Capacitor, electrode or wiring structure, and semi conductor device

Claim 2

A capacitor comprising: a first electrode layer of an electrically conductive material and defining an upper electrode of the capacitor; a second electrode layer of an electrically conductive metal susceptible to providing an alpha ray emission and defining a lower electrode of the capacitor, said second electrode layer having first and second major surfaces and being in at least partially registering spaced relationship with respect to said first electrode layer; an insulating layer of dielectric material interposed between and in respective engagement with said first electrode layer and the first major surface of said second electrode layer; and an electrically conductive layer having an alpha ray shielding characteristic disposed on the second major surface of said second electrode layer opposite from the first major surface of said second electrode layer on which said insulating layer of dielectric material is disposed; said electrically conductive layer having the alpha ray shielding characteristic being made of a metal compound, or metal alloy, including at least two metals selected from the group consisting of nickel, cobalt, copper and tungsten.

Claim 3

A capacitor as set forth in claim 1, wherein the dielectric material of said insulating layer is selected from the group consisting of tantalum oxide, strontium titanate, barium strontium titanate, and lead zirconate titanate.

Claim 4

A capacitor as set forth in claim 1, wherein said second electrode layer of an electrically conductive metal susceptible to providing an alpha ray emission contains platinum.

Claim 5

A capacitor as set forth in claim 3, wherein the electrically conductive layer having the alpha ray shielding characteristic is effective to decrease the energy of the alpha ray emission from the platinum of the second electrode layer to a level no greater than 2.7 MeV.

Claim 6

A capacitor as set forth in claim 1, wherein said electrically conductive layer has first and second major surfaces, and further including a first diffusion barrier layer interposed between and in respective engagement with the second major surface of said second electrode layer and the first major surface of said electrically conductive layer; and a second diffusion barrier layer disposed on the second major surface of said electrically conductive layer, said first and second diffusion barrier layers preventing diffusion of metal included in said electrically conductive layer.

Claim 7

A capacitor as set forth in claim 1, wherein said electrically conductive layer has first and second major surfaces, the first major surface of said electrically conductive layer being in engagement with the second major surface of said second electrode layer; and further including a diffusion barrier layer disposed on the second major surface of said electrically conductive layer for preventing diffusion of metal included in said electrically conductive layer.

Claim 8

A capacitor as set forth in claim 1, wherein said electrically conductive layer has first and second major surfaces, and further including at least one diffusion barrier layer interposed between and in respective engagement with the second major surface of said second electrode layer and the first major surface of said electrically conductive layer for preventing diffusion of metal included in said electrically conductive layer.

Claim 9

An electrically conductive component for use in a microcircuit having a semiconductor substrate, said electrically conductive component comprising: a first layer of an electrically conductive metal susceptible to providing an alpha ray emission; and a second electrically conductive layer having an alpha ray shielding characteristic disposed on said first electrically conductive layer and adapted to be located between said first electrically conductive layer and the semiconductor substrate of the microcircuit; said second electrically conductive layer having the alpha ray shielding characteristic being made of a metal compound, or metal alloy, including at least two metals selected from the group consisting of nickel, cobalt, copper and tungsten.

Claim 10

An electrically conductive component for use in a microcircuit having a semiconductor substrate, said electrically conductive component comprising: a first layer of an electrically conductive metal susceptible to providing an alpha ray emission; and a second electrically conductive layer having an alpha ray shielding characteristic disposed on said first electrically conductive layer and adapted to be located between said first electrically conductive layer and the semiconductor substrate of the microcircuit; said second electrically conductive layer having the alpha ray shielding characteristic being made of a metal compound, or metal alloy, including at least two metals selected from the group consisting of nickel, cobalt, copper and tungsten.

Claim 11

An electrically conductive component as set forth in claim 8, wherein said first layer of an electrically conductive metal susceptible to providing an alpha ray emission contains platinum.

