Functional substrate for controlling pixels

Claim 2

A functional substrate prepared by a process comprising: a first step of forming on a substrate a first opaque metal or alloy film having been subjected to patterning to a first pattern form; a second step of providing a first photosensitive colored resin film on the substrate having said first opaque metal or alloy film; a third step of subjecting the first photosensitive colored resin film formed in said second step, through a first opaque metal or alloy film in the form of the first pattern as a mask, to exposure from the back side of the substrate, and removing the first photosensitive colored resin film formed on the first opaque metal or alloy film to leave the first colored resin film on which the first opaque metal or alloy film is not formed; a fourth step of forming a second opaque metal or alloy film having been subjected to patterning to a second pattern form, on the substrate having the first colored resin film having been subjected to patterning in said third step and the first opaque metal or alloy film; a fifth step of forming a second photosensitive colored resin film on the substrate having said second opaque metal or alloy film; a sixth step of subjecting the second photosensitive colored resin film formed in said fifth step, through a second opaque metal or alloy film in the form of the second pattern as a mask, to exposure from the back side of the substrate, and removing the second photosensitive colored resin film formed on the second opaque metal or alloy film to leave the second colored resin film on which the second opaque metal or alloy film is not formed; a seventh step of removing the second opaque metal or alloy film; and an eighth step of providing on the first and second colored resin films, transparent conductive films insulated from each other, in the state that they are electrically connected to the first opaque metal or alloy film.

Claim 3

A process for the preparation of a color filter, comprising: a first step of forming on a substrate a first opaque metal or alloy film having been subjected to patterning to a first pattern form; a second step of providing a first photosensitive colored resin film on the substrate having said first opaque metal or alloy film; a third step of subjecting the first photosensitive colored resin film formed in said second step, through a first opaque metal or alloy film in the form of the first pattern as a mask, to exposure from the back side of the substrate, and removing the first photosensitive colored resin film formed on the first opaque metal or alloy film to leave the first colored resin film on which the first opaque metal or alloy film is not formed; a fourth step of forming a second opaque metal or alloy film having been subjected to patterning to a second pattern form, on the substrate having the first colored resin film having been subjected to patterning in said third step and the first opaque metal or alloy film; a fifth step of forming a second photosensitive colored resin film on the substrate having said second opaque metal or alloy film; a sixth step of subjecting the second photosensitive colored resin film formed in said fifth step, through a second opaque metal or alloy film in the form of the second pattern as a mask, to exposure from the back side of the substrate, and removing the second photosensitive colored resin film formed on the second opaque metal or alloy film to leave the second colored resin film on which the second opaque metal or alloy film is not formed; a seventh step of forming a third opaque metal or alloy film having been subjected to patterning to a third pattern form; an eighth step of forming a third photosensitive colored resin film on the substrate having said third opaque metal or alloy film; a ninth step of subjecting the third photosensitive colored resin film formed in said eighth step, through a third opaque metal or alloy film in the form of the third pattern as a mask, to exposure from the back side of the substrate, and removing the third photosensitive colored resin film formed on the third opaque metal or alloy film to leave the third colored resin film on which the third opaque metal or alloy film is not formed; a tenth step of removing the second and third opaque metal or alloy films; and an eleventh step of providing on the first, second and third colored resin films, transparent conductive films insulated from each other, in the state that they are electrically connected to the first opaque metal or alloy film.

