US5654575A
Expired / Lapsed
US
⏱️ 0.0 years remaining
TiSi2 /TiN clad interconnect technology
Assignee: Texas Instruments Inc
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Filing: 1995-06-07
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Granted: 1997-08-05
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Expires: 2015-06-07
Abstract
Abstract A TiSi 2 /TiN clad LI strap process and structure are disclosed which combine the advantages of both TiSi 2 and TiN LI processes. According to the invention, the retention of a thin TiN layer between the local interconnect and contacts provides a diffusion barrier against counterdoping and relaxes the thermal budget for subsequent processing.
Inventors
- 👤 Shin-puu Jeng
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:40
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/064; H10W20/066; H10W20/0698; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W20/4437; H10W20/4441; Y; Y10; Y10S; Y10S257/00; Y10S257/915
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
65 words
A local interconnect structure overlying and in contact with a region comprising a first silicide region, and sidewall oxide, and a second silicide region, said local interconnect structure comprising: a local interconnect strap comprising TiSi 2 ; and a TiN region abutting said strap, wherein said first silicide region, said sidewall oxide, and said second silicide region are all in contact with said TiN region.
Claim 2
Dependent Claim
65 words
A local interconnect structure overlying and in contact with a region comprising a first silicide region, and sidewall oxide, and a second silicide region, said local interconnect structure comprising: a local interconnect strap comprising TiSi 2 ; and a TiN region abutting said strap, wherein said first silicide region, said sidewall oxide, and said second silicide region are all in contact with said TiN region.
References Cited (Backward Citations)
US4746219A
Cited
JPS6358943A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-04 | 2001-02-03 | 2001-08-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-04 | 2005-02-03 | 2005-08-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-04 | 2009-02-03 | 2009-08-05 | $7700.00 | Window Closed / Lapsed |