US5632873A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Two piece anti-stick clamp ring
Assignee: Applied Materials Inc
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Filing: 1995-05-22
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Granted: 1997-05-27
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Expires: 2015-05-22
Abstract
Abstract A chamber for depositing a film layer on a substrate includes a support member on which the substrate is positioned for processing in the chamber, and a ring assembly suspended in the chamber on a chamber shield. The ring assembly comprises first and second rings, the second ring being disposed intermediate the first ring and the substrate. The support member is positionable in the chamber to receive a substrate thereon, and further positionable to pass the substrate through the shield and thereby lift the ring assembly off the shield. After deposition is complete, the support member retracts through the shield, to reposition the outer ring on the shield. The inner ring continues to move downwardly with the substrate support member a short distance before it is repositioned on the shield. In the event that a deposition material layer has formed between the substrate and the outer ring, the inner ring includes a plurality of tabs thereon which contact the substrate to force it out of the ring assembly as the inner ring continues downwardly after the outer ring has been positioned on the shield.
Inventors
- 👤 Joseph J. Stevens
- 👤 Roy J. Edwards
- 👤 Avi Tepman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:03
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4585
Claims Analysis
Total Claims: 47
Claim 1
Independent Claim
79 words
A semiconductor substrate deposition chamber, comprising; an enclosure; a support member positionable within the enclosure for supporting a substrate in the chamber; a hanger positioned within the chamber; a first ring positionable on said hanger and including a base adapted to be received on the exposed surface of the substrate when received on the support member; and a second ring positionable on said hanger and further positionable to overhang an annular region adjacent to the perimeter of the substrate.
Claim 2
Dependent Claim
79 words
A semiconductor substrate deposition chamber, comprising; an enclosure; a support member positionable within the enclosure for supporting a substrate in the chamber; a hanger positioned within the chamber; a first ring positionable on said hanger and including a base adapted to be received on the exposed surface of the substrate when received on the support member; and a second ring positionable on said hanger and further positionable to overhang an annular region adjacent to the perimeter of the substrate.
Claim 3
Dependent Claim
22 words
The chamber of claim 1, wherein said second ring is at least partially disposed intermediate said first ring and said support member.
Claim 4
Dependent Claim
23 words
The chamber of claim 2, wherein said first ring includes at least one support tab to support said first ring on said hanger.
Claim 5
Dependent Claim
31 words
The chamber of claim 3, wherein said second ring includes a plurality of slots extending radially inwardly from the perimeter thereof, and said support tabs of said first ring extend therethrough.
Claim 6
Dependent Claim
45 words
The chamber of claim 4, wherein said first ring includes at least one alignment pin extending therefrom, and said second ring includes at least one alignment recess therein, said alignment pin receivable in said alignment recess to align said first and second rings during processing.
Claim 7
Dependent Claim
24 words
The chamber of claim 5, wherein said base adapted to be received on the exposed surface of the substrate comprises a plurality of spacers.
Claim 8
Dependent Claim
10 words
The chamber of claim 1 further including a biasing member.
Claim 9
Dependent Claim
18 words
The chamber of claim 7, wherein said biasing member includes at least one spring interdisposed between said rings.
Claim 10
Dependent Claim
14 words
The chamber of claim 8, wherein said spring is attached to said first ring.
Claim 11
Dependent Claim
53 words
The chamber of claim 9, wherein said spring includes an attachment portion attached to a roof of said first ring, an engagement portion engaged against the upper surface of the second ring when said rings are lifted off said hanger, and a spring arm extending between said attachment portion and said engagement portion.
Claim 12
Independent Claim
91 words
An apparatus for shielding the edge of a semiconductor substrate from a deposition environment maintainable within a chamber, comprising: a first annular member positionable on said substrate to overhang the edge of a substrate received on said support member; and a second annular member translatably positioned adjacent the first annular member to ensure separation of the substrate from the first annular member after the formation of a deposition layer on the substrate, said second annular member positionable in a first, shield supported position and a second, substrate support member supported position.
