Patent US5661591A successfully refreshed from Google Patents.
US5661591A
Expired / Lapsed
US
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Optical switch having an analog beam for steering light
Assignee: Texas Instruments Inc
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Filing: 1995-09-29
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Granted: 1997-08-26
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Expires: 2015-09-29
Abstract
Abstract A spatial light modulator (40,70,80,90,130) operable in the analog mode for light beam steering or scanning applications. A deflectable mirror (42, 72) and which may be hexagonal (92, 132) is supported by a torsion hinge (44,86,94) ends along a torsion axis. A plurality of flexure hinges (48,82,106) are provided to support the ends of the mirror (42,72,92,132) and provide a restoration force. The combination of the torsion hinges and the flexure hinges realizes a deflectable pixel that is operable in the linear range for a large range of address voltages. The flexure hinges also maintain a flat undeflected state when no address voltage is applied, and prevent the pixel from collapsing. The pixel may be reinforced, such as about its perimeter (74) to ensure mirror flatness and prevent warping, even during extreme deflections of the mirror. The pixel is electrostatically deflected by applying an address voltage to an underlying address electrode (60,96,98). The hexagonal mirrors (92,132) allow a tightly packed mirror array, and have a closely circular surface area so as to efficiently reflect a light beam of circular cross section, such as a light beam from fiber optics.
Inventors
- 👤 Tsen-Hwang Lin
- 👤 Philip A. Congdon
- 👤 Gregory A. Magel
- 👤 James M. Florence
- 👤 Robert Mark Boysel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 06:45
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/08; G02B26/0816; G02B26/0833; G02B26/0841; B; B81; B81B; B81B3/00; B81B3/0062
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
143 words
A spatial light modulator, comprising: (a) at least one address electrode on a substrate; (b) a hexagon-shaped light-reflective pixel positioned over said address electrode which is deflectable out of a first, normal position into a plurality of second positions, light incident on the pixel being selectively modulated by being reflected from the pixel in selected directions depending on the position of the pixel, the position of the pixel being dependent on a selected characteristic of an electrical signal provided to said underlying address electrode; (c) a first torsion member connected between the pixel and a first stationary post and defining a torsion axis, deflection of the pixel effecting its rotation about the torsional axis of the first member; and (d) a second flexure member connected between the pixel and a second stationary post, deflection of the pixel effecting flexure of the second member.
Claim 2
Dependent Claim
143 words
A spatial light modulator, comprising: (a) at least one address electrode on a substrate; (b) a hexagon-shaped light-reflective pixel positioned over said address electrode which is deflectable out of a first, normal position into a plurality of second positions, light incident on the pixel being selectively modulated by being reflected from the pixel in selected directions depending on the position of the pixel, the position of the pixel being dependent on a selected characteristic of an electrical signal provided to said underlying address electrode; (c) a first torsion member connected between the pixel and a first stationary post and defining a torsion axis, deflection of the pixel effecting its rotation about the torsional axis of the first member; and (d) a second flexure member connected between the pixel and a second stationary post, deflection of the pixel effecting flexure of the second member.
Claim 3
Dependent Claim
27 words
The modulator as set forth in claim 1, wherein: the points of connection of the members to the pixel are separated about the periphery of the pixel.
Claim 4
Dependent Claim
43 words
The modulator as in claim 2, wherein: the pixel has a generally orthogonal profile, the first member is connected to the pixel at a mid-point of a first side thereof, and the second member is connected to a second side of the pixel.
Claim 5
Dependent Claim
32 words
The modulator as in claim 3, wherein: the second member is connected to the pixel proximate the juncture of the first side of the pixel and the second side of the pixel.
Claim 6
Dependent Claim
29 words
The modulator as in claim 2, wherein: the second member in its unflexed state is oriented so as to be perpendicular to the torsional axis of the first member.
Claim 7
Dependent Claim
33 words
The modulator as in claim 5, wherein: the second member in its flexed state defines a curved surface, the surface of which is generally perpendicular to the torsional axis of the first member.
Claim 8
Dependent Claim
56 words
The modulator as in claim 1, wherein: the characteristics of the first member are such that the deflection of the pixel out of the first position is predominantly rotational about the torsion axis, and the characteristics of the second member are such that the first position of the pixel is predominantly determined by the second member.
Claim 9
Dependent Claim
40 words
The modulator as in claim 7, wherein: the characteristics of the members are such that the pixel is selectively deflectable out of the first position into a plurality of the second positions determined by the voltage of the electrical signal.
Claim 10
Dependent Claim
22 words
The modulator as in claim 1, wherein: the first and second members are respectively connected to separated said first and second posts.
Claim 11
Dependent Claim
19 words
The modulator as in claim 1, wherein: the first and second members are connected to the same said posts.
Claim 12
Dependent Claim
14 words
The modulator as in claim 1, wherein: the pixel is reinforced to maintain flatness.
Claim 13
Dependent Claim
15 words
The modulator as in claim 11, wherein: the pixel is reinforced about a perimeter thereof.
Claim 14
Dependent Claim
14 words
The modulator as in claim 12, wherein: the pixel is corrugated about the perimeter.
Claim 15
Dependent Claim
17 words
The modulator as in claim 11, wherein the pixel is radially reinforced from proximate a midsection thereof.
Claim 16
Dependent Claim
32 words
The modulator as in claim 1, wherein said pixel comprises a mirror elevated upon and over a yoke, said yoke being supported by said first and second members and said address electrode.
Claim 17
Dependent Claim
25 words
The modulator as in claim 1, wherein the length of said second flexure member is substantially longer than the length of said first torsion member.
References Cited (Backward Citations)
US5489952A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-25 | 2001-02-24 | 2001-08-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-25 | 2005-02-24 | 2005-08-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-25 | 2009-02-24 | 2009-08-26 | $7700.00 | Window Closed / Lapsed |