Patent US2624642A successfully refreshed from Google Patents.
US5334901A
Expired / Lapsed
US
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Vibrating beam accelerometer
Assignee: Honeywell International Inc
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Filing: 1993-04-30
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Granted: 1994-08-02
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Expires: 2013-04-30
Abstract
Abstract A vibrating beam accelerometer contains an inner structure having a vibrating beam extending between a pair of isolator masses which are connected via isolator beams to a pair of structures, an outer structure having flexure beams extending between a mount structure and a proof mass structure and a peripheral seal structure surrounding said inner structure and said outer structure. Seal plates containing a ring of glass frit material sandwich the above assembly. An electrode pattern termination extends from the above assembly, through the ring of glass frit material, to electronic circuitry containing an oscillator.
Inventors
- 👤 William C. Albert
- 👤 Herbert T. Califano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:52
CPC Classifications
G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/097; G01P1/00; G01P1/02; G01P1/023
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
96 words
A vibrating beam accelerometer comprising: an inner structure comprising a vibrating beam extending between a pair of isolator masses which are each connected via isolator beams to a pair of structures; an outer structure comprising flexure beams extending between a mount structure and a proof mass structure; a peripheral seal structure mounted to said mount structure and surrounding said inner structure and said outer structure; an electrode pattern termination extending to and around an edge of said mount structure of said outer structure; and electronic circuitry means including an oscillator connected to said electrode pattern termination.
Claim 2
Dependent Claim
96 words
A vibrating beam accelerometer comprising: an inner structure comprising a vibrating beam extending between a pair of isolator masses which are each connected via isolator beams to a pair of structures; an outer structure comprising flexure beams extending between a mount structure and a proof mass structure; a peripheral seal structure mounted to said mount structure and surrounding said inner structure and said outer structure; an electrode pattern termination extending to and around an edge of said mount structure of said outer structure; and electronic circuitry means including an oscillator connected to said electrode pattern termination.
Claim 3
Dependent Claim
35 words
An accelerometer as claimed in claim 1 further comprising: a plurality of seal plates sandwiching said inner structure, said outer structure and said peripheral seal structure while allowing said electrode pattern termination to pass through.
Claim 4
Dependent Claim
18 words
An accelerometer as claimed in claim 2, wherein each of said plurality of seal plates comprises quartz crystal.
Claim 5
Dependent Claim
19 words
An accelerometer as claimed in claim 1 wherein said outer structure has a thickness greater than said inner structure.
Claim 6
Dependent Claim
24 words
An accelerometer as claimed in claim 1 wherein said outer structure is about three to about twenty times the thickness of said inner structure.
Claim 7
Dependent Claim
31 words
An accelerometer as claimed in claim 1 wherein said mount structure attaches said inner structure, said outer structure and said peripheral seal structure to a housing of said vibrating beam accelerometer.
Claim 8
Dependent Claim
21 words
An accelerometer as claimed in claim 1 wherein said peripheral seal structure surrounds said proof mass structure and said mount structure.
Claim 9
Dependent Claim
22 words
An accelerometer as claimed in claim 1 wherein said inner structure, said outer structure and said peripheral seal structure comprise quartz crystal.
Claim 10
Dependent Claim
23 words
An accelerometer as claimed in claim 2 wherein each of said plurality of seal plates comprises a ring of glass frit for sealing.
Claim 11
Dependent Claim
19 words
An accelerometer as claimed in claim 9 wherein said electrode pattern termination passes through said ring of glass frit.
Claim 12
Dependent Claim
106 words
An accelerometer comprising: a plurality of separate sensor structures wherein each of said plurality of separate sensor structures comprises: an inner structure comprising a vibrating beam extending between a pair of isolator masses which are each connected via isolator beams to a pair of structures; an outer structure comprising flexure beams extending between a mount structure and a proof mass structure; a peripheral seal structure mounted to said mount structure and surrounding said inner structure and said outer structure; an electrode pattern termination extending to and around an edge of said mount structure; and electronic circuitry means including an oscillator connected to said electrode pattern termination.
Claim 13
Dependent Claim
106 words
An accelerometer comprising: a plurality of separate sensor structures wherein each of said plurality of separate sensor structures comprises: an inner structure comprising a vibrating beam extending between a pair of isolator masses which are each connected via isolator beams to a pair of structures; an outer structure comprising flexure beams extending between a mount structure and a proof mass structure; a peripheral seal structure mounted to said mount structure and surrounding said inner structure and said outer structure; an electrode pattern termination extending to and around an edge of said mount structure; and electronic circuitry means including an oscillator connected to said electrode pattern termination.
Claim 14
Dependent Claim
30 words
An accelerometer as claimed in claim 11 further comprising: a plurality of seal plates sandwiching said plurality of separate sensor structures while allowing said electrode pattern termination to pass through.
Claim 15
Dependent Claim
23 words
An accelerometer as claimed in claim 12 wherein each of said plurality of seal plates comprises a ring of glass frit for sealing.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-01 | 1998-01-31 | 1998-08-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-01 | 2002-01-31 | 2002-08-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-01 | 2006-01-31 | 2006-08-02 | $7700.00 | Window Closed / Lapsed |