Claim 13
Independent Claim
91 words
An apparatus for shielding the edge of a semiconductor substrate from a deposition environment maintainable within a chamber, comprising: a first annular member positionable on said substrate to overhang the edge of a substrate received on said support member; and a second annular member translatably positioned adjacent the first annular member to ensure separation of the substrate from the first annular member after the formation of a deposition layer on the substrate, said second annular member positionable in a first, shield supported position and a second, substrate support member supported position.
Claim 14
Dependent Claim
30 words
The apparatus of claim 11, wherein said first annular member comprises a clamp ring having a lip overhanging the upper surface of the substrate when received on said support member.
Claim 15
Dependent Claim
14 words
The apparatus of claim 12, wherein said second annular member comprises a biasing ring.
Claim 16
Dependent Claim
19 words
The apparatus of claim 13, wherein said biasing ring is disposed between said clamp ring and said support member.
Claim 17
Dependent Claim
23 words
The apparatus of claim 14, wherein said biasing ring includes a tab overhanging an annular region adjacent to the perimeter of the substrate.
Claim 18
Dependent Claim
42 words
The apparatus of claim 15, wherein said clamp ring includes at least one alignment pin, and said biasing ring includes at least one alignment recess, said alignment pin receivable in said alignment recess to align said clamp ring and said biasing ring.
Claim 19
Dependent Claim
25 words
The apparatus of claim 16, wherein said biasing ring includes an outer base portion adapted to be received on a hanger positioned within the chamber.
Claim 20
Dependent Claim
19 words
The apparatus of claim 17, wherein said biasing ring is supportable on said hanger and a substrate support member.
Claim 21
Dependent Claim
17 words
The apparatus of claim 18, wherein said clamp ring is supportable on said hanger and a substrate.
Claim 22
Dependent Claim
28 words
The apparatus of claim 11, wherein said second annular member includes a biasing ring and at least one spring interdisposed between said biasing ring and said clamp ring.
Claim 23
Dependent Claim
26 words
The apparatus of claim 20, wherein said spring is attached to a roof of said annular member and extends between said roof and said biasing ring.
Claim 24
Independent Claim
71 words
A method of ensuring the separation of a substrate from a shielding member, comprising: extending a portion of an annular member over the edge of a substrate; exposing the substrate and annular member to a deposition environment; providing an annular biasing member; and pushing the substrate from the shield member with the annular biasing member in the event an adhering film layer has formed between the substrate and the annular member.
Claim 25
Independent Claim
71 words
A method of ensuring the separation of a substrate from a shielding member, comprising: extending a portion of an annular member over the edge of a substrate; exposing the substrate and annular member to a deposition environment; providing an annular biasing member; and pushing the substrate from the shield member with the annular biasing member in the event an adhering film layer has formed between the substrate and the annular member.
Claim 26
Dependent Claim
22 words
The method of claim 22, wherein said annular member is a first ring and said annular biasing member is a second ring.
Claim 27
Dependent Claim
35 words
The method of claim 23, wherein said second ring includes an engagement portion engageable against the exposed surface of the substrate only when an adhering layer has formed between the second ring and the substrate.
Claim 28
Dependent Claim
48 words
The method of claim 24, wherein said first ring includes a plurality of spacer members received on said substrate during processing, said spacer members having a slot through which said engagement portions of said inner ring extend to overhang an annular region adjacent the edge of the substrate.
Claim 29
Dependent Claim
23 words
The method of claim 23, wherein said annular biasing member includes an engagement arm extending between the annular member and the biasing member.
Claim 30
Dependent Claim
55 words
The method of claim 23, including the further steps of: spacing the engagement portion of the second ring from the surface of the substrate when the substrate is exposed to the deposition environment; and contacting the engagement portion with the substrate only when a film layer has formed between the substrate and the first ring.
