US5629922A
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Electron tunneling device using ferromagnetic thin films
Assignee: Massachusetts Institute of Technology
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Filing: 1995-03-21
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Granted: 1997-05-13
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Expires: 2015-03-21
Abstract
Abstract Ferromagnetic/insulator/ferromagnetic tunneling has been shown to give over 10% change in the junction resistance with H less than 100 Oe, at room temperature but decreases at high dc-bias across the junction. Using such junctions as magnetic sensors or memory elements would have several advantages; it is a trilayer device and does not strongly depend on the thickness of FM electrodes or the tunnel barrier; submicron size is possible with high junction resistance and low power dissipation. The magnitude of the effect is consistent with the simple model of spin-polarized tunneling between ferromagnets.
Inventors
- 👤 Jagadeesh S. Moodera
- 👤 Terrilyn Wong
- 👤 Lisa Kinder
- 👤 Robert H. Meservey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 07:01
CPC Classifications
G; G01; G01R; G01R33/00; G01R33/02; G01R33/06; G01R33/09; G01R33/093; B; B82; B82Y; B82Y25/00; G11; G11B; G11B11/00; G11B11/10; G11B5/00; G11B5/012; G11B5/127; G11B5/33; G11C; G11C11/00; G11C11/02; G11C11/14; G11C11/15; H; H10; H10N; H10N50/00; H10N50/10
Claims Analysis
Total Claims: 42
Claim 1
Independent Claim
69 words
A device forming a junction having a resistance comprising: a first electrode having a first magnetization direction, a second electrode having a second magnetization direction, and an electrical insulator between the first and the second electrodes, wherein applying a small magnitude of electromagnetic energy to the junction reverses at least one of the magnetization directions and causes a change in the resistance by at least 10% at room temperature.
Claim 2
Independent Claim
69 words
A device forming a junction having a resistance comprising: a first electrode having a first magnetization direction, a second electrode having a second magnetization direction, and an electrical insulator between the first and the second electrodes, wherein applying a small magnitude of electromagnetic energy to the junction reverses at least one of the magnetization directions and causes a change in the resistance by at least 10% at room temperature.
Claim 3
Dependent Claim
32 words
The device of claim 1, wherein the first and the second electrodes are ferromagnetic, and the first electrode has a coercive magnetic field of different magnitude than that of the second electrode.
Claim 4
Dependent Claim
29 words
The device of claim 1, wherein the first and the second electrodes have melting points greater than 1000 degrees Celsius and conduction electron spin polarization values greater than 0.3.
Claim 5
Dependent Claim
20 words
The device of claim 1, wherein the insulator forms a tunnel barrier layer between the first and the second electrodes.
Claim 6
Dependent Claim
12 words
The device of claim 1, wherein the junction forms a tunnel junction.
Claim 7
Dependent Claim
82 words
A memory system comprising a thin film device forming a junction having a resistance comprising: a first film layer having a first magnetization direction, a second film layer having a second magnetization direction, and an electrical insulator film layer placed in between the first and the second film layers, wherein applying a small magnitude of electromagnetic energy to the junction reverses at least one of the magnetization directions and causes a change in the resistance by at least 10% at room temperature.
Claim 8
Dependent Claim
82 words
A memory system comprising a thin film device forming a junction having a resistance comprising: a first film layer having a first magnetization direction, a second film layer having a second magnetization direction, and an electrical insulator film layer placed in between the first and the second film layers, wherein applying a small magnitude of electromagnetic energy to the junction reverses at least one of the magnetization directions and causes a change in the resistance by at least 10% at room temperature.
Claim 9
Dependent Claim
16 words
The memory system of claim 6, wherein the first and the second film layers are ferromagnetic.
Claim 10
Dependent Claim
22 words
The memory system of claim 6 further comprising a switched electromagnetic energy source for reversing at least one of the magnetization directions.
Claim 11
Independent Claim
93 words
A method of forming a trilayer tunneling device comprising the steps of: cooling a flat smooth substrate surface inside a vacuum evaporation apparatus, overlaying a thin seeding layer having relatively high melting point onto the substrate surface, overlaying a first ferromagnet layer onto the seeding layer, overlaying a precursor film onto the first ferromagnet layer, bringing the layers to room temperature and oxidizing the precursor film by a glow discharge in oxygen to form an insulating tunnel barrier layer, and overlaying a second ferromagnet layer on the insulating tunnel barrier at room temperature.
Claim 12
Independent Claim
93 words
A method of forming a trilayer tunneling device comprising the steps of: cooling a flat smooth substrate surface inside a vacuum evaporation apparatus, overlaying a thin seeding layer having relatively high melting point onto the substrate surface, overlaying a first ferromagnet layer onto the seeding layer, overlaying a precursor film onto the first ferromagnet layer, bringing the layers to room temperature and oxidizing the precursor film by a glow discharge in oxygen to form an insulating tunnel barrier layer, and overlaying a second ferromagnet layer on the insulating tunnel barrier at room temperature.
Claim 13
Dependent Claim
20 words
The method of claim 9, wherein the pressure setting for the vacuum evaporation apparatus is at least 10 -7 Torr.
Claim 14
Dependent Claim
12 words
The method of claim 9, wherein the substrate is a glass substrate.
Claim 15
Dependent Claim
42 words
The method of claim 9, wherein the first and the second ferromagnet layers have coercive forces in the range of about 1 Oe to 1000 Oe, melting points greater than 1000 degrees Celsius, and conduction electron spin polarization values greater than 0.3.
Claim 16
Dependent Claim
17 words
The method of claim 9, wherein the seeding layer has melting point greater than 1000 degrees Celsius.
Claim 17
Dependent Claim
23 words
The method of claim 9, wherein the insulating layer forms a thin tunnel barrier layer between the first and the second ferromagnet layers.
Claim 18
Dependent Claim
39 words
The method of claim 9, wherein the first and the second ferromagnet layers are ferromagnets selected from the group consisting of cobalt iron, nickel manganese antimony, platinum manganese antimony, manganese bismuth, nickel iron, cobalt, chromium, chromium oxide or iron.
Claim 19
Dependent Claim
96 words
A memory device for storing binary data comprising: a substrate coated with a thin film comprising a plurality of trilayer devices, each having a junction with a resistance, wherein each device comprises: a first film layer having a first magnetization direction, a second film layer having a second magnetization direction, and an electrical insulator layer between the first and the second film layers, wherein applying a small magnitude of electromagnetic energy to the junction reverses at least one of the magnetization directions and causes a change in the resistance by at least 10% at room temperature.
Claim 20
Dependent Claim
96 words
A memory device for storing binary data comprising: a substrate coated with a thin film comprising a plurality of trilayer devices, each having a junction with a resistance, wherein each device comprises: a first film layer having a first magnetization direction, a second film layer having a second magnetization direction, and an electrical insulator layer between the first and the second film layers, wherein applying a small magnitude of electromagnetic energy to the junction reverses at least one of the magnetization directions and causes a change in the resistance by at least 10% at room temperature.
Claim 21
Dependent Claim
37 words
The memory device of claim 16, wherein the first and the second film layers are ferromagnetic, and the first film layer has a coercive magnetic field force of different magnitude than that of the second film layer.
Claim 22
Dependent Claim
31 words
The memory device of claim 16, wherein the first and the second film layers have melting points greater than 1000 degrees Celsius and conduction electron spin polarization values greater than 0.3.
Claim 23
Dependent Claim
23 words
The memory device of claim 16, wherein the insulator layer forms a tunnel barrier layer between the first and the second film layers.
Claim 24
Dependent Claim
38 words
The memory device of claim 16, wherein the resistance of each junction indicates a binary state such that the change in the resistance correspondingly changes the binary state, and such state can be maintained without the electromagnetic energy.
Claim 25
Dependent Claim
14 words
The memory device of claim 16, wherein each trilayer junction forms a tunnel junction.
Claim 26
Dependent Claim
48 words
The memory device of claim 16 further comprising: a movable head comprising, a micro-coil device at the proximal end of the movable head for applying a predetermined electromagnetic energy across the junction for affecting the magnetization direction, and a sensor device for measuring electromagnetic energy across the junction.
Claim 27
Dependent Claim
96 words
A memory device for storing binary data comprising: a movable read-write sensor head comprising two trilayer devices, each having a junction with a resistance, separated by a gap, wherein each device comprises: a first film layer having a first magnetization direction, a second film layer having a second magnetization direction, and an electrical insulator layer between the first and the second film layers, wherein applying a small magnitude of electromagnetic energy to the junction reverses at least one of the magnetization directions and causes a change in the resistance by at least 10% at room temperature.
Claim 28
Dependent Claim
96 words
A memory device for storing binary data comprising: a movable read-write sensor head comprising two trilayer devices, each having a junction with a resistance, separated by a gap, wherein each device comprises: a first film layer having a first magnetization direction, a second film layer having a second magnetization direction, and an electrical insulator layer between the first and the second film layers, wherein applying a small magnitude of electromagnetic energy to the junction reverses at least one of the magnetization directions and causes a change in the resistance by at least 10% at room temperature.
Claim 29
Dependent Claim
36 words
The memory device of claim 23, wherein the first and the second film layers are ferromagnetic, and the first film layer has a coercive magnetic field of different magnitude than that of the second film layer.
Claim 30
Dependent Claim
31 words
The memory device of claim 23, wherein the first and the second film layers have melting points greater than 1000 degrees Celsius and conduction electron spin polarization values greater than 0.3.
Claim 31
Dependent Claim
23 words
The memory device of claim 23, wherein the insulator layer forms a tunnel barrier layer between the first and the second film layers.
Claim 32
Dependent Claim
38 words
The memory device of claim 23, wherein the resistance of each junction indicates a binary state such that the change in the resistance correspondingly changes the binary state, and such state can be maintained without the electromagnetic energy.
Claim 33
Dependent Claim
14 words
The memory device of claim 23, wherein each trilayer junction forms a tunnel junction.
Claim 34
Dependent Claim
83 words
The memory device of claim 23 further comprising: a disk having two magnetically coated surfaces fixed in the gap between the two