Claim 12

An electrically conductive component as set forth in claim 9, wherein the second electrically conductive layer having the alpha ray shielding characteristic is effective to decrease the energy of the alpha ray emission from the platinum of the first layer of an electrically conductive metal susceptible to providing an alpha ray emission to a level no greater than 2.7 MeV.

Claim 13

An electrically conductive component as set forth in claim 8, wherein each of said first layer of an electrically conductive metal susceptible to providing an alpha ray emission and said second electrically conductive layer having an alpha ray shielding characteristic has first and second major surfaces, and further including a first diffusion barrier layer interposed between and in respective engagement with the second major surface of said first electrically conductive layer and the first major surface of said second electrically conductive layer; and a second diffusion barrier layer disposed on the second major surface of said second electrically conductive layer, said first and second diffusion barrier layers preventing diffusion of metal included in said second electrically conductive layer.

Claim 14

An electrically conductive component as set forth in claim 8, wherein each of said first layer of an electrically conductive metal susceptible to providing an alpha ray emission and said second electrically conductive layer having an alpha ray shielding characteristic has first and second major surfaces, the first major surface of said second electrically conductive layer being in engagement with the second major surface of said first electrically conductive layer; and further including a diffusion barrier layer disposed on the second major surface of said second electrically conductive layer for preventing diffusion of metal included in said second electrically conductive layer.

Claim 15

An electrically conductive component as set forth in claim 8, wherein each of said first layer of an electrically conductive metal susceptible to providing an alpha ray emission and said second electrically conductive layer having an alpha ray shielding characteristic has first and second major surfaces, and further including at least one diffusion barrier layer interposed between and in respective engagement with the second major surface of said first electrically conductive layer and the first major surface of said second electrically conductive layer for preventing diffusion of metal included in said second electrically conductive layer.

Claim 16

An electrically conductive component as set forth in claim 8, wherein the first layer of an electrically conductive metal susceptible to providing an alpha ray emission is a wiring layer.

Claim 17

An electrically conductive component as set forth in claim 8, wherein the first layer of an electrically conductive metal susceptible to providing an alpha ray emission is an electrode.

Claim 18

A capacitor comprising: a first electrode layer of an electrically conductive material and defining an upper electrode of the capacitor; a second electrode layer of an electrically conductive metal susceptible to providing an alpha ray emission and defining a lower electrode of the capacitor, said second electrode layer having first and second major surfaces and being in least partially registering spaced relationship with respect to said first electrode layer; an insulating layer of dielectric material interposed between and in respective engagement with said first electrode layer and the first major surface of said second electrode layer; an electrically conductive layer having an alpha ray shielding characteristic disposed on the second major surface of said second electrode layer opposite from the first major surface of said second electrode layer on which said insulating layer of dielectric material is disposed; said electrically conductive layer having the alpha ray shielding characteristic being made of at least one metal, or compound of such metal, or alloy of such metal wherein the metal is selected from the group consisting of nickel, cobalt, copper and tungsten; said electrically conductive layer having first and second major surfaces; a first diffusion barrier layer interposed between and in respective engagement with the second major surface of said second electrode layer and the first major surface of said electrically conductive layer; and a second diffusion barrier layer disposed on the second major surface of said electrically conductive layer, said first and second diffusion barrier layers preventing diffusion of metal included in said electrically conductive layer.

Claim 19

A capacitor comprising: a first electrode layer of an electrically conductive material and defining an upper electrode of the capacitor; a second electrode layer of an electrically conductive metal susceptible to providing an alpha ray emission and defining a lower electrode of the capacitor, said second electrode layer having first and second major surfaces and being in least partially registering spaced relationship with respect to said first electrode layer; an insulating layer of dielectric material interposed between and in respective engagement with said first electrode layer and the first major surface of said second electrode layer; an electrically conductive layer having an alpha ray shielding characteristic disposed on the second major surface of said second electrode layer opposite from the first major surface of said second electrode layer on which said insulating layer of dielectric material is disposed; said electrically conductive layer having the alpha ray shielding characteristic being made of at least one metal, or compound of such metal, or alloy of such metal wherein the metal is selected from the group consisting of nickel, cobalt, copper and tungsten; said electrically conductive layer having first and second major surfaces; a first diffusion barrier layer interposed between and in respective engagement with the second major surface of said second electrode layer and the first major surface of said electrically conductive layer; and a second diffusion barrier layer disposed on the second major surface of said electrically conductive layer, said first and second diffusion barrier layers preventing diffusion of metal included in said electrically conductive layer.

