first magnetic source having a magnetic moment along a first predetermined direction; and a second magnetic source disposed external to said probe to apply a magnetic field to said first magnetic source in a second direction substantially perpendicular to said first direction so as to produce a torque acting on said probe related to the amplitude of the applied magnetic field.
Claim 24
Dependent Claim
76 words
A magnetic force control apparatus for a scanning probe, comprising: a probe provided with a first magnetic source having a magnetic moment along a first predetermined direction; and a second magnetic source disposed external to said probe to apply a magnetic field to said first magnetic source in a second direction substantially perpendicular to said first direction so as to produce a torque acting on said probe related to the amplitude of the applied magnetic field.
Claim 25
Dependent Claim
36 words
The magnetic force control apparatus as set forth in claim 22, further comprising: control means for controlling the amplitude of said magnetic field applied by said second magnetic source to maintain deflection of said probe constant.
Claim 26
Dependent Claim
54 words
The magnetic force control apparatus as set forth in claim 23, wherein said control means comprises: means for sensing the deflection of said probe as caused by a surface force; and means for controlling the amplitude of said magnetic field applied by said second magnetic source based on the sensed deflection of said probe.
Claim 27
Dependent Claim
41 words
The magnetic force control apparatus as set forth in claim 24, wherein said probe comprises a rocking beam balance having a pivot portion and a cantilever portion extending from said pivot portion and on which said first magnetic source is disposed.
Claim 28
Dependent Claim
37 words
The magnetic force control apparatus as set forth in claim 24, wherein said probe comprises a cantilever portion having a fixed end and a free end, and said first magnetic source is provided on said cantilever portion.
Claim 29
Dependent Claim
41 words
The magnetic force control apparatus as set forth in claim 22, wherein said probe comprising a rocking beam balance having a pivot portion and a cantilever portion extending from said pivot portion and on which said first magnetic source is disposed.
Claim 30
Dependent Claim
24 words
The magnetic force control apparatus as set forth in claim 27, wherein said first magnetic source comprises a magnet disposed on said cantilever portion.
Claim 31
Dependent Claim
20 words
The magnetic force control apparatus as set forth in claim 27, wherein said first magnetic source comprises a magnetic film.
Claim 32
Dependent Claim
38 words
The magnetic force control apparatus as set forth in claim 22, wherein said probe comprises a cantilever portion having a fixed end and a free end, and wherein said first magnetic source is provided on said cantilever portion.
Claim 33
Dependent Claim
20 words
The magnetic force control apparatus as set forth in claim 30, wherein said first magnetic source comprises a magnetic film.
Claim 34
Dependent Claim
32 words
The magnetic force control apparatus as set forth in claim 30, wherein said first magnetic source comprises a magnetic film having a magnetic moment lying along the length of the cantilever portion.
Claim 35
Dependent Claim
28 words
The magnetic force control apparatus as set forth in claim 30, wherein said first magnetic source comprises a magnet disposed on said free end of said cantilever portion.
Claim 36
Dependent Claim
40 words
The magnetic force control apparatus as set forth in any one of claims 27, 28, 29, 30, 31, or 33, wherein said first magnetic source has a magnetic moment that lies in a direction that is along said cantilever portion.
Claim 37
Dependent Claim
52 words
The magnetic force control apparatus as set forth in any one of claims 22, 23, 24, 25, 26, 27, or 30, further comprising: means for producing an output signal related to the amplitude of said magnetic field applied by said second magnetic source indicative of a surface force applied to said probe.
Claim 38
Dependent Claim
31 words
The magnetic force control apparatus as set forth in claim 22, wherein said second magnetic source comprises an electromagnet, and said first magnetic source comprises a magnet positioned on said probe.
Claim 39
Dependent Claim
30 words
The magnetic force control apparatus as set forth in claim 36, wherein said electromagnet is positioned in opposing relation to said probe, and said magnet is a rare earth magnet.
Claim 40
Dependent Claim
65 words
The magnetic force control apparatus as set forth in claim 37, wherein said electromagnet has a pole face in the size range of from 1 mm to 2 cm and said pole face is positioned in a range of from 100 μm to 2 cm from said probe, and said rare earth magnet is in a size range of from 10 μm to 100 μm.
Claim 41
Dependent Claim
32 words
The magnetic force control apparatus as set forth in any one of claims 27 or 30, wherein said second magnetic source comprises an electromagnet, and said first magnetic source comprises a magnet.
Claim 42
Dependent Claim
35 words
The magnetic force control apparatus as set forth in any one of claims 22, 27 or 30, wherein said second magnetic source comprises an electromagnet, and said first magnetic source comprises a thin magnetic film.
