Patent US5660673A successfully refreshed from Google Patents.
US5660673A
Expired / Lapsed
US
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Apparatus for dry etching
Assignee: NEC Corp
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Filing: 1994-08-17
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Granted: 1997-08-26
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Expires: 2014-08-17
Abstract
Abstract An apparatus for dry etching includes a vacuum chamber into which an etching gas is to be introduced, an electrode disposed in the vacuum chamber, a material to be etched being placed on an upper surface of the electrode, at least one cylindrical ring disposed around the material, and a device for raising and lowering the rings so that the rings are raised above or lowered below the upper surface of the electrode.
Inventors
- 👤 Kousuke Miyoshi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:30
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32623; H01J37/32642; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0421; H01J37/32532; H01J37/32568; Y; Y10; Y10S; Y10S156/00; Y10S156/915
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
94 words
An apparatus for dry etching comprising: a vacuum chamber into which an etching gas is to be introduced; an electrode disposed in said vacuum chamber, said electrode having an upper surface for supporting a material to be etched; a smaller diameter cylindrical ring disposed around said electrode; a larger diameter cylindrical ring disposed around said smaller diameter cylindrical ring; and means for independently raising said smaller and larger diameter rings above said upper surface of said electrode and for independently lowering said smaller and larger diameter rings below said upper surface of said electrode.
Claim 2
Independent Claim
94 words
An apparatus for dry etching comprising: a vacuum chamber into which an etching gas is to be introduced; an electrode disposed in said vacuum chamber, said electrode having an upper surface for supporting a material to be etched; a smaller diameter cylindrical ring disposed around said electrode; a larger diameter cylindrical ring disposed around said smaller diameter cylindrical ring; and means for independently raising said smaller and larger diameter rings above said upper surface of said electrode and for independently lowering said smaller and larger diameter rings below said upper surface of said electrode.
Claim 3
Dependent Claim
181 words
An apparatus for dry etching in accordance with claim 1, wherein said means for raising and lowering said smaller and larger diameter rings comprises: support rods for supporting a central circular portion of said upper surface of said electrode, said central circular portion being defined by a circular slit through which said smaller and larger diameter rings is to be raised above and lowered below said upper surface of said electrode, said material to be etched being disposed on said central circular portion; first means connected to a first circular plate at a lower surface of said smaller diameter ring for moving said smaller diameter ring upward and downward, a bottom surface of said first circular plate being provided with holes through which said support rods pass; and second means connected to a second circular plate at a lower surface of said larger diameter ring for moving said larger diameter ring upward and downward, a bottom surface of said second circular plate being provided with holes through which said support rods pass, said first means and second means being coaxially disposed.
Claim 4
Dependent Claim
35 words
An apparatus for dry etching in accordance with claim 1, wherein said material to be etched comprises a semiconductor wafer, said upper surface of said electrode being dimensioned so as to accommodate said semiconductor wafer.
Claim 5
Dependent Claim
27 words
An apparatus for dry etching in accordance with claim 1, wherein said smaller diameter ring is provided at a circumferential wall thereof with a plurality of openings.
Claim 6
Dependent Claim
19 words
An apparatus for dry etching in accordance with claim 4, wherein said openings are equally spaced from each other.
Claim 7
Dependent Claim
20 words
An apparatus for dry etching in accordance with claim 4, wherein said openings are disposed wholly on said circumferential wall.
Claim 8
Dependent Claim
28 words
An apparatus for dry etching in accordance with claim 4, wherein said openings are disposed in a plurality of rows along a heightwise direction of said circumferential wall.
Claim 9
Dependent Claim
21 words
An apparatus for dry etching in accordance with claim 7, wherein said rows of openings are equally spaced from each other.
Claim 10
Dependent Claim
22 words
An apparatus for dry etching in accordance with claim 7, wherein said rows of openings are disposed wholly on said circumferential wall.
Claim 11
Independent Claim
112 words
An apparatus for dry etching comprising: a vacuum chamber into which an etching gas is to be introduced; an electrode disposed in said vacuum chamber, said electrode having an upper surface for supporting a material to be etched; a smaller diameter cylindrical ring disposed around said electrode; a larger diameter cylindrical ring disposed around said smaller diameter cylindrical ring; and means for rotating at least one of said smaller and larger diameter rings relative to the other, said smaller and larger diameter rings each being provided at a circumferential wall thereof with a slit, said slits overlapping each other when at least one of said rings is rotated relative to the other.