Claim 20

A capacitor comprising: a first electrode layer of an electrically conductive material and defining an upper electrode of the capacitor; a second electrode layer of an electrically conductive metal susceptible to providing an alpha ray emission and defining a lower electrode of the capacitor, said second electrode layer having first and second major surfaces and being in at least partially registering spaced relationship with respect to said first electrode layer; an insulating layer of dielectric material interposed between and in respective engagement with said first electrode layer and the first major surface of said second electrode layer; an electrically conductive layer having an alpha ray shielding characteristic disposed on the second major surface of said second electrode layer opposite from the first major surface of said second electrode layer on which said insulating layer of dielectric material is disposed; said electrically conductive layer having the alpha ray shielding characteristic being made of at least one metal, or compound of such metal, or alloy of such metal wherein the metal is selected the group consisting of nickel, cobalt, copper and tungsten; said electrically conductive layer having first and second major surfaces; and at least one diffusion barrier layer interposed between and in respective engagement with the second major surface of said second electrode layer and the first major surface of said electrically conductive layer for preventing diffusion of metal included in said electrically conductive layer.

Claim 21

A capacitor comprising: a first electrode layer of an electrically conductive material and defining an upper electrode of the capacitor; a second electrode layer of an electrically conductive metal susceptible to providing an alpha ray emission and defining a lower electrode of the capacitor, said second electrode layer having first and second major surfaces and being in at least partially registering spaced relationship with respect to said first electrode layer; an insulating layer of dielectric material interposed between and in respective engagement with said first electrode layer and the first major surface of said second electrode layer; an electrically conductive layer having an alpha ray shielding characteristic disposed on the second major surface of said second electrode layer opposite from the first major surface of said second electrode layer on which said insulating layer of dielectric material is disposed; said electrically conductive layer having the alpha ray shielding characteristic being made of at least one metal, or compound of such metal, or alloy of such metal wherein the metal is selected the group consisting of nickel, cobalt, copper and tungsten; said electrically conductive layer having first and second major surfaces; and at least one diffusion barrier layer interposed between and in respective engagement with the second major surface of said second electrode layer and the first major surface of said electrically conductive layer for preventing diffusion of metal included in said electrically conductive layer.

Claim 22

A capacitor comprising: a first electrode layer of an electrically conductive material and defining an upper electrode of the capacitor; a second electrode layer of an electrically conductive metal susceptible to providing an alpha ray emission and defining a lower electrode of the capacitor, said second electrode layer having first and second major surfaces and being in at least partially registering spaced relationship with respect to said first electrode layer; an insulating layer of dielectric material interposed between and in respective engagement with said first electrode layer and the first major surface of said second electrode layer; an electrically conductive layer having an alpha ray shielding characteristic disposed on the second major surface of said electrode layer opposite from the first major surface of said second electrode layer on which insulating layer of dielectric material is disposed; said electrically conductive layer having the alpha ray shielding characteristic being made of a silicon-containing metal compound, or a silicon-containing metal alloy, wherein the metal in the silicon-containing metal compound or the silicon-containing metal alloy is selected from the group consisting of nickel, cobalt, copper and tungsten; said electrically conductive layer having first and second major surfaces; a first diffusion barrier layer interposed between and in respective engagement with the second major surface of said second electrode layer and the first major surface of said electrically conductive layer; and a second diffusion barrier layer disposed on the second major surface of said electrically conductive layer, said first and second diffusion barrier layers preventing diffusion of metal included in said electrically conductive layer.

