Patent US5636098A successfully refreshed from Google Patents.
US5636098A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Barrier seal for electrostatic chuck
Assignee: Applied Materials Inc
•
Filing: 1995-05-11
•
Granted: 1997-06-03
•
Expires: 2015-05-11
Abstract
Abstract An erosion resistant electrostatic chuck 20 for holding a substrate 45 having a peripheral edge 50, in an erosive environment, comprises an electrostatic member 25 including (i) an electrode 30, and (ii) an insulator 35 covering the electrode. A barrier 55 is circumferentially disposed about the electrostatic member 25. The barrier 55 comprises a first contact surface 60 capable of being pressed against the peripheral edge 50 of the substrate 45 to form a seal around the substrate 45 to reduce exposure of the electrostatic member 25 of the chuck 20 to the erosive environment.
Inventors
- 👤 Joseph Salfelder
- 👤 Dennis Grimard
- 👤 John F. Cameron
- 👤 Chandra Deshpandey
- 👤 Robert Ryan
- 👤 Michael G. Chafin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 20:10
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/72; H10P72/722
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
118 words
An erosion resistant electrostatic chuck for holding a substrate having a peripheral edge, in an erosive environment, the chuck comprising: (a) an electrostatic member for electrostatically holding the substrate, the electrostatic member comprising (i) an electrode, and (ii) an insulator covering the electrode; and (b) a barrier circumferentially disposed about the electrostatic member, the barrier comprising (i) a planar base suitable for resting on the periphery of the support, and (ii) an arm extending upwardly from the base, the arm comprising a first contact surface capable of being conformally pressed against the peripheral edge of the substrate to form a seal between the substrate and the support to reduce exposure of the electrostatic member to the erosive environment.
Claim 2
Dependent Claim
118 words
An erosion resistant electrostatic chuck for holding a substrate having a peripheral edge, in an erosive environment, the chuck comprising: (a) an electrostatic member for electrostatically holding the substrate, the electrostatic member comprising (i) an electrode, and (ii) an insulator covering the electrode; and (b) a barrier circumferentially disposed about the electrostatic member, the barrier comprising (i) a planar base suitable for resting on the periphery of the support, and (ii) an arm extending upwardly from the base, the arm comprising a first contact surface capable of being conformally pressed against the peripheral edge of the substrate to form a seal between the substrate and the support to reduce exposure of the electrostatic member to the erosive environment.
Claim 3
Dependent Claim
38 words
The electrostatic chuck of claim 1, wherein the arm of the barrier extending upwardly from the base, comprises a cantilever structure sufficiently resilient to press the first contact surface against the electrostatically held substrate without dislodging the substrate.
Claim 4
Dependent Claim
46 words
The electrostatic chuck of claim 2, wherein the electrostatic member exerts an electrostatic attractive force/area on the substrate of at least about 5 Torr, and wherein the cantilever structure presses against the substrate with a force less than the electrostatic attractive force/area exerted on the substrate.
Claim 5
Dependent Claim
50 words
The electrostatic chuck of claim 1, further comprising a support for supporting the electrostatic member, and wherein the planar base of the barrier further comprises a second contact surface capable of being pressed against the support so that the barrier can form a seal between the substrate and the support.
Claim 6
Dependent Claim
48 words
The electrostatic chuck of claim 1, wherein the base of the barrier comprises a ring, and wherein the arm of the barrier comprises an annular lip extending outwardly from the base, the annular lip capable of being resiliently pressed against the substrate without dislodging the electrostatically held substrate.
Claim 7
Dependent Claim
72 words
The electrostatic chuck of claim 5, wherein the electrostatic member further comprises coolant grooves for holding coolant at a pressure below the substrate, the coolant grooves having tips close to the peripheral edge of the substrate, and wherein the annular lip of the barrier comprises a cantilever structure sufficiently resilient to press the first contact surface conformally against the substrate substantially without causing coolant to leak out from the coolant grooves tips.
Claim 8
Dependent Claim
29 words
The electrostatic chuck of claim 5, wherein the barrier is fabricated from a resilient and pliant material capable of conforming and forming a seal between the substrate and support.
Claim 9
Dependent Claim
25 words
The electrostatic chuck of claim 7, wherein the barrier is fabricated from an elastomer that is substantially resistant to erosion by the erosive process gas.
Claim 10
Dependent Claim
13 words
The electrostatic chuck of claim 8, wherein the elastomer comprises a halogenated elastomer.
