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US5635053A
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Method and apparatus for cleaning electronic parts
Assignee: Renesas Electronics Corp
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Filing: 1995-10-27
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Granted: 1997-06-03
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Expires: 2015-10-27
Abstract
Abstract Electric parts including semiconductor substrates, glass substrates and the like are washed with various cleaning solutions. After the cleaning, said parts are cleaned with either anolyte or catholyte electrolytic ionized water (EIW) produced from deionized water.
Inventors
- 👤 Hidemitsu Aoki
- 👤 Masaharu Nakamori
- 👤 Koji Yamanaka
- 👤 Takashi Imaoka
- 👤 Takashi Futatsuki
- 👤 Yukinari Yamashita
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:50
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/15; B; B08; B08B; B08B3/00; B08B3/04; B08B3/08; C; C02; C02F; C02F1/00; C02F1/46; C02F1/461; C02F1/46104; C02F1/4618; C25; C25B; C25B9/00; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0416; C02F1/42; C02F1/44; C02F2103/00; C02F2103/02; C02F2103/04; C02F2201/00; C02F2201/46; C02F2201/461; C02F2201/46105; C02F2201/4611; C02F2201/46115; C02F2201/46195; C02F9/00; Y; Y02; Y02E; Y02E60/00; Y02E60/30; Y02E60/36
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
54 words
A method for cleaning electronic parts or the like, comprising: cleaning said electronic parts with a cleaning solution; and rinsing said cleaned electronic parts with anolyte or catholyte electrolytic ionized water (EIW) which is obtained by electrolyzing deionized water, wherein the EIW is used as a rinsing solution and includes less than 0.1% ions.
Claim 2
Independent Claim
54 words
A method for cleaning electronic parts or the like, comprising: cleaning said electronic parts with a cleaning solution; and rinsing said cleaned electronic parts with anolyte or catholyte electrolytic ionized water (EIW) which is obtained by electrolyzing deionized water, wherein the EIW is used as a rinsing solution and includes less than 0.1% ions.
Claim 3
Dependent Claim
22 words
The method as defined in claim 1, further comprising; adding an electrolyte or electrolytes to said deionized water which will be electrolyzed.
Claim 4
Independent Claim
29 words
The method as defined in claims 2, wherein said cleaning solution is for removing organic matter; and said anolyte EIW is used as said rinsing solution in said rinsing.
Claim 5
Dependent Claim
29 words
The method as defined in claim 2, wherein said cleaning solution is for removing organic matter; and said catholyte EIW is used as said rinsing solution in said rinsing.
Claim 6
Dependent Claim
26 words
The method as defined in claim 2, wherein said cleaning solution is for removing fine particles, and said catholyte EIW is used as said rinsing solution.
Claim 7
Dependent Claim
16 words
The method as defined in claim 2, wherein said cleaning solution is for removing adherent metals.
Claim 8
Dependent Claim
36 words
The method as defined in claim 1, further comprising adding an electrolyte or electrolytes to said EIW which is used as said rinsing solution in said rinsing, wherein the electrolyte or electrolytes are acids or alkalis.
Claim 9
Dependent Claim
29 words
The method as defined in claim 7, wherein said cleaning solution is for removing organic matter; and said anolyte EIW is used as said rinsing solution in said rinsing.
Claim 10
Dependent Claim
29 words
The method as defined in claim 7, wherein said cleaning solution is for removing organic matter; and said catholyte EIW is used as said rinsing solution in said rinsing.
Claim 11
Dependent Claim
26 words
The method as defined in claim 7, wherein said cleaning solution is for removing fine particles, and said catholyte EIW is used as said rinsing solution.
Claim 12
Dependent Claim
16 words
The method as defined in claim 7, wherein said cleaning solution is for removing adherent metals.
Claim 13
Dependent Claim
29 words
The method as defined in claim 1, wherein said cleaning solution is for removing organic matter; and said anolyte EIW is used as said rinsing solution in said rinsing.
Claim 14
Dependent Claim
17 words
The method as defined in claim 12, wherein said cleaning solution is a sulfuric acid-hydrogen peroxide solution.
Claim 15
Dependent Claim
29 words
The method as defined in claim 1, wherein said cleaning solution is for removing organic matter; and said catholyte EIW is used as said rinsing solution in said rinsing.
Claim 16
Dependent Claim
17 words
The method as defined in claim 14, wherein said cleaning solution is a sulfuric acid-hydrogen peroxide solution.
Claim 17
Dependent Claim
26 words
The method as defined in claim 1, wherein said cleaning solution is for removing fine particles, and said catholyte EIW is used as said rinsing solution.
Claim 18
Dependent Claim
16 words
The method as defined in claim 1, wherein said cleaning solution is for removing adherent metals.
Claim 19
Dependent Claim
22 words
The method of claim 1, wherein said cleaning solution is for removing oxide films; and said rinsing solution is said catholyte EIW.
Claim 20
Independent Claim
118 words
An apparatus for cleaning electronic parts or the like, said apparatus comprising: a deionized water producing apparatus comprising ion exchange apparatus, membrane separation apparatus and distillation apparatus configured to produce deionized water; a cleaning apparatus for cleaning electronic components with a cleaning solution and then rinsing the electronic components with a rinsing solution; and an electrolysis apparatus for producing anolyte and/or catholyte electrolytic ionized water (EIW) produced from said deionized water from said deionized water producing apparatus and supplying said anolyte and/or catholyte to the cleaning apparatus as said rinsing solution for said rinsing; wherein said electrolysis apparatus is disposed on a branching pipe for said deionized water, and wherein said rinsing solution includes less than 0.1% ions.
Claim 21
Independent Claim
118 words
An apparatus for cleaning electronic parts or the like, said apparatus comprising: a deionized water producing apparatus comprising ion exchange apparatus, membrane separation apparatus and distillation apparatus configured to produce deionized water; a cleaning apparatus for cleaning electronic components with a cleaning solution and then rinsing the electronic components with a rinsing solution; and an electrolysis apparatus for producing anolyte and/or catholyte electrolytic ionized water (EIW) produced from said deionized water from said deionized water producing apparatus and supplying said anolyte and/or catholyte to the cleaning apparatus as said rinsing solution for said rinsing; wherein said electrolysis apparatus is disposed on a branching pipe for said deionized water, and wherein said rinsing solution includes less than 0.1% ions.
Claim 22
Dependent Claim
28 words
The apparatus of claim 9, further comprising an adding apparatus or apparatuses for adding an electrolyte or electrolytes to water supplied to an input of said electrolysis apparatus.
Claim 23
Dependent Claim
26 words
The apparatus of claim 19, further comprising an adding apparatus or apparatuses for adding an electrolyte or electrolytes to the EIW produced by said electrolysis apparatus.
References Cited (Backward Citations)
US4828660A
Cited
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2000-06-02 | 2000-12-02 | 2001-06-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-06-02 | 2004-12-02 | 2005-06-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-06-02 | 2008-12-02 | 2009-06-03 | $7700.00 | Window Closed / Lapsed |