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Giant magnetoresistive effect sensor, particularly having a multilayered magnetic thin film layer

Assignee: Hitachi Ltd
•
Filing: 1995-08-31
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Granted: 1997-07-15
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Expires: 2015-08-31
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Abstract

Abstract A spin-valve read head of the giant magnetoresistive type in a data storage system has at least one magnetic thin film layer comprising a plurality of magnetic thinner film layers of ferromagnetic material with the same crystal plane orientation from one magnetic thinner film to another, and an interface between adjacent magnetic thinner films having a discontinuity in single-crystal epitaxial growth. Each magnetic thinner film layer is composed of an alloy including each of Fe, Ni and Co and has a weight ratio of Co:Fe equal to 90:10. The crystal has a crystal structure that is face centered cubic and a crystal plane orientation (111) that is highly ordered. The interfaces may be layers of Ni or Cu. The layers all exhibit a condition of magnetic orientation and annealed structure resulting from being annealed and cooled in a magnetic field sufficiently to have an anisotropic energy of the first magnetic thin film layer in an equilibrium state that is smaller than an identical structure before annealing.

Inventors

  • 👤 Koichi Nishioka
  • 👤 Hideo Fujiwara
  • 👤 Takayuki Iseki

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 04:46
CPC Classifications
G; G11; G11B; G11B5/00; G11B5/127; G11B5/33; G11B5/39; G11B5/3903; B; B82; B82Y; B82Y10/00; B82Y25/00; G01; G01R; G01R33/00; G01R33/02; G01R33/06; G01R33/09; G01R33/093; G11B2005/3996

Claims Analysis

Total Claims: 60
Claim 1
Independent Claim 264 words
A magnetoresistive spin-valve sensor of the giant magnetoresistive type, comprising: a first magnetic thin film layer of substantially ferromagnetic material; a second magnetic thin film layer of substantially ferromagnetic material; a non-magnetic thin film layer of non-magnetic metallic material sandwiched between said first and second magnetic thin film layers; a thin film layer of anti-ferromagnetic material adjacent to said second magnetic thin film layer and in exchange coupling at adjacent surfaces with said second magnetic thin film layer to fix a magnetization orientation of said second magnetic thin film layer along a substantially fixed first direction; said first magnetic thin film layer having a magnetization orientation that is in a second direction that is freely movable relative to said first direction in response to externally applied magnetic fields to be sensed, for thereby changing resistance of the layers to a passage of an electric sensing current in proportion to a first power of cosine of an angle θ between said first direction and said second direction; said first magnetic thin film layer, said second magnetic thin film layer, said thin film layer of anti-ferromagnetic material and said non-magnetic thin film layer each having a same crystal structure and a same crystal plane orientation; and said first magnetic thin film layer comprising a plurality of magnetic thinner film layers of ferromagnetic material with the same crystal plane orientation from one of said magnetic thinner films to another, and an interlayer between each adjacent ones of said magnetic thinner film layers providing a discontinuity in single-crystal epitaxial growth between each of said magnetic thinner film layers.
Claim 2
Dependent Claim 264 words
A magnetoresistive spin-valve sensor of the giant magnetoresistive type, comprising: a first magnetic thin film layer of substantially ferromagnetic material; a second magnetic thin film layer of substantially ferromagnetic material; a non-magnetic thin film layer of non-magnetic metallic material sandwiched between said first and second magnetic thin film layers; a thin film layer of anti-ferromagnetic material adjacent to said second magnetic thin film layer and in exchange coupling at adjacent surfaces with said second magnetic thin film layer to fix a magnetization orientation of said second magnetic thin film layer along a substantially fixed first direction; said first magnetic thin film layer having a magnetization orientation that is in a second direction that is freely movable relative to said first direction in response to externally applied magnetic fields to be sensed, for thereby changing resistance of the layers to a passage of an electric sensing current in proportion to a first power of cosine of an angle θ between said first direction and said second direction; said first magnetic thin film layer, said second magnetic thin film layer, said thin film layer of anti-ferromagnetic material and said non-magnetic thin film layer each having a same crystal structure and a same crystal plane orientation; and said first magnetic thin film layer comprising a plurality of magnetic thinner film layers of ferromagnetic material with the same crystal plane orientation from one of said magnetic thinner films to another, and an interlayer between each adjacent ones of said magnetic thinner film layers providing a discontinuity in single-crystal epitaxial growth between each of said magnetic thinner film layers.