Claim 23

A capacitor comprising: a first electrode layer of an electrically conductive material and defining an upper electrode of the capacitor; a second electrode layer of an electrically conductive metal susceptible to providing an alpha ray emission and defining a lower electrode of the capacitor, said second electrode layer having first and second major surfaces and being in at least partially registering spaced relationship with respect to said first electrode layer; an insulating layer of dielectric material interposed between and in respective engagement with said first electrode layer and the first major surface of said second electrode layer; an electrically conductive layer having an alpha ray shielding characteristic disposed on the second major surface of said electrode layer opposite from the first major surface of said second electrode layer on which insulating layer of dielectric material is disposed; said electrically conductive layer having the alpha ray shielding characteristic being made of a silicon-containing metal compound, or a silicon-containing metal alloy, wherein the metal in the silicon-containing metal compound or the silicon-containing metal alloy is selected from the group consisting of nickel, cobalt, copper and tungsten; said electrically conductive layer having first and second major surfaces; a first diffusion barrier layer interposed between and in respective engagement with the second major surface of said second electrode layer and the first major surface of said electrically conductive layer; and a second diffusion barrier layer disposed on the second major surface of said electrically conductive layer, said first and second diffusion barrier layers preventing diffusion of metal included in said electrically conductive layer.

Claim 24

A capacitor comprising: a first electrode layer of an electrically conductive material and defining an upper electrode of the capacitor; a second electrode layer of an electrically conductive metal susceptible to providing an alpha ray emission and defining a lower electrode of the capacitor, said second electrode layer having first and second major surfaces and being in at least partially registering spaced relationship with respect to said first electrode layer; an insulating layer of dielectric material interposed between and in respective engagement with said first electrode layer and the first major surface of said second electrode layer; an electrically conductive layer having an alpha ray shielding characteristic disposed on the second major surface of said second electrode layer opposite from the first major surface of said second electrode layer on which said insulating layer of dielectric material is disposed; said electrically conductive layer having the alpha ray shielding characteristic being made of a silicon-containing metal compound, or a silicon-containing metal alloy, wherein the metal in the silicon-containing metal compound or the silicon-containing metal alloy is selected from the group consisting of nickel, cobalt, copper and tungsten; said electrically conductive layer having first and second major surfaces; and at least one diffusion barrier layer interposed between and in respective engagement with the second major surface of said second electrode layer and the first major surface of said electrically conductive layer for preventing diffusion of metal included in said electrically conductive layer.

Claim 25

A capacitor comprising: a first electrode layer of an electrically conductive material and defining an upper electrode of the capacitor; a second electrode layer of an electrically conductive metal susceptible to providing an alpha ray emission and defining a lower electrode of the capacitor, said second electrode layer having first and second major surfaces and being in at least partially registering spaced relationship with respect to said first electrode layer; an insulating layer of dielectric material interposed between and in respective engagement with said first electrode layer and the first major surface of said second electrode layer; an electrically conductive layer having an alpha ray shielding characteristic disposed on the second major surface of said second electrode layer opposite from the first major surface of said second electrode layer on which said insulating layer of dielectric material is disposed; said electrically conductive layer having the alpha ray shielding characteristic being made of a silicon-containing metal compound, or a silicon-containing metal alloy, wherein the metal in the silicon-containing metal compound or the silicon-containing metal alloy is selected from the group consisting of nickel, cobalt, copper and tungsten; said electrically conductive layer having first and second major surfaces; and at least one diffusion barrier layer interposed between and in respective engagement with the second major surface of said second electrode layer and the first major surface of said electrically conductive layer for preventing diffusion of metal included in said electrically conductive layer.

