Micromachined acceleration and coriolis sensor

Claim 1

A micromachined accelaration an Coriolis sensor for measuring linear and angular motion, said sensor comprising: a substrate having a proof mass, a plurality of resonators formed therein, and a frame-like main body portion surrounding said proof mass and said plurality of resonators, said plurality of resonators being formed between said proof mass and said main body portion thereby supporting said proof mass within said main body portion, said proof mass having a first natural resonant frequency, and said plurality of resonators each having a second natural resonant frequency, wherein said proof mass is capable of applying linear acceleration and rotational Coriolis forces to said plurality of resonators in response to linear and angular motion of said sensor, wherein at least two of said plurality of resonators are disposed on opposite sides of said proof mass; a first plurality of electrodes disposed adjacent said proof mass, said first plurality of electrodes providing electrostatic forces to said proof mass thereby causing vibration of said proof mass at said first natural resonant frequency; a second plurality of electrodes disposed adjacent said plurality of resonators, said second plurality of electrodes providing electrostatic forces to said plurality of resonators thereby causing vibration of said plurality of resonators at said second natural resonant frequency; electronic circuitry for exciting said first plurality of electrodes and said second plurality of electrodes and for sensing modulations in said second natural resonant frequency of said plurality of resonators caused by said linear acceleration and rotational Coriolis forces so as to produce acceleration and rotation signals indicative of said linear and angular motion of said sensor; means for mounting said first and second plurality of electrodes adjacent said proof mass; and means for connecting said electronic circuitry to said first and second plurality of electrodes.