Claim 43
Dependent Claim
28 words
The magnetic force control apparatus as set forth in claim 40, wherein said magnetic film has a thickness in the range of from 10 nm to 100 nm.
Claim 44
Dependent Claim
19 words
The magnetic force control apparatus as set forth in claim 40, wherein said magnetic film comprises a magnetic alloy.
Claim 45
Dependent Claim
19 words
The magnetic force control apparatus as set forth in claim 42, wherein said magnetic alloy is a cobalt-chromium alloy.
Claim 46
Dependent Claim
26 words
The magnetic force control apparatus as set forth in claim 40, wherein said cobalt-chromium alloy comprises cobalt, chromium and at least one of iron and nickel.
Claim 47
Dependent Claim
22 words
The magnetic force control apparatus as set forth in claim 22, wherein said second magnetic source comprises a pair of electromagnetic coils.
Claim 48
Independent Claim
176 words
A method of magnetic force control for a scanning probe, comprising the steps of: disposing a first magnetic source on said scanning probe, said first magnetic source having a magnetic moment; disposing a second magnetic source external to said scanning probe to apply a magnetic field in a direction other than parallel to the orientation of said magnetic moment from said second magnetic source to said first magnetic source so as to produce a torque related to the amplitude of the applied magnetic field acting on said scanning probe; and controlling the amplitude of said magnetic field to maintain the deflection of said scanning probe constant during scanning by said scanning probe by sensing the deflection of said scanning probe as caused by a surface force during said scanning and applying said magnetic field with an amplitude derived based on the sensed deflection, wherein said applying step comprises applying at least one of a proportional gain and an integral gain to a signal related to the sensed deflection to derive said amplitude of said magnetic field.
Claim 49
Independent Claim
176 words
A method of magnetic force control for a scanning probe, comprising the steps of: disposing a first magnetic source on said scanning probe, said first magnetic source having a magnetic moment; disposing a second magnetic source external to said scanning probe to apply a magnetic field in a direction other than parallel to the orientation of said magnetic moment from said second magnetic source to said first magnetic source so as to produce a torque related to the amplitude of the applied magnetic field acting on said scanning probe; and controlling the amplitude of said magnetic field to maintain the deflection of said scanning probe constant during scanning by said scanning probe by sensing the deflection of said scanning probe as caused by a surface force during said scanning and applying said magnetic field with an amplitude derived based on the sensed deflection, wherein said applying step comprises applying at least one of a proportional gain and an integral gain to a signal related to the sensed deflection to derive said amplitude of said magnetic field.
Claim 50
Dependent Claim
38 words
The method of claim 46 further comprising the step of: producing an output signal related to the amplitude of said magnetic field applied by said second magnetic source indicative of a surface force applied to said scanning probe.
Claim 51
Dependent Claim
176 words
A magnetic force control apparatus for a scanning probe, comprising: a probe provided with a first magnetic source with said first magnetic source having a magnetic moment; a second magnetic source disposed external to said probe to apply a magnetic field to said first magnetic source in a direction other than parallel to the orientation of said magnetic moment so as to produce a torque related to the amplitude of the applied magnetic field acting on said probe; and control means for controlling the amplitude of said magnetic field applied by said second magnetic source to maintain deflection of said probe constant, comprising means for sensing the deflection of said probe as caused by a surface force, and means for controlling the amplitude of said magnetic field applied by said second magnetic source based on the sensed deflection of said probe, wherein said means for controlling the amplitude of said magnetic field includes at least one of a proportional gain and an integral gain in processing a signal related to the sensed deflection of said probe.
Claim 52
Dependent Claim
176 words
A magnetic force control apparatus for a scanning probe, comprising: a probe provided with a first magnetic source with said first magnetic source having a magnetic moment; a second magnetic source disposed external to said probe to apply a magnetic field to said first magnetic source in a direction other than parallel to the orientation of said magnetic moment so as to produce a torque related to the amplitude of the applied magnetic field acting on said probe; and control means for controlling the amplitude of said magnetic field applied by said second magnetic source to maintain deflection of said probe constant, comprising means for sensing the deflection of said probe as caused by a surface force, and means for controlling the amplitude of said magnetic field applied by said second magnetic source based on the sensed deflection of said probe, wherein said means for controlling the amplitude of said magnetic field includes at least one of a proportional gain and an integral gain in processing a signal related to the sensed deflection of said probe.
Claim 53
Dependent Claim
42 words
The magnetic force control apparatus as set forth in claim 48 further comprising: means for producing an output signal related to the amplitude of said magnetic field applied by said second magnetic source indicative of a surface force applied to said probe.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-09-22 | 2001-03-24 | 2001-09-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-09-22 | 2005-03-24 | 2005-09-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-09-22 | 2009-03-24 | 2009-09-23 | $7700.00 | Window Closed / Lapsed |