Abstract The present invention discloses a structure of a transistor in a semiconductor device and a method of manufacturing the same. The present invention manufactures a high voltage transistor by etching a silicon substrate to a depth deeper than that of the field oxide film by a self-aligned wet etching process using the field oxide film as a mask and, thereafter, by forming the first gate electrode which electrically switches ON and OFF between the source region and the drain region by using a gate electrode mask and simultaneously forming a second gate electrode to prevent a junction breakdown below the bird's beak of the field oxide film. Accordingly, the present invention can improve the degree of integration of the device by forming a gate electrode to prevent a junction breakdown below the bird's beak of the field oxide film.
A structure of a high voltage transistor in a semiconductor device characterized by the forming of a first gate electrode on a silicon substrate by an etching process using a gate electrode mask, the forming of a second gate electrode connected to said first gate electrode below a bird's beak of a field oxide film, and the forming of source and drain regions on said silicon substrate between said first and second gate electrodes.
Claim 2
Dependent Claim
74 words
A structure of a high voltage transistor in a semiconductor device characterized by the forming of a first gate electrode on a silicon substrate by an etching process using a gate electrode mask, the forming of a second gate electrode connected to said first gate electrode below a bird's beak of a field oxide film, and the forming of source and drain regions on said silicon substrate between said first and second gate electrodes.
Claim 3
Dependent Claim
84 words
A structure of a high voltage transistor in a semiconductor device characterized by the forming of a first gate electrode on a silicon substrate, which is more deeply recessed than the field oxide film, by an etching process using a gate electrode mask, the forming of a second gate electrode connected to said first gate electrode below a bird's beak of said field oxide film, and the forming of source and drain regions on said silicon substrate between said first and second gate electrodes.
Claim 4
Dependent Claim
84 words
A structure of a high voltage transistor in a semiconductor device characterized by the forming of a first gate electrode on a silicon substrate, which is more deeply recessed than the field oxide film, by an etching process using a gate electrode mask, the forming of a second gate electrode connected to said first gate electrode below a bird's beak of said field oxide film, and the forming of source and drain regions on said silicon substrate between said first and second gate electrodes.