Claim 26

An electrically conductive component for use in a microcircuit having a semiconductor substrate, said electrically conductive component comprising: a first layer of an electrically conductive metal susceptible to providing an alpha ray emission; a second electrically conductive layer having an alpha ray shielding characteristic disposed on said first electrically conductive layer and adapted to be located between said first electrically conductive layer and the semiconductor substrate of the microcircuit; said second electrically conductive layer having the alpha ray shielding characteristic being made of at least one metal or compound of such metal, or alloy of such metal, wherein the metal is selected from the group consisting of nickel, cobalt, copper and tungsten; each of said first layer of an electrically conductive metal susceptible to providing an alpha ray emission and said second electrically conductive layer having an alpha ray shielding characteristic having first and second major surfaces; a first diffusion barrier layer interposed between and in respective engagement with the second major surface of said first electrically conductive layer and the first major surface of said second electrically conductive layer; and a second diffusion barrier layer disposed on the second major surface of said second electrically conductive layer, said first and second diffusion barrier layers preventing diffusion of metal included in said second electrically conductive layer.

Claim 27

An electrically conductive component for use in a microcircuit having a semiconductor substrate, said electrically conductive component comprising: a first layer of an electrically conductive metal susceptible to providing an alpha ray emission; a second electrically conductive layer having an alpha ray shielding characteristic disposed on said first electrically conductive layer and adapted to be located between said first electrically conductive layer and the semiconductor substrate of the microcircuit; said second electrically conductive layer having the alpha ray shielding characteristic being made of at least one metal or compound of such metal, or alloy of such metal, wherein the metal is selected from the group consisting of nickel, cobalt, copper and tungsten; each of said first layer of an electrically conductive metal susceptible to providing an alpha ray emission and said second electrically conductive layer having an alpha ray shielding characteristic having first and second major surfaces; a first diffusion barrier layer interposed between and in respective engagement with the second major surface of said first electrically conductive layer and the first major surface of said second electrically conductive layer; and a second diffusion barrier layer disposed on the second major surface of said second electrically conductive layer, said first and second diffusion barrier layers preventing diffusion of metal included in said second electrically conductive layer.

Claim 28

An electrically conductive component for use in a microcircuit having a semiconductor substrate, said electrically conductive component comprising: a first layer of an electrically conductive metal susceptible to providing an alpha ray emission; a second electrically conductive layer having an alpha ray shielding characteristic disposed on said first electrically conductive layer and adapted to be located between said first electrically conductive layer and the semiconductor substrate of the microcircuit; said second electrically conductive layer having the alpha ray shielding characteristic being made of at least one metal or compound of such metal, or alloy of such metal, wherein the metal is selected from the group consisting of nickel, cobalt, copper and tungsten; each of said first layer of an electrically conductive metal susceptible to providing an alpha ray emission and said second electrically conductive layer having an alpha ray shielding characteristic having first and second major surfaces; and at least one diffusion barrier layer interposed between and in respective engagement with the second major surface of said first electrically conductive layer and the first major surface of said second electrically layer for preventing diffusion of metal included in said second electrically conductive layer.

Claim 29

An electrically conductive component for use in a microcircuit having a semiconductor substrate, said electrically conductive component comprising: a first layer of an electrically conductive metal susceptible to providing an alpha ray emission; a second electrically conductive layer having an alpha ray shielding characteristic disposed on said first electrically conductive layer and adapted to be located between said first electrically conductive layer and the semiconductor substrate of the microcircuit; said second electrically conductive layer having the alpha ray shielding characteristic being made of at least one metal or compound of such metal, or alloy of such metal, wherein the metal is selected from the group consisting of nickel, cobalt, copper and tungsten; each of said first layer of an electrically conductive metal susceptible to providing an alpha ray emission and said second electrically conductive layer having an alpha ray shielding characteristic having first and second major surfaces; and at least one diffusion barrier layer interposed between and in respective engagement with the second major surface of said first electrically conductive layer and the first major surface of said second electrically layer for preventing diffusion of metal included in said second electrically conductive layer.