Claim 3
Dependent Claim 27 words
A magnetoresistive sensor according to claim 1, wherein each of said magnetic thinner film layers is composed of an alloy including each of Fe, Ni and Co.
Claim 4
Dependent Claim 20 words
A magnetoresistive sensor according to claim 2, wherein said alloy has Co and Fe in a weight ratio of 90:10.
Claim 5
Dependent Claim 23 words
A magnetoresistive sensor according to claim 3, wherein said alloy is more than 50% by weight Co, and the remainder Fe and Ni.
Claim 6
Dependent Claim 28 words
A magnetoresistive sensor according to claim 1, wherein said first magnetic thin film layer and said second magnetic thin film layer have magnetization directions parallel to each other.
Claim 7
Dependent Claim 17 words
A magnetoresistive sensor according to claim 1, wherein said crystal structure is a face centered cubic structure.
Claim 8
Dependent Claim 28 words
A magnetoresistive sensor according to claim 1, wherein said crystal orientation is an orientation of a crystal plane (111) substantially parallel to all of said thin film layers.
Claim 9
Dependent Claim 28 words
A magnetoresistive sensor according to claim 1, wherein each magnetic thinner film layer in said first magnetic thin film layer has a thickness of 30 angstroms or less.
Claim 10
Dependent Claim 59 words
A magnetoresistive sensor according to claim 1, wherein: said first magnetic thin film layer has said magnetic thinner film layers separated from each other and sandwiching therebetween said interlayers that cut single-crystal grain epitaxial growth between said magnetic thinner film layers; and said interlayers have the same crystal structure and crystal plane orientation as said magnetic thinner film layers.
Claim 11
Dependent Claim 17 words
A magnetoresistive sensor according to claim 9, wherein said interlayers include elemental Cu or a Cu alloy.
Claim 12
Dependent Claim 17 words
A magnetoresistive sensor according to claim 9, wherein said interlayers include elemental Ni or a Ni alloy.
Claim 13
Dependent Claim 18 words
A magnetoresistive sensor according to claim 9, wherein each of said interlayers is less than 10 angstroms thick.
Claim 14
Dependent Claim 31 words
A magnetoresistive sensor according to claim 1, further including means providing a longitudinally extending magnetic field through all of said thin film layers in an amount sufficient to reduce Barkhausen noise.
Claim 15
Dependent Claim 27 words
A magnetoresistive sensor according to claim 1, wherein said first magnetic thin film layer as a whole has a magnetostriction that is less than 3×10 -6 .
Claim 16
Dependent Claim 27 words
A magnetoresistive sensor according to claim 1, wherein said first magnetic thin film layer as a whole has a magnetostriction that is less than 1×10 6 .
Claim 17
Dependent Claim 76 words
A magnetoresistive sensor according to claim 1, wherein said first magnetic thin film layer, said second magnetic thin film layer, said thin film layer of anti-ferromagnetic material and said non-magnetic thin film layer exhibit a magnetic orientation and annealed structure resulting from being annealed and cooled in a magnetic field sufficiently to have an anisotropic energy of said first magnetic thin film layer in an equilibrium state that is smaller than an identical structure before annealing.
Claim 18
Dependent Claim 36 words
A magnetoresistive sensor according to claim 1, further including an underlayer of one of Ta, Zr, Nb, Ti and Hf, and a substrate sandwiching said underlayer between said substrate and said first magnetic thin film layer.
Claim 19
Dependent Claim 44 words
A magnetoresistive sensor according to claim 1, further including first and second magnetic shields on respective faces of said thin film layer of anti-ferromagnetic material and said first magnetic thin film layer, which faces are opposite sides from said second magnetic thin film layer.