Claim 4

A process for the preparation of a color filter, comprising: a first step of forming on a substrate a first opaque metal or alloy film having been subjected to patterning to a first pattern form; a second step of providing a first photosensitive colored resin film on the substrate having said first opaque metal or alloy film; a third step of subjecting the first photosensitive colored resin film formed in said second step, through a first opaque metal or alloy film in the form of the first pattern as a mask, to exposure from the back side of the substrate, and removing the first photosensitive colored resin film formed on the first opaque metal or alloy film to leave the first colored resin film on which the first opaque metal or alloy film is not formed; a fourth step of forming a second opaque metal or alloy film having been subjected to patterning to a second pattern form, on the substrate having the first colored resin film having been subjected to patterning in said third step and the first opaque metal or alloy film; a fifth step of forming a second photosensitive colored resin film on the substrate having said second opaque metal or alloy film; a sixth step of subjecting the second photosensitive colored resin film formed in said fifth step, through a second opaque metal or alloy film in the form of the second pattern as a mask, to exposure from the back side of the substrate, and removing the second photosensitive colored resin film formed on the second opaque metal or alloy film to leave the second colored resin film on which the second opaque metal or alloy film is not formed; a seventh step of forming a third opaque metal or alloy film having been subjected to patterning to a third pattern form; an eighth step of forming a third photosensitive colored resin film on the substrate having said third opaque metal or alloy film; a ninth step of subjecting the third photosensitive colored resin film formed in said eighth step, through a third opaque metal or alloy film in the form of the third pattern as a mask, to exposure from the back side of the substrate, and removing the third photosensitive colored resin film formed on the third opaque metal or alloy film to leave the third colored resin film on which the third opaque metal or alloy film is not formed; a tenth step of removing the second and third opaque metal or alloy films; and an eleventh step of providing on the first, second and third colored resin films, transparent conductive films insulated from each other, in the state that they are electrically connected to the first opaque metal or alloy film.

Claim 5

The process for the preparation of a color filter according to claim 2, wherein said first and second opaque low-resistivity films are formed of metals or alloys different from each other.

Claim 6

The process for the preparation of a color filter according to claim 2, wherein said first, second and third colored resin films are colored in different colors from each other.

Claim 7

A process for the preparation of a color filter, comprising: a first step of forming on a substrate a first opaque metal or alloy film having been subjected to patterning to a first pattern form; a second step of providing a first photosensitive colored resin film on the substrate having said first opaque metal or alloy film; a third step of subjecting the first photosensitive colored resin film formed in said second step, through a first opaque metal or alloy film in the form of the first pattern as a mask, to exposure from the back side of the substrate, and removing the first photosensitive colored resin film formed on the first opaque metal or alloy film to leave the first colored resin film on which the first opaque metal or alloy film is not formed; a fourth step of forming a second opaque metal or alloy film having been subjected to patterning to a second pattern form, on the substrate having the first colored resin film having been subjected to patterning in said third step and the first opaque metal or alloy film; a fifth step of forming a second photosensitive colored resin film on the substrate having said second opaque metal or alloy film; a sixth step of subjecting the second photosensitive colored resin film formed in said fifth step, through a second opaque metal or alloy film in the form of the second pattern as a mask, to exposure from the back side of the substrate, and removing the second photosensitive colored resin film formed on the second opaque metal or alloy film to leave the second colored resin film on which the second opaque metal or alloy film is not formed; a seventh step of removing the second opaque metal or alloy film; and an eighth step of providing on the first and second colored resin films, transparent conductive films insulated from each other, in the state that they are electrically connected to the first opaque metal or alloy film.

Claim 8

A process for the preparation of a color filter, comprising: a first step of forming on a substrate a first opaque metal or alloy film having been subjected to patterning to a first pattern form; a second step of providing a first photosensitive colored resin film on the substrate having said first opaque metal or alloy film; a third step of subjecting the first photosensitive colored resin film formed in said second step, through a first opaque metal or alloy film in the form of the first pattern as a mask, to exposure from the back side of the substrate, and removing the first photosensitive colored resin film formed on the first opaque metal or alloy film to leave the first colored resin film on which the first opaque metal or alloy film is not formed; a fourth step of forming a second opaque metal or alloy film having been subjected to patterning to a second pattern form, on the substrate having the first colored resin film having been subjected to patterning in said third step and the first opaque metal or alloy film; a fifth step of forming a second photosensitive colored resin film on the substrate having said second opaque metal or alloy film; a sixth step of subjecting the second photosensitive colored resin film formed in said fifth step, through a second opaque metal or alloy film in the form of the second pattern as a mask, to exposure from the back side of the substrate, and removing the second photosensitive colored resin film formed on the second opaque metal or alloy film to leave the second colored resin film on which the second opaque metal or alloy film is not formed; a seventh step of removing the second opaque metal or alloy film; and an eighth step of providing on the first and second colored resin films, transparent conductive films insulated from each other, in the state that they are electrically connected to the first opaque metal or alloy film.

Claim 9

The process for the preparation of a color filter according to claim 5, wherein said first and second opaque low-resistivity films are formed of metals or alloys different from each other.