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US5656403A
Expired / Lapsed
US
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Method and template for focus control in lithography process
Assignee: United Microelectronics Corp
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Filing: 1996-01-30
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Granted: 1997-08-12
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Expires: 2016-01-30
Abstract
Abstract Disclosed is a template and a method for using the template for focus control of pattern definition image in lithographic process, particularly for IC production. The template has at least a serrated vernier and at least a rhombus printed thereon. In use, the template is mounted on a mask used for pattern definition during a lithographic process. Upon development of a wafer image of the mask, in the normal course of lithography, there is also visible on the wafer an image of the template. This image, particularly the rhombus pattern, can be easily visually inspected by quality control personnel. The rhombus pattern shows a defocus condition because its normally straight and parallel sides and corners show a roundness even with the slightest defocus. Wafers that have not been properly imaged during lithography can be discarded without wasting further process steps in IC production to enhance yield.
Inventors
- 👤 Wen-Bin Shieh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:53
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70605; G03F7/70616; G03F7/70633; G03F7/70641; G03F7/70681; G03F7/70683
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
84 words
A method for focus control of a mask pattern during a lithographic process, comprising the steps of: mounting a template on a mask used for the pattern definition, the template having a serrated vernier pattern and a rhombus pattern printed thereon; performing a lithographic process to form an image pattern of the mask and the template on a wafer; and visually inspecting the image pattern of the rhombus on the wafer to check whether roundness of the rhombus is within a predefined process latitude.
Claim 2
Independent Claim
84 words
A method for focus control of a mask pattern during a lithographic process, comprising the steps of: mounting a template on a mask used for the pattern definition, the template having a serrated vernier pattern and a rhombus pattern printed thereon; performing a lithographic process to form an image pattern of the mask and the template on a wafer; and visually inspecting the image pattern of the rhombus on the wafer to check whether roundness of the rhombus is within a predefined process latitude.
Claim 3
Dependent Claim
25 words
A method as claimed in claim 1, wherein the template pattern has a plurality of serrated verniers and a plurality of rhombuses arranged alternately thereon.
Claim 4
Dependent Claim
23 words
A method as claimed in claim 1, wherein the template pattern has six (6) serrated verniers and five (5) rhombuses arranged alternately thereon.
Claim 5
Dependent Claim
27 words
A method as claimed in claim 3, wherein the pattern on the template has a length of about 42 μm and a width of about 20 μm.
Claim 6
Dependent Claim
29 words
A method as claimed in claim 3, wherein each rhombus on the template has a diagonal length of about 20 μm and a diagonal width of about 4 μm.
Claim 7
Dependent Claim
28 words
A method as claimed in claim 3, wherein each serrated vernier on the template has a length of about 20 μm and a width of about 2 μm.
Claim 8
Dependent Claim
28 words
A method as claimed in claim 6, wherein each tooth of a serrated vernier has a length of about 1 μm and a width of about 1 μm.
Claim 9
Dependent Claim
106 words
A template for focus control of a mask pattern during a lithographic process, comprising: a template base; a rhombus pattern printed on the template base; and a serrated vernier pattern printed alongside the rhombus on the template base, the template being shaped and arranged such that it can be mounted on a mask used for pattern definition on a wafer in a lithographic process so as to develop an image pattern of the rhombus and the serrated vernier on the wafer, a visual inspection of the roundness of the rhombus imaged on the wafer determining a degree of defocus of a mask pattern on the wafer.
Claim 10
Dependent Claim
106 words
A template for focus control of a mask pattern during a lithographic process, comprising: a template base; a rhombus pattern printed on the template base; and a serrated vernier pattern printed alongside the rhombus on the template base, the template being shaped and arranged such that it can be mounted on a mask used for pattern definition on a wafer in a lithographic process so as to develop an image pattern of the rhombus and the serrated vernier on the wafer, a visual inspection of the roundness of the rhombus imaged on the wafer determining a degree of defocus of a mask pattern on the wafer.
Claim 11
Dependent Claim
27 words
A template according to claim 8, wherein there are a plurality of serrated vernier patterns and a plurality of rhombus patterns arranged alternately on the template base.
Claim 12
Dependent Claim
25 words
A template according to claim 8, wherein the template base has printed thereon six (6) serrated vernier patterns and five (5) rhombus patterns arranged alternately.
Claim 13
Dependent Claim
28 words
A template according to claim 10, wherein the pattern printed on the template base has a length of about 42 μm and a width of about 20 μm.
Claim 14
Dependent Claim
26 words
A template according to claim 10, wherein each rhombus pattern has a diagonal length of about 20 μm and a diagonal width of about 4 μm.
Claim 15
Dependent Claim
25 words
A template according to claim 10, wherein each serrated vernier pattern has a length of about 20 μm and a width of about 2 μm.
Claim 16
Dependent Claim
28 words
A template according to claim 13, wherein each tooth of a serrated vernier pattern has a length of about 1 μm and a width of about 1 μm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-11 | 2001-02-10 | 2001-08-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-11 | 2005-02-10 | 2005-08-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-11 | 2009-02-10 | 2009-08-12 | $7700.00 | Window Closed / Lapsed |