Claim 20
Dependent Claim 226 words
A magnetoresistive sensor of the giant magnetoresistive type, comprising: a first magnetic thin film layer of substantially ferromagnetic material; a second magnetic thin film layer of substantially ferromagnetic material; a non-magnetic thin film layer of non-magnetic metallic material sandwiched between said first and second magnetic thin film layers; said second magnetic thin film layer having a fixed magnetization orientation along a substantially fixed first direction; said first magnetic thin film layer having a magnetization orientation that is in a second direction that is freely movable relative to said first direction in response to externally applied magnetic fields to be sensed, for thereby changing resistance of the layers to a passage of an electric sensing current in proportion to a first power of cosine of an angle θ between said first direction and said second direction; said first magnetic thin film layer, said second magnetic thin film layer and said non-magnetic thin film layer each having a same crystal structure and a same crystal plane orientation; and said first magnetic thin film layer comprising a plurality of magnetic thinner film layers of ferromagnetic material with the same crystal plane orientation from one of said magnetic thinner films to another, and an interlayer between each adjacent ones of said magnetic thinner film layers providing a discontinuity in single-crystal epitaxial growth between each of said magnetic thinner film layers.
Claim 21
Dependent Claim 226 words
A magnetoresistive sensor of the giant magnetoresistive type, comprising: a first magnetic thin film layer of substantially ferromagnetic material; a second magnetic thin film layer of substantially ferromagnetic material; a non-magnetic thin film layer of non-magnetic metallic material sandwiched between said first and second magnetic thin film layers; said second magnetic thin film layer having a fixed magnetization orientation along a substantially fixed first direction; said first magnetic thin film layer having a magnetization orientation that is in a second direction that is freely movable relative to said first direction in response to externally applied magnetic fields to be sensed, for thereby changing resistance of the layers to a passage of an electric sensing current in proportion to a first power of cosine of an angle θ between said first direction and said second direction; said first magnetic thin film layer, said second magnetic thin film layer and said non-magnetic thin film layer each having a same crystal structure and a same crystal plane orientation; and said first magnetic thin film layer comprising a plurality of magnetic thinner film layers of ferromagnetic material with the same crystal plane orientation from one of said magnetic thinner films to another, and an interlayer between each adjacent ones of said magnetic thinner film layers providing a discontinuity in single-crystal epitaxial growth between each of said magnetic thinner film layers.
Claim 22
Dependent Claim 27 words
A magnetoresistive sensor according to claim 19, wherein each of said magnetic thinner film layers is composed of an alloy including each of Fe, Ni and Co.
Claim 23
Dependent Claim 20 words
A magnetoresistive sensor according to claim 20, wherein said alloy has Co and Fe in a weight ratio of 90:10.
Claim 24
Dependent Claim 17 words
A magnetoresistive sensor according to claim 19, wherein said crystal structure is a face centered cubic structure.
Claim 25
Dependent Claim 28 words
A magnetoresistive sensor according to claim 19, wherein said crystal orientation is an orientation of a crystal plane (111) substantially parallel to all of said thin film layers.
Claim 26
Dependent Claim 28 words
A magnetoresistive sensor according to claim 19, wherein each magnetic thinner film layer in said first magnetic thin film layer has a thickness of 30 angstroms or less.
Claim 27
Dependent Claim 59 words
A magnetoresistive sensor according to claim 19, wherein: said first magnetic thin film layer has said magnetic thinner film layers separated from each other and sandwiching therebetween said interlayers that cut single-crystal grain epitaxial growth between said magnetic thinner film layers; and said interlayers have the same crystal structure and crystal plane orientation as said magnetic thinner film layers.
Claim 28
Dependent Claim 69 words
A magnetoresistive sensor according to claim 19, wherein said first magnetic thin film layer, said second magnetic thin film layer and said non-magnetic thin film layer exhibit a magnetic orientation and annealed structure resulting from being annealed and cooled in a magnetic field sufficiently to have an anisotropic energy of said first magnetic thin film layer in an equilibrium state that is smaller than an identical structure before annealing.
