Patent US5665997A successfully refreshed from Google Patents.
US5665997A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Grated landing area to eliminate sticking of micro-mechanical devices
Assignee: Texas Instruments Inc
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Filing: 1994-03-31
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Granted: 1997-09-09
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Expires: 2014-03-31
Abstract
Abstract A digital micro-mirror device (10), whose contacting elements (11, 17) are not prone to stick together. In the case of a deflecting mirror device, landing electrodes (17) are covered with a grating (19), which reduces the contacting area but still permits conduction between the mirror (11) and the landing electrode (17). Alternatively, the landing electrode (17) can be fabricated as a grated surface.
Inventors
- 👤 Douglas J. Weaver
- 👤 John N. Randall
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 17:24
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/80; H10F39/806; H10F39/011; H10F39/024; H10F39/10; H10F39/12; H10F39/18; H10F39/184; H10F39/1843
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
74 words
A micro-mechanical device, comprising: one or more deflecting beam elements, each beam element having a deflectable beam, an address electrode, and a landing electrode; wherein the spacing of each said beam from an associated landing electrode permits said beam to contact said landing electrode in response to a voltage applied to said address electrode; and wherein each said landing electrode is covered with a grating at least where said beam contacts said landing electrode.
Claim 2
Dependent Claim
74 words
A micro-mechanical device, comprising: one or more deflecting beam elements, each beam element having a deflectable beam, an address electrode, and a landing electrode; wherein the spacing of each said beam from an associated landing electrode permits said beam to contact said landing electrode in response to a voltage applied to said address electrode; and wherein each said landing electrode is covered with a grating at least where said beam contacts said landing electrode.
Claim 3
Dependent Claim
45 words
The micro-mechanical device of claim 1, wherein said beam and said landing electrode are made from an electrically conductive material and wherein said grating has sufficiently thin lines or spaces so as to not substantially inhibit electrical conduction between said beam and said landing electrode.
Claim 4
Dependent Claim
14 words
The micro-mechanical device of claim 1, wherein said grating is fabricated from silicon nitride.
Claim 5
Dependent Claim
27 words
The micro-mechanical device of claim 1, wherein said grating covers at least part of said address electrode as well as at least part of said landing electrode.
Claim 6
Dependent Claim
32 words
The micro-mechanical device of claim 1, wherein each said beam element has two address electrodes and two landing electrodes and wherein said grating covers the contact area of said two landing electrodes.
Claim 7
Dependent Claim
20 words
The micro-mechanical device of claim 1, wherein said grating has lines having a width of approximately 0.2 to 0.3 micrometers.
Claim 8
Dependent Claim
73 words
A micro-mechanical device, comprising: one or more deflecting beam elements, each beam element having a deflectable beam, an address electrode, and a landing electrode; wherein the spacing of each said beam from an associated landing electrode permits said beam to contact said landing electrode in response to a voltage applied to said address electrode; and wherein each said landing electrode has a grated surface at least where said beam contacts said landing electrode.
Claim 9
Dependent Claim
73 words
A micro-mechanical device, comprising: one or more deflecting beam elements, each beam element having a deflectable beam, an address electrode, and a landing electrode; wherein the spacing of each said beam from an associated landing electrode permits said beam to contact said landing electrode in response to a voltage applied to said address electrode; and wherein each said landing electrode has a grated surface at least where said beam contacts said landing electrode.
Claim 10
Dependent Claim
20 words
The micro-mechanical device of claim 7, wherein said beam and said landing electrode are made from an electrically conductive material.
Claim 11
Dependent Claim
34 words
The micro-mechanical device of claim 7, wherein each said beam element has two address electrodes and two landing electrodes and wherein said grated surface is at the contact area of said two landing electrodes.
Claim 12
Dependent Claim
21 words
The micromechanical device of claim 7, wherein said grated surface has lines having a width of approximately 0.2 to 0.3 micrometers.
References Cited (Backward Citations)
US4209349A
Cited
US4256514A
Cited
US4358340A
Cited
US4502914A
Cited
US4803181A
Cited
US4707218A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-09-08 | 2001-03-10 | 2001-09-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-09-08 | 2005-03-10 | 2005-09-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-09-08 | 2009-03-10 | 2009-09-09 | $7700.00 | Window Closed / Lapsed |