US5645634A
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Composition and method for forming Ba1-X Srx Tiy O3 thin films
Assignee: Mitsubishi Materials Corp
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Filing: 1996-06-10
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Granted: 1997-07-08
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Expires: 2016-06-10
Abstract
Abstract A composition comprising Ba and Sr salts of carboxylic acids represented by the formula: C n H 2n+1 COOH wherein 3≦n≦7, and having structures represented by the following formula (I): ##STR1## wherein R 1 , R 2 , R 3 , R 4 , R 5 and R 6 each represent a hydrogen atom, a methyl group or an ethyl group, and M represents Ba or Sr, can be used to form thin films of Ba 1-x Sr x Ti y O 3 . A composition comprising a barium carboxylate, a strontium carboxylate and a titanium alkoxide in a mixed solvent of a carboxylic acid and an ester, can also be used to form Ba 1-x Sr x Ti y O 3 thin films. The proportion of the mixed solvent is 2-11 molar times as much as the Ti. A composition comprising salts of carboxylic acids represented by R a COOH wherein R a is a linear or branched alkyl group having 3-7 carbon atoms, as the Ba and Sr sources, and Ti(OR b ) 4 wherein R b is a linear or branched alkyl group having 1-7 carbon atoms, as the Ti source, can also be used to form thin films of Ba 1-x Sr x TiO 3 .
Inventors
- 👤 Katumi Ogi
- 👤 Tadashi Yonezawa
- 👤 Tsutomu Atsuki
- 👤 Keiko Endo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 18:17
CPC Classifications
C; C01; C01G; C01G23/00; C23; C23C; C23C18/00; C23C18/02; C23C18/12; C23C18/1204; C23C18/1208; C23C18/1216; C04; C04B; C04B35/00; C04B35/01; C04B35/46; C04B35/462; C04B35/465; H; H01; H01B; H01B3/00; H01B3/02; H01B3/12
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
115 words
A composition comprising: an organic barium compound, an organic strontium compound, a titanium alkoxide and an organic solvent, at a molar ratio of Ba:Sr:Ti=(1-x):x:y with 0<x<1, and 0.9≦y≦1.1, wherein said organic barium compound and said organic strontium compound are metal salts of carboxylic acids, said carboxylic acids are the same or different, and are represented by the formula: C n H 2n+1 COOH wherein 3≦n≦7, and said barium and strontium compounds can be represented by formula (I): ##STR4## wherein R 1 , R 2 , R 3 , R 4 , R 5 and R 6 each independently represent a hydrogen atom, a methyl group or an ethyl group, and M represents Ba or Sr.
Claim 2
Dependent Claim
115 words
A composition comprising: an organic barium compound, an organic strontium compound, a titanium alkoxide and an organic solvent, at a molar ratio of Ba:Sr:Ti=(1-x):x:y with 0<x<1, and 0.9≦y≦1.1, wherein said organic barium compound and said organic strontium compound are metal salts of carboxylic acids, said carboxylic acids are the same or different, and are represented by the formula: C n H 2n+1 COOH wherein 3≦n≦7, and said barium and strontium compounds can be represented by formula (I): ##STR4## wherein R 1 , R 2 , R 3 , R 4 , R 5 and R 6 each independently represent a hydrogen atom, a methyl group or an ethyl group, and M represents Ba or Sr.
Claim 3
Dependent Claim
53 words
The composition of claim 1, wherein said carboxylic acids are selected from the group consisting of n-butyric acid, α-methylbutyric acid, isovaleric acid, 2-ethylbutyric acid, 2,2-dimethylbutyric acid, 3,3-dimethylbutyric acid, 2,3-dimethylbutyric acid, 3-methylpentanoic acid, 4-methylpentanoic acid, 2-ethylpentanoic acid, 3-ethylpentanoic acid, 2,2-dimethylpentanoic acid, 3,3-dimethylpentanoic acid, 2,3-dimethylpentanoic acid, 2-ethylhexanoic acid, 3-ethylhexanoic acid, 2,2-dimethylhexanoic acid and 3,3-dimethylhexanoic acid.
Claim 4
Dependent Claim
21 words
The composition of claim 1, wherein said carboxylic acids are selected from the group consisting of 4-methylpentanoic acid and 2-ethylbutyric acid.