Claim 29
Dependent Claim 223 words
A magnetoresistive sensor of the giant magnetoresistive type, comprising: a first magnetic thin film layer of substantially ferromagnetic material; a second magnetic thin film layer of substantially ferromagnetic material; a non-magnetic thin film layer of non-magnetic metallic material sandwiched between said first and second magnetic thin film layers; said second magnetic thin film layer having a magnetization orientation along a first direction; said first magnetic thin film layer having a magnetization orientation that is in a second direction that is freely movable relative to said first direction in response to externally applied magnetic fields to be sensed, for thereby changing resistance of the layers to a passage of an electric sensing current in proportion to a first power of cosine of an angle θ between said first direction and said second direction; said first magnetic thin film layer, said second magnetic thin film layer and said non-magnetic thin film layer each having a same crystal structure and a same crystal plane orientation; and said first magnetic thin film layer comprising a plurality of magnetic thinner film layers of ferromagnetic material with the same crystal plane orientation from one of said magnetic thinner films to another, and an interlayer between each adjacent ones of said magnetic thinner film layers providing a discontinuity in single-crystal epitaxial growth between each of said magnetic thinner film layers.
Claim 30
Dependent Claim 223 words
A magnetoresistive sensor of the giant magnetoresistive type, comprising: a first magnetic thin film layer of substantially ferromagnetic material; a second magnetic thin film layer of substantially ferromagnetic material; a non-magnetic thin film layer of non-magnetic metallic material sandwiched between said first and second magnetic thin film layers; said second magnetic thin film layer having a magnetization orientation along a first direction; said first magnetic thin film layer having a magnetization orientation that is in a second direction that is freely movable relative to said first direction in response to externally applied magnetic fields to be sensed, for thereby changing resistance of the layers to a passage of an electric sensing current in proportion to a first power of cosine of an angle θ between said first direction and said second direction; said first magnetic thin film layer, said second magnetic thin film layer and said non-magnetic thin film layer each having a same crystal structure and a same crystal plane orientation; and said first magnetic thin film layer comprising a plurality of magnetic thinner film layers of ferromagnetic material with the same crystal plane orientation from one of said magnetic thinner films to another, and an interlayer between each adjacent ones of said magnetic thinner film layers providing a discontinuity in single-crystal epitaxial growth between each of said magnetic thinner film layers.
Claim 31
Dependent Claim 27 words
A magnetoresistive sensor according to claim 27, wherein each of said magnetic thinner film layers is composed of an alloy including each of Fe, Ni and Co.
Claim 32
Dependent Claim 19 words
A magnetoresistive sensor according to claim 28, wherein said alloy has Co and Fe in a weight ratio 90:10.
Claim 33
Dependent Claim 17 words
A magnetoresistive sensor according to claim 27, wherein said crystal structure is a face centered cubic structure.
Claim 34
Dependent Claim 28 words
A magnetoresistive sensor according to claim 27, wherein said crystal orientation is an orientation of a crystal plane (111) substantially parallel to all of said thin film layers.
Claim 35
Dependent Claim 28 words
A magnetoresistive sensor according to claim 27, wherein each magnetic thinner film layer in said first magnetic thin film layer has a thickness of 30 angstroms or less.
Claim 36
Dependent Claim 59 words
A magnetoresistive sensor according to claim 27, wherein: said first magnetic thin film layer has said magnetic thinner film layers separated from each other and sandwiching therebetween said interlayers that cut single-crystal grain epitaxial growth between said magnetic thinner film layers; and said interlayers have the same crystal structure and crystal plane orientation as said magnetic thinner film layers.
Claim 37
Dependent Claim 69 words
A magnetoresistive sensor according to claim 27, wherein said first magnetic thin film layer, said second magnetic thin film layer and said non-magnetic thin film layer exhibit a magnetic orientation and annealed structure resulting from being annealed and cooled in a magnetic field sufficiently to have an anisotropic energy of said first magnetic thin film layer in an equilibrium state that is smaller than an identical structure before annealing.