Claim 12
Independent Claim
112 words
An apparatus for dry etching comprising: a vacuum chamber into which an etching gas is to be introduced; an electrode disposed in said vacuum chamber, said electrode having an upper surface for supporting a material to be etched; a smaller diameter cylindrical ring disposed around said electrode; a larger diameter cylindrical ring disposed around said smaller diameter cylindrical ring; and means for rotating at least one of said smaller and larger diameter rings relative to the other, said smaller and larger diameter rings each being provided at a circumferential wall thereof with a slit, said slits overlapping each other when at least one of said rings is rotated relative to the other.
Claim 13
Dependent Claim
40 words
An apparatus for dry etching in accordance with claim 10 further comprising means for raising and lowering said smaller and larger diameter rings so that said rings are independently raised above or lowered below said upper surface of said electrode.
Claim 14
Dependent Claim
181 words
An apparatus for dry etching in accordance with claim 11, wherein said means for raising and lowering said smaller and larger diameter rings comprising: support rods for supporting a central circular portion of said upper surface of said electrode, said central circular portion being defined by a circular slit through which said smaller and larger diameter rings are to be raised above and lowered below said upper surface of said electrode, said material to be etched being disposed on said central circular portion; first means connected to a first circular plate at a lower surface of said smaller diameter ring for moving said smaller diameter ring upward and downward, a bottom surface of said first circular plate being provided with holes through which said support rods pass; and second means connected to a second circular plate at a lower surface of said larger diameter ring for moving said larger diameter ring upward and downward, a bottom surface of said second circular plate being provided with holes through which said support rods pass, said first means and second means being coaxially disposed.
Claim 15
Dependent Claim
51 words
An apparatus for dry etching in accordance with claim 10 wherein said means for rotating at least one of said rings relative to the other includes means for controlling a rotation angle of said means to vary a degree of overlap of said slits of said smaller and larger diameter rings.
Claim 16
Dependent Claim
29 words
An apparatus for dry etching in accordance with claim 13, wherein said means for rotating at least one of said rings relative to the other comprises a stepping motor.
Claim 17
Dependent Claim
137 words
An apparatus for dry etching in accordance with claim 10, wherein said means for rotating at least one of said smaller and larger diameter rings relative to the other includes: support rods for supporting a central circular portion of said upper surface of said electrode, said central circular portion being defined by a circular slit along which said smaller and larger diameter rings are to be rotated, said material to be etched being disposed on said central circular portion; and first means connected to a lower surface of said smaller diameter ring for rotating said smaller diameter ring, a bottom surface of said smaller diameter ring being provided with arc-shaped opening through which said support rods pass, whereby only said smaller diameter ring is rotatable relative to said larger diameter ring, said larger diameter ring being unrotated.
Claim 18
Dependent Claim
73 words
An apparatus for dry etching in accordance with claim 15 further comprising second means connected to a lower surface of said larger diameter ring for rotating said larger diameter ring, a bottom surface of said larger diameter ring being provided with arc-shaped openings through which said support rods pass, said second means being disposed coaxially with said first means, whereby both said smaller and larger diameter rings are rotatable relative to each other.
Claim 19
Dependent Claim
33 words
An apparatus for dry etching in accordance with claim 10, wherein said smaller and larger diameter rings are provided with a plurality of slits, said slits being circumferentially equally spaced from each other.
Claim 20
Dependent Claim
20 words
An apparatus for dry etching in accordance with claim 17, wherein said slits are disposed wholly on said circumferential wall.
Claim 21
Dependent Claim
41 words
An apparatus for dry etching in accordance with claim 10, wherein said smaller and larger diameter rings are provided with a plurality of slits, said slits being disposed in a plurality of rows in a heightwise direction of said circumferential wall.
Claim 22
Dependent Claim
22 words
An apparatus for dry etching in accordance with claim 10, wherein said slit has a shape of a rectangle, circle or triangle.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-25 | 2001-02-24 | 2001-08-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-25 | 2005-02-24 | 2005-08-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-25 | 2009-02-24 | 2009-08-26 | $7700.00 | Window Closed / Lapsed |