Claim 31
Dependent Claim
124 words
The method of claim 23, further including the steps of: providing a moveable support member in the chamber; positioning the first and second rings in the chamber on a hanger; positioning the support member below the hanger and placing a substrate thereon; moving the support member, with the substrate thereon, through the hanger to first position the second ring on the support member and then to position the first ring on the substrate; exposing the substrate to the deposition environment with the second ring positioned on the support member and the first ring positioned on the substrate; and withdrawing the support member through the hanger to first position the first ring on the hanger and then to position the second ring on the hanger.
Claim 32
Dependent Claim
31 words
The method of claim 28, wherein said first ring and said second ring are spaced to define a gap therebetween when said first and second rings are supported on the hanger.
Claim 33
Dependent Claim
39 words
The method of claim 29, wherein said second ring is moves through said gap on elevation of the support member to narrow the gap between the first and second rings until the first ring is received on the substrate.
Claim 34
Dependent Claim
53 words
The method of claim 28, wherein an engagement portion of said second ring is extendable below an engagement portion of said first ring to contact the upper surface of a substrate when said support member is withdrawn through the hanger only when an adhering layer has formed between the rings and the substrate.
Claim 35
Independent Claim
46 words
An apparatus for shielding the edge of a substrate from film layer deposition materials in a processing chamber, comprising; a shield ring having a roof and an inner lip; and a biasing ring disposed below said shield ring, said biasing ring having a substrate ejecting portion.
Claim 36
Independent Claim
46 words
An apparatus for shielding the edge of a substrate from film layer deposition materials in a processing chamber, comprising; a shield ring having a roof and an inner lip; and a biasing ring disposed below said shield ring, said biasing ring having a substrate ejecting portion.
Claim 37
Dependent Claim
27 words
The apparatus of claim 32, wherein said shield ring includes a base portion extending from said roof; and said biasing ring includes an inner annular base portion.
Claim 38
Dependent Claim
12 words
The apparatus of claim 33 further comprising at least one spring member.
Claim 39
Dependent Claim
30 words
The apparatus of claim 33, wherein said lip includes a recess therein; and said inner ring is received in said recess when the substrate is exposed to the deposition environment.
Claim 40
Dependent Claim
19 words
The apparatus of claim 35, wherein said shield ring further includes a plurality of spacers extending from said roof.
Claim 41
Dependent Claim
21 words
The apparatus of claim 36, wherein said spacers define a slot wherein an engagement portion of said inner ring is received.
Claim 42
Dependent Claim
20 words
The chamber of claim 37, wherein said first ring and said second ring are spaced to define a gap therebetween.
Claim 43
Dependent Claim
29 words
The chamber of claim 38, wherein said second ring is positionable within the gap formed between the first and second rings as the support member ascends above the hanger.
Claim 44
Dependent Claim
34 words
The apparatus of claim 11, wherein said second annular member is disposed below said first annular member, and said second annular member and first said annular member are spaced to define a gap therebetween.
Claim 45
Dependent Claim
40 words
The apparatus of claim 33, wherein said roof and said base portion of said first ring define a gap therebetween, said biasing member positionable within said gap to move between a hanger supported position and a support member supported position.
Claim 46
Dependent Claim
23 words
The apparatus of claim 32, further comprising a hanger positioned in the chamber and supporting said shield ring and said biasing ring thereon.
Claim 47
Dependent Claim
93 words
The apparatus of claim 42, further comprising a substrate support member positionable at a retracted position in the chamber for receipt of a substrate thereon, a first engagement position for the engagement of the substrate support member against the biasing member, a second engagement position for the engagement of the substrate support member against the shield ring suspended on said hanger, and a third, extended position wherein the substrate support member is moved through the biasing ring and the shield ring and lifts said biasing ring and said shielding ring from said hanger.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-05-26 | 2000-11-25 | 2001-05-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-05-26 | 2004-11-25 | 2005-05-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-05-26 | 2008-11-25 | 2009-05-27 | $7700.00 | Window Closed / Lapsed |