Claim 38
Dependent Claim 25 words
A magnetoresistive sensor according to claim 27, wherein said second magnetic thin film layer has a permanent magnetic bias provided by an applied electric current.
Claim 39
Dependent Claim 24 words
A magnetoresistive sensor according to claim 27, wherein said second magnetic thin film layer has a permanent magnetic bias applied by a permanent magnet.
Claim 40
Dependent Claim 43 words
A magnetoresistive sensor according to claim 27, wherein said second magnetic thin film layer has a permanent magnetic bias supplied by said second thin film layer being a hard ferromagnetic material relative to said first thin film layer being a soft ferromagnetic material.
Claim 41
Dependent Claim 284 words
In a magnetic information data storage system, having: a magnetic storage medium having a plurality of tracks for recording data as separate magnetic domains along said tracks, and a magnetic transducer being maintained in a closely spaced position relative to said magnetic storage medium during relative movement between said magnetic transducer and said magnetic storage medium for transducing, said magnetic transducer including a magnetoresistive sensor of the giant magnetoresistive type, comprising: a first magnetic thin film layer of substantially ferromagnetic material; a second magnetic thin film layer of substantially ferromagnetic material; a non-magnetic thin film layer of non-magnetic material sandwiched between said first and second magnetic thin film layers; said second magnetic thin film layer having a magnetization orientation along a first direction; said first magnetic thin film layer having a magnetization orientation that is in a second direction that is freely movable relative to said first direction in response to externally applied magnetic fields to be sensed, for thereby changing resistance of the layers to a passage of an electric sensing current in proportion to a first power of cosine of an angle θ between said first direction and said second direction; said first magnetic thin film layer, said second magnetic thin film layer and said non-magnetic thin film layer each having a same crystal structure and a same crystal plane orientation; and said first magnetic thin film layer comprising a plurality of magnetic thinner film layers of ferromagnetic material with the same crystal plane orientation from one of said magnetic thinner films to another, and an interlayer between each adjacent ones of said magnetic thinner film layers providing a discontinuity in single-crystal epitaxial growth between each of said magnetic thinner film layers.
Claim 42
Dependent Claim 284 words
In a magnetic information data storage system, having: a magnetic storage medium having a plurality of tracks for recording data as separate magnetic domains along said tracks, and a magnetic transducer being maintained in a closely spaced position relative to said magnetic storage medium during relative movement between said magnetic transducer and said magnetic storage medium for transducing, said magnetic transducer including a magnetoresistive sensor of the giant magnetoresistive type, comprising: a first magnetic thin film layer of substantially ferromagnetic material; a second magnetic thin film layer of substantially ferromagnetic material; a non-magnetic thin film layer of non-magnetic material sandwiched between said first and second magnetic thin film layers; said second magnetic thin film layer having a magnetization orientation along a first direction; said first magnetic thin film layer having a magnetization orientation that is in a second direction that is freely movable relative to said first direction in response to externally applied magnetic fields to be sensed, for thereby changing resistance of the layers to a passage of an electric sensing current in proportion to a first power of cosine of an angle θ between said first direction and said second direction; said first magnetic thin film layer, said second magnetic thin film layer and said non-magnetic thin film layer each having a same crystal structure and a same crystal plane orientation; and said first magnetic thin film layer comprising a plurality of magnetic thinner film layers of ferromagnetic material with the same crystal plane orientation from one of said magnetic thinner films to another, and an interlayer between each adjacent ones of said magnetic thinner film layers providing a discontinuity in single-crystal epitaxial growth between each of said magnetic thinner film layers.
Claim 43
Dependent Claim 36 words
A magnetic information data storage system according to claim 38, wherein a magnetic easy axis for each of said first and second magnetic thin film layers is substantially perpendicular to a track width of said tracks.
Claim 44
Dependent Claim 80 words
A magnetic information data storage system according to claim 38, further including: a motor connected between said magnetic storage medium and said magnetoresistive sensor for relatively moving said magnetoresistive sensor along said tracks; a separate motor connected between said magnetic storage medium and said magnetoresistive sensor for moving said magnetic storage medium and magnetoresistive sensor relative to each other in a direction generally perpendicular to said tracks for accessing; and a control circuit controlling speed and operation of said motors.