Claim 30

An electrically conductive component for use in a microcircuit having a semiconductor substrate, said electrically conductive component comprising: a first layer of an electrically conductive metal susceptible to providing an alpha ray emission; a second electrically conductive layer having an alpha ray shielding characteristic disposed on said first electrically conductive layer and adapted to be located between said first electrically conductive layer and the semiconductor substrate of the microcircuit; said second electrically conductive layer having the alpha ray shielding characteristic being made of a silicon-containing metal compound or a silicon-containing metal alloy, wherein the metal in the silicon-containing metal compound or the silicon-containing metal alloy is selected from the group consisting of nickel, cobalt, copper and tungsten; each of said first layer of an electrically conductive metal susceptible to providing an alpha ray emission and said second electrically conductive layer having an alpha ray shielding characteristic having first and second major surfaces; a first diffusion barrier layer interposed between and in respective engagement with the second major surface of said first electrically conductive layer and the first major surface of said second electrically conductive layer; and a second diffusion barrier layer disposed on the second major surface of said second electrically conductive layer, said first and second diffusion barrier layers preventing diffusion of metal included in said second electrically conductive layer.

Claim 31

An electrically conductive component for use in a microcircuit having a semiconductor substrate, said electrically conductive component comprising: a first layer of an electrically conductive metal susceptible to providing an alpha ray emission; a second electrically conductive layer having an alpha ray shielding characteristic disposed on said first electrically conductive layer and adapted to be located between said first electrically conductive layer and the semiconductor substrate of the microcircuit; said second electrically conductive layer having the alpha ray shielding characteristic being made of a silicon-containing metal compound or a silicon-containing metal alloy, wherein the metal in the silicon-containing metal compound or the silicon-containing metal alloy is selected from the group consisting of nickel, cobalt, copper and tungsten; each of said first layer of an electrically conductive metal susceptible to providing an alpha ray emission and said second electrically conductive layer having an alpha ray shielding characteristic having first and second major surfaces; a first diffusion barrier layer interposed between and in respective engagement with the second major surface of said first electrically conductive layer and the first major surface of said second electrically conductive layer; and a second diffusion barrier layer disposed on the second major surface of said second electrically conductive layer, said first and second diffusion barrier layers preventing diffusion of metal included in said second electrically conductive layer.

Claim 32

An electrically conductive component for use in a microcircuit having a semiconductor substrate, said electrically conductive component comprising: a first layer of an electrically conductive metal susceptible to providing an alpha ray emission; a second electrically conductive layer having an alpha ray shielding characteristic disposed on said first electrically conductive layer and adapted to be located between said first electrically conductive layer and the semiconductor substrate of the microcircuit; said second electrically conductive layer having the alpha ray shielding characteristic being made of a silicon-containing metal compound or a silicon-containing metal alloy, wherein the metal in the silicon-containing metal compound or the silicon-containing metal alloy is selected from the group consisting of nickel, cobalt, copper and tungsten; each of said first layer of an electrically conductive metal susceptible to providing an alpha ray emission and said second electrically conductive layer having an alpha ray shielding characteristic having first and second major surfaces; and at least one diffusion barrier layer interposed between and in respective engagement with the second major surface of said first electrically conductive layer and the first major surface of said electrically conductive layer for preventing diffusion of metal included in said second electrically conductive layer.

Claim 33

An electrically conductive component for use in a microcircuit having a semiconductor substrate, said electrically conductive component comprising: a first layer of an electrically conductive metal susceptible to providing an alpha ray emission; a second electrically conductive layer having an alpha ray shielding characteristic disposed on said first electrically conductive layer and adapted to be located between said first electrically conductive layer and the semiconductor substrate of the microcircuit; said second electrically conductive layer having the alpha ray shielding characteristic being made of a silicon-containing metal compound or a silicon-containing metal alloy, wherein the metal in the silicon-containing metal compound or the silicon-containing metal alloy is selected from the group consisting of nickel, cobalt, copper and tungsten; each of said first layer of an electrically conductive metal susceptible to providing an alpha ray emission and said second electrically conductive layer having an alpha ray shielding characteristic having first and second major surfaces; and at least one diffusion barrier layer interposed between and in respective engagement with the second major surface of said first electrically conductive layer and the first major surface of said electrically conductive layer for preventing diffusion of metal included in said second electrically conductive layer.