US5658994A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Nonfunctionalized poly(arylene ether) dielectrics
Assignee: Delsper LP
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Filing: 1995-07-13
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Granted: 1997-08-19
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Expires: 2015-07-13
Abstract
Abstract An article of manufacture comprising a dielectric material on a microelectronic device, such as an integrated circuit, wherein the dielectric material contains a poly(arylene ether) polymer comprising a repeat unit of the structure: <IMAGE> wherein m=0 to 1.0; and n=1.0-m; and Ar1, Ar2, Ar3 and Ar4 are individually divalent arylene radicals, but Ar1, Ar2, Ar3 and Ar4, other than a diradical 9,9-diphenylfluorene, cannot be isomeric equivalents.
Inventors
- 👤 William Franklin Burgoyne, Jr.
- 👤 Lloyd Mahlon Robeson
- 👤 Raymond Nicholas Vrtis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 12:34
CPC Classifications
C; C08; C08G; C08G65/00; C08G65/34; C08L; C08L71/00; C08G65/38; C08G65/40; H; H01; H01B; H01B3/00; H01B3/18; H01B3/30; H01B3/42; H10; H10W; H10W20/00; H10W20/40; H10W20/45; H10W20/48; H10W70/00; H10W70/60; H10W70/67; H10W70/69; C08L2203/00; C08L2203/20; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31533; Y10T428/31551; Y10T428/31645; Y10T428/31652; Y10T428/31667
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
99 words
An article of manufacture comprising a combination of a dielectric material and a microelectronic device, wherein the dielectric material is provided on the microelectronic device and the dielectric material contains a poly(arylene ether) polymer consisting essentially of non-functional repeating units of the structure: ##STR12## wherein m=0 to 1.0; and n=1.0-m; and Ar 1 , Ar 2 , Ar 3 and Ar 4 are individually divalent arylene radicals selected from the group consisting of; ##STR13## and mixtures thereof, but Ar 1 , Ar 2 , Ar 3 and Ar 4 , other than the diradical 9,9-diphenylfluorene, are not isomeric equivalents.
Claim 2
Dependent Claim
99 words
An article of manufacture comprising a combination of a dielectric material and a microelectronic device, wherein the dielectric material is provided on the microelectronic device and the dielectric material contains a poly(arylene ether) polymer consisting essentially of non-functional repeating units of the structure: ##STR12## wherein m=0 to 1.0; and n=1.0-m; and Ar 1 , Ar 2 , Ar 3 and Ar 4 are individually divalent arylene radicals selected from the group consisting of; ##STR13## and mixtures thereof, but Ar 1 , Ar 2 , Ar 3 and Ar 4 , other than the diradical 9,9-diphenylfluorene, are not isomeric equivalents.
Claim 3
Dependent Claim
41 words
The invention according to claim 1 wherein said dielectric material has repeating units of a structure: ##STR14## wherein m=0 to 1.0; and n=1.0-m; and Ar 1 and Ar 3 are individually divalent arylene radicals selected from the group consisting of; ##STR15##
Claim 4
Dependent Claim
12 words
The invention according to claim 1 wherein said dielectric material has m=0.5-1.0.
Claim 5
Dependent Claim
17 words
The invention according to claim 1 wherein said dielectric material has m=1 and Ar 1 is biphenyl.
Claim 6
Dependent Claim
17 words
The invention according to claim 1 wherein said dielectric material has m=1 and Ar 1 is terphenyl.
Claim 7
Dependent Claim
14 words
The invention according to claim 1 wherein said microelectronic device is an integrated circuit.
Claim 8
Dependent Claim
23 words
The invention according to claim 6 wherein said integrated circuit has conductive regions and said dielectric material is provided adjacent said conductive region.
Claim 9
Dependent Claim
15 words
The invention according to claim 7 wherein said dielectric material is provided between conductive regions.
Claim 10
Dependent Claim
21 words
The invention according to claim 8 wherein said conductive regions are conductors and said dielectric material is provided between adjacent conductors.
Claim 11
Dependent Claim
16 words
The invention according to claim 9 wherein said dielectric material is a layer between said conductors.
Claim 12
Dependent Claim
13 words
The invention according to claim 1 wherein said poly(arylene ether) polymer is crosslinked.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-18 | 2001-02-17 | 2001-08-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-18 | 2005-02-17 | 2005-08-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-18 | 2009-02-17 | 2009-08-19 | $7700.00 | Window Closed / Lapsed |