Claim 11
Dependent Claim
63 words
The electrostatic chuck of claim 1, further comprising a support for supporting the electrostatic member, wherein the peripheral edge of the substrate overhangs the support, and wherein the barrier comprises an arm comprising at least one horizontal, vertical, or inclined member, the member having one end attached to the base and another end extending above and over the base to contact the substrate.
Claim 12
Dependent Claim
34 words
The electrostatic chuck of claim 10, wherein the support comprises a peripheral sidewall having a channel therein, and wherein the base of the barrier is sized to fit in the channel in the support.
Claim 13
Dependent Claim
66 words
The electrostatic chuck of claim 1, wherein the substrate comprises a center and a perimeter, and wherein the first contact surface of the arm of the barrier has a sufficiently small contact area located sufficiently close to the perimeter of the substrate that when the substrate is heated, the difference in temperatures between the center and perimeter of the substrate is less than about 10° C.
Claim 14
Dependent Claim
29 words
The electrostatic chuck of claim 12, wherein the contact area of the first contact surface of the arm of the barrier is less than about 500 mm 2 .
Claim 15
Dependent Claim
32 words
The electrostatic chuck of claim 12, wherein substantially the entire first contact surface of the arm of the barrier contacts the substrate within about 10 mm from the perimeter of the substrate.
Claim 16
Dependent Claim
147 words
An erosion resistant electrostatic chuck for holding a substrate having a peripheral edge in an erosive environment, the chuck comprising: (a) an electrostatic member for electrostatically holding the substrate, the electrostatic member comprising (i) an electrode, and (ii) an insulator covering the electrode; (b) a support for supporting the electrostatic member, the support having a periphery below the peripheral edge of the substrate; and (c) a barrier disposed on the periphery of the support, the barrier having (i) a cantilever arm including a first contact surface capable of being pressed against the peripheral edge of the substrate, and (ii) a base supporting the cantilever arm, the base having a second contact surface capable of being pressed against the periphery of the support, so that the barrier can form a seal between the substrate and the support to reduce exposure of the electrostatic member to the erosive environment.
Claim 17
Dependent Claim
147 words
An erosion resistant electrostatic chuck for holding a substrate having a peripheral edge in an erosive environment, the chuck comprising: (a) an electrostatic member for electrostatically holding the substrate, the electrostatic member comprising (i) an electrode, and (ii) an insulator covering the electrode; (b) a support for supporting the electrostatic member, the support having a periphery below the peripheral edge of the substrate; and (c) a barrier disposed on the periphery of the support, the barrier having (i) a cantilever arm including a first contact surface capable of being pressed against the peripheral edge of the substrate, and (ii) a base supporting the cantilever arm, the base having a second contact surface capable of being pressed against the periphery of the support, so that the barrier can form a seal between the substrate and the support to reduce exposure of the electrostatic member to the erosive environment.
Claim 18
Dependent Claim
32 words
The electrostatic chuck of claim 15, wherein the base of the barrier comprises a ring resting on the support and the cantilever arm comprises a resilient annular lip extending toward the substrate.
Claim 19
Dependent Claim
78 words
The electrostatic chuck of claim 16, wherein the electrostatic member further comprises coolant grooves for holding coolant at a pressure below the substrate, the coolant grooves having tips close to the peripheral edge of the substrate, and wherein the cantilever arm is sufficiently resilient to conformally press and seal the resilient annular lip against the substrate (i) substantially without causing coolant to leak out from the coolant grooves tips, and (ii) substantially without dislodging the electrostatically held substrate.
Claim 20
Dependent Claim
67 words
The electrostatic chuck of claim 16, wherein the substrate comprises a center and a perimeter, and wherein the resilient annular lip of the cantilever arm contacts the substrate at a sufficiently small contact area located sufficiently close to the perimeter of the substrate that when the substrate is heated, the difference in temperatures between the center and perimeter of the substrate is less than about 10° C.
Claim 21
Dependent Claim
15 words
The electrostatic chuck of claim 16, wherein the barrier is made of a halogenated elastomer.
Claim 22
Dependent Claim
46 words
The electrostatic chuck of claim 15, wherein the electrostatic member exerts an electrostatic attractive force/area on the substrate of at least about 5 Torr, and wherein the cantilever arm presses against the substrate with a force less than the electrostatic attractive force/area exerted on the substrate.