Claim 45
Dependent Claim 18 words
A magnetic information data storage system according to claim 38, wherein said interlayers are composed of magnetic materials.
Claim 46
Dependent Claim 18 words
A magnetic information data storage system according to claim 38, wherein said interlayers are composed of non-magnetic materials.
Claim 47
Dependent Claim 68 words
A magnetic information data storage system according to claim 38, wherein crystal growth is discontinuous between said thinner film layers so that average crystal grain size of said first thin film layer is substantially less than average crystal grain size of a thin film layer identical in all respects except for being composed of only a single-crystal epitaxial layer, in a plane of said first thin film layer.
Claim 48
Dependent Claim 22 words
A magnetic information data storage system according to claim 38, wherein said magnetic thinner film layers have matched exchange couplings between layers.
Claim 49
Dependent Claim 23 words
A magnetic information data storage system according to claim 38, wherein each of said magnetic thinner film layers has an identical material composition.
Claim 50
Dependent Claim 30 words
A magnetic information data storage system according to claim 38, wherein each of said magnetic thinner film layers is composed of a alloy including each of Fe, Ni and Co.
Claim 51
Dependent Claim 24 words
A magnetic information data storage system according to claim 46, wherein said alloy preferably has a Co composition of greater than 50% by weight.
Claim 52
Dependent Claim 23 words
A magnetic information data storage system according to claim 46, wherein said alloy has Co and Fe in a weight ratio of 90:10.
Claim 53
Dependent Claim 24 words
A magnetic information data storage system according to claim 46, wherein said alloy includes Ni in an amount between 30 and 53% by weight.
Claim 54
Dependent Claim 20 words
A magnetic information data storage system according to claim 38, wherein said crystal structure is a face centered cubic structure.
Claim 55
Dependent Claim 31 words
A magnetic information data storage system according to claim 38, wherein said crystal orientation is an orientation of a crystal plane (111) substantially parallel to all of said thin film layers.
Claim 56
Dependent Claim 31 words
A magnetic information data storage system according to claim 38, wherein each magnetic thinner film layer in said first magnetic thin film layer has a thickness of 30 angstroms or less.
Claim 57
Dependent Claim 61 words
A magnetic information data storage system according to claim 38, wherein: said first magnetic thin film layer has said magnetic thinner film layers separated from each other and sandwiching therebetween said interlayers that cut single-crystal grain growth between said magnetic thinner film layers; and said interlayers have the same crystal structure and crystal plane orientation as said magnetic thinner film layers.
Claim 58
Dependent Claim 71 words
A magnetic information data storage system according to claim 38, wherein said first magnetic thin film layer, said second magnetic thin film layer and said non-magnetic thin film layer exhibit magnetic orientation and annealed structure resulting from being annealed and cooled in a magnetic field sufficiently to have an anisotropic energy of said first magnetic thin film layer in an equilibrium state that is smaller than an identical structure before annealing.
Claim 59
Dependent Claim 63 words
A magnetic information data storage system according to claim 38, wherein said magnetoresistive sensor further includes a thin film layer of anti-ferromagnetic material adjacent to said second magnetic thin film layer and in exchange coupling at adjacent surfaces with said second magnetic thin film layer to fix a magnetization orientation of said second magnetic thin film layer along a substantially fixed first direction.
Claim 60
Dependent Claim 21 words
A magnetic information data storage system according to claim 38, wherein said magnetoresistive sensor further includes means fixing said first direction.

References Cited (Backward Citations)

US5134533A Cited
US5159513A Cited
US5366815A Cited
US5313186A Cited
US5315468A Cited
JPH06325934A Cited
US5287238A Cited
US5373238A Cited
US5301079A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2000-07-14 2001-01-13 2001-07-15 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2004-07-14 2005-01-13 2005-07-15 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2008-07-14 2009-01-13 2009-07-15 $7700.00 Window Closed / Lapsed

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