Claim 5
Dependent Claim
29 words
The composition of claim 1, wherein said titanium alkoxide is represented by Ti(OR) 4 wherein each R is independently a linear or branched alkyl group having 2-5 carbon atoms.
Claim 6
Dependent Claim
29 words
The composition of claim 4, wherein said titanium alkoxide is selected from the group consisting of ethoxy titanium, isopropoxy titanium, n-propoxy titanium, isobutoxy titanium, tert-butoxy titanium and n-amyloxy titanium.
Claim 7
Dependent Claim
24 words
The composition of claim 1, wherein said organic solvent comprises an ester of acetic acid and an alcohol, said alcohol having 2-5 carbon atoms.
Claim 8
Dependent Claim
38 words
The composition of claim 6, wherein said ester is selected from the group consisting of ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, sec-butyl acetate, tert-butyl acetate, isobutyl acetate, n-amyl acetate, sec-amyl acetate, tert-amyl acetate and isoamyl acetate.
Claim 9
Dependent Claim
34 words
The composition of claim 1, wherein the weight of the Ba, Sr and Ti in said composition, expressed as Ba 1-x Sr x Ti y oxide, is 4-10% of the weight of said composition.
Claim 10
Dependent Claim
31 words
The composition of claim 1, further comprising one member selected from the group consisting of a β-diketone, a β-keto ester, a glycol, an alcohol or a carboxylic acid as a stabilizer.
Claim 11
Dependent Claim
42 words
The composition of claim 1, further comprising one member selected from the group consisting of acetylacetone, benzoylacetone, dibenzoylmethane, ethyl 3-oxobutanoate, 2-methoxyethanol, 2-ethoxyethanol, 2-ethoxypropanol, β-butylene glycol, 2,4-amylene glycol and the same carboxylic acid as that composing the carboxylic salts of barium or strontium.
Claim 12
Dependent Claim
23 words
The composition of claim 9, comprising said one member in an amount 0.5 to 4.0 molar times as much as said titanium alkoxide.
Claim 13
Dependent Claim
39 words
A method comprising: coating a substrate with the composition of claim 1, to form a film; drying said film at a temperature of 150°-400° C.; and firing said film at a temperature of 450°-800° C., thereby crystallizing said film.
Claim 14
Dependent Claim
60 words
A composition comprising: a barium carboxylate, a strontium carboxylate, a titanium alkoxide and an organic solvent at a molar ratio of Ba:Sr:Ti=(1-x):x:y with 0≦x≦1.0, and 0.9≦y≦1.1, wherein said organic solvent comprises a carboxylic acid and an ester; and said organic solvent comprises said carboxylic acid in an amount 2-11 molar times as much as the titanium of said titanium alkoxide.
Claim 15
Dependent Claim
60 words
A composition comprising: a barium carboxylate, a strontium carboxylate, a titanium alkoxide and an organic solvent at a molar ratio of Ba:Sr:Ti=(1-x):x:y with 0≦x≦1.0, and 0.9≦y≦1.1, wherein said organic solvent comprises a carboxylic acid and an ester; and said organic solvent comprises said carboxylic acid in an amount 2-11 molar times as much as the titanium of said titanium alkoxide.
Claim 16
Dependent Claim
54 words
The composition of claim 13, wherein said carboxylic acid is the same carboxylic acid as that composing the barium carboxylate or strontium carboxylate, and said ester is selected from the group consisting of ethyl acetate, propyl acetate, n-butyl acetate, sec-butyl acetate, tert-butyl acetate, isobutyl acetate, n-amyl acetate, sec-amyl acetate, tert-amyl acetate and isoamyl acetate.
Claim 17
Dependent Claim
47 words
The composition of claim 13, wherein said titanium alkoxide is titanium isopropoxide, and said barium carboxylate and the said strontium carboxylate are individually represented by the formula: (C n H 2n+1 COO) 2 M wherein n is an integer of 3-7 and M is Ba or Sr.
Claim 18
Dependent Claim
49 words
The composition of claim 15, wherein said carboxylic acid is selected from the group consisting of n-butyric acid, α-methylbutyric acid, isovaleric acid, 2-ethylbutyric acid, 2,2-dimethylbutyric acid, 3,3-dimethylbutyric acid, 2,3-dimethylbutyric acid, 3-methylpentanoic acid, 4-methylpentanoic acid, 2-ethylpentanoic acid, 3-ethylpentanoic acid, 2,2-dimethylpentanoic acid, 3,3-dimethylpentanoic acid, 2,3-dimethylpentanoic acid, 2-ethylhexanoic acid and 3-ethylhexanoic acid.
Claim 19
Dependent Claim
13 words
The composition of claim 13, wherein said organic solvent further comprises an alcohol.
Claim 20
Dependent Claim
27 words
The composition of claim 17, wherein said alcohol is selected from the group consisting of 1-propanol, 2-propanol, 1-butanol, 2-butanol, isobutyl alcohol, 1-pentanol, 2-pentanol, 2-methyl-2-pentanol and isoamyl alcohol.
Claim 21
Dependent Claim
24 words
The composition of claim 13, wherein said organic solvent contains 3-40% by weight of said carboxylic acid and 20-90% by weight of said ester.
Claim 22
Dependent Claim
30 words
The composition of claim 17, wherein said organic solvent comprises 3-40% by weight of said carboxylic acid, 14-60% by weight of said ester and 7-30% by weight of said alcohol.
Claim 23
Dependent Claim
23 words
The composition of claim 13, wherein said barium carboxylate, strontium carboxylate and titanium alkoxide in total comprise 4-10% by weight of said composition.
Claim 24
Dependent Claim
26 words
A method comprising: coating a substrate with the composition of claim 13 thereby forming a film; drying said film; and firing said film at 450°-800° C.
Claim 25
Dependent Claim
85 words
A composition comprising: a barium carboxylate, a strontium carboxylate, a titanium alkoxide and an organic solvent at a molar ratio of Ba:Sr:Ti=(1-x):x:1 with 0<x<1; wherein said barium carboxylate and strontium carboxylate are formed from at least one carboxylic acid of the formula R a COOH; said titanium alkoxide has the formula Ti(OR b ) 4 ; R a is a linear or branched alkyl group having 3-7 carbon atoms; and each R b is independently a linear or branched alkyl group having 1-7 carbon atoms.
Claim 26
Dependent Claim
85 words
A composition comprising: a barium carboxylate, a strontium carboxylate, a titanium alkoxide and an organic solvent at a molar ratio of Ba:Sr:Ti=(1-x):x:1 with 0<x<1; wherein said barium carboxylate and strontium carboxylate are formed from at least one carboxylic acid of the formula R a COOH; said titanium alkoxide has the formula Ti(OR b ) 4 ; R a is a linear or branched alkyl group having 3-7 carbon atoms; and each R b is independently a linear or branched alkyl group having 1-7 carbon atoms.
Claim 27
Dependent Claim
44 words
The composition of claim 23, wherein said at least one carboxylic acid is selected from the group consisting of n-butyric acid, isobutyric acid, n-valeric acid, isovaleric acid, 2-ethylbutyric acid, n-hexanoic acid, 2,2-dimethylbutyric acid, 3,3-dimethylbutyric acid, 4-methylpentanoic acid, n-heptanoic acid, 2-methylhexanoic acid, and octylic acid.
Claim 28
Dependent Claim
19 words
The composition of claim 23, wherein R a is a linear or branched alkyl group having 5-7 carbon atoms.
Claim 29
Dependent Claim
21 words
The composition of claim 23, wherein each R b is independently a linear or branched alkyl group having 2-5 carbon atoms.
Claim 30
Dependent Claim
25 words
The composition of claim 26, wherein said titanium alkoxide is selected from the group consisting of ethoxy titanium, isopropoxy titanium, butoxy titanium and amyloxy titanium.
Claim 31
Dependent Claim
18 words
The composition of claim 23, wherein said organic solvent comprises an ester of acetic acid or an alcohol.
Claim 32
Dependent Claim
31 words
The composition of claim 28, wherein said organic solvent comprises one or more members selected from the group consisting of ethyl acetate, propyl acetate, isoamyl acetate, ethanol, propanol, butanol and 2-methoxyethanol.
Claim 33
Dependent Claim
32 words
The composition of claim 23, wherein the weight of Ba, Sr and Ti in said composition, expressed as Ba 1-x Sr x TiO 3 , is 5-15% by weight of said composition.
Claim 34
Dependent Claim
26 words
A method comprising: coating a substrate with the composition of claim 23, thereby forming a film; drying said film; and firing said film at 500°-800° C.
References Cited (Backward Citations)
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