Claim 23
Dependent Claim
28 words
The electrostatic chuck of claim 15, wherein the barrier is fabricated from a resilient and pliant material capable of forming a conformal seal between the substrate and support.
Claim 24
Dependent Claim
25 words
The electrostatic chuck of claim 21, wherein the barrier is fabricated from an elastomer that is substantially resistant to erosion by the erosive process gas.
Claim 25
Dependent Claim
13 words
The electrostatic chuck of claim 22, wherein the elastomer comprises a halogenated elastomer.
Claim 26
Dependent Claim
54 words
The electrostatic chuck of claim 15, wherein the peripheral edge of the substrate overhangs the support, and wherein the barrier comprises an arm comprising at least one horizontal, vertical, or inclined member, the member having one end attached to the base and another end extending above and over the base to contact the substrate.
Claim 27
Dependent Claim
106 words
An erosion resistant electrostatic chuck for holding a substrate having a peripheral edge in an erosive environment, the chuck comprising: (a) an electrostatic member for electrostatically holding the substrate, the electrostatic member comprising (i) an electrode, and (ii) an insulator covering the electrode; and (b) a barrier ring circumferentially disposed about the electrostatic member, the barrier ring having an upwardly extending cantilever arm sufficiently resilient and conformal to form a seal against the peripheral edge of the substrate under application of the electrostatic force generated by the electrostatic member, without dislodging the electrostatically held substrate, to reduce exposure of the electrostatic member to the erosive environment.
Claim 28
Dependent Claim
106 words
An erosion resistant electrostatic chuck for holding a substrate having a peripheral edge in an erosive environment, the chuck comprising: (a) an electrostatic member for electrostatically holding the substrate, the electrostatic member comprising (i) an electrode, and (ii) an insulator covering the electrode; and (b) a barrier ring circumferentially disposed about the electrostatic member, the barrier ring having an upwardly extending cantilever arm sufficiently resilient and conformal to form a seal against the peripheral edge of the substrate under application of the electrostatic force generated by the electrostatic member, without dislodging the electrostatically held substrate, to reduce exposure of the electrostatic member to the erosive environment.
Claim 29
Dependent Claim
39 words
The electrostatic chuck of claim 25, further comprising a support, and wherein the barrier ring comprises a conformal surface that rests on the support so that the barrier can form a seal extending between the substrate and the support.
Claim 30
Dependent Claim
52 words
The electrostatic chuck of claim 25, wherein the electrostatic member exerts an electrostatic attractive force/area on the substrate of at least about 5 Torr, and wherein the upwardly extending cantilever arm or the barrier ring presses against the substrate with a force less than the electrostatic attractive force/area exerted on the substrate.
Claim 31
Dependent Claim
29 words
The electrostatic chuck of claim 25, wherein the barrier ring is fabricated from a resilient and pliant material capable of forming a conformal seal between the substrate and support.
Claim 32
Dependent Claim
27 words
The electrostatic chuck of claim 28, wherein the barrier ring is fabricated from a halogenated elastomer that is substantially resistant to erosion by the erosive process gas.
Claim 33
Dependent Claim
68 words
The electrostatic chuck of claim 25, further comprising a support for supporting the electrostatic member, wherein the peripheral edge of the substrate overhangs the support, and wherein the upwardly extending cantilever arm of the barrier ring comprises at least one horizontal, vertical, or inclined member, the member having one end attached to the base and another end extending above and over the barrier ring to contact the substrate.
Claim 34
Dependent Claim
67 words
The electrostatic chuck of claim 25, wherein the electrostatic member further comprises coolant grooves for holding coolant at a pressure below the substrate, the coolant grooves having tips close to the peripheral edge of the substrate, and wherein the upwardly extending cantilever arm of the base is sufficiently resilient to conformally press against the substrate substantially without causing coolant to leak out from the coolant grooves tips.
Claim 35
Dependent Claim
64 words
The electrostatic chuck of claim 25 wherein the substrate comprises a center and a perimeter, and wherein the upwardly extending cantilever arm of the barrier has a sufficiently small contact area located sufficiently close to the perimeter of the substrate that when the substrate is heated, the difference in temperatures between the center and perimeter of the substrate is less than about 10° C.
Claim 36
Independent Claim
171 words
A method of enhancing the erosion resistance of an electrostatic chuck in an erosive environment, the chuck comprising (i) a electrostatic member capable of electrostatically holding a substrate, and (ii) a support for supporting the electrostatic member, the method comprising the steps of: (a) positioning a barrier circumferentially about the electrostatic member, the barrier comprising (i) a base resting on the support, and (ii) a cantilever arm extending from the base, the cantilever arm having a conformal contact surface capable of forming a seal against the substrate; (b) placing a substrate on the electrostatic member so that a peripheral edge of the substrate contacts the conformal contact surface of the barrier; and (c) compressing the cantilever arm of the barrier using the peripheral edge of the substrate, by applying a voltage to the electrostatic member to electrostatically press the substrate against the conformal contact surface of the barrier, to form a seal that extends between the substrate and the support to reduce exposure of the electrostatic member to the erosive environment.
Claim 37
Independent Claim
171 words
A method of enhancing the erosion resistance of an electrostatic chuck in an erosive environment, the chuck comprising (i) a electrostatic member capable of electrostatically holding a substrate, and (ii) a support for supporting the electrostatic member, the method comprising the steps of: (a) positioning a barrier circumferentially about the electrostatic member, the barrier comprising (i) a base resting on the support, and (ii) a cantilever arm extending from the base, the cantilever arm having a conformal contact surface capable of forming a seal against the substrate; (b) placing a substrate on the electrostatic member so that a peripheral edge of the substrate contacts the conformal contact surface of the barrier; and (c) compressing the cantilever arm of the barrier using the peripheral edge of the substrate, by applying a voltage to the electrostatic member to electrostatically press the substrate against the conformal contact surface of the barrier, to form a seal that extends between the substrate and the support to reduce exposure of the electrostatic member to the erosive environment.
Claim 38
Dependent Claim
56 words
The method of claim 33, wherein in step (c), a sufficient voltage is applied to the electrostatic member to electrostatically attract the substrate with a force/area that compresses the conformal contact surface of the cantilever arm of the barrier against the substrate to form a seal that prevents escape of coolant gas held below the substrate.
Claim 39
Dependent Claim
34 words
The method of claim 33, wherein in step (c) , a sufficient voltage is applied to the electrostatic member to exert an electrostatic attractive force/area on the substrate of less than about 5 Torr.
Claim 40
Independent Claim
203 words
A method of enhancing the erosion resistance of an electrostatic chuck in an erosive environment, the chuck comprising (i) a electrostatic member capable of electrostatically holding a substrate, the electrostatic member comprising coolant grooves for holding coolant at a pressure below the substrate, and (ii) a support for supporting the electrostatic member, the method comprising the steps of: (a) positioning a barrier circumferentially about the electrostatic member, the barrier comprising (i) a base resting on the support, and (ii) a cantilever arm extending from the base, the cantilever arm having a conformal contact surface capable of forming a seal against the substrate; (b) placing a substrate on the electrostatic member so that a peripheral edge of the substrate contacts the conformal contact surface of the barrier; and (c) compressing the cantilever arm of the barrier using the peripheral edge of the substrate, by applying a voltage to the electrostatic member to electrostatically press the substrate against the conformal contact surface of the barrier to form a seal that extends between the substrate and the support, the seal provided to (i) reduce exposure of the electrostatic member to the erosive environment, and (ii) reduce leakage of coolant from the coolant grooves below the substrate.
Claim 41
Independent Claim
203 words
A method of enhancing the erosion resistance of an electrostatic chuck in an erosive environment, the chuck comprising (i) a electrostatic member capable of electrostatically holding a substrate, the electrostatic member comprising coolant grooves for holding coolant at a pressure below the substrate, and (ii) a support for supporting the electrostatic member, the method comprising the steps of: (a) positioning a barrier circumferentially about the electrostatic member, the barrier comprising (i) a base resting on the support, and (ii) a cantilever arm extending from the base, the cantilever arm having a conformal contact surface capable of forming a seal against the substrate; (b) placing a substrate on the electrostatic member so that a peripheral edge of the substrate contacts the conformal contact surface of the barrier; and (c) compressing the cantilever arm of the barrier using the peripheral edge of the substrate, by applying a voltage to the electrostatic member to electrostatically press the substrate against the conformal contact surface of the barrier to form a seal that extends between the substrate and the support, the seal provided to (i) reduce exposure of the electrostatic member to the erosive environment, and (ii) reduce leakage of coolant from the coolant grooves below the substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-06-02 | 2000-12-02 | 2001-06-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-06-02 | 2004-12-02 | 2005-06-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-06-02 | 2008-12-02 | 2009-06-03 | $7700.00 | Window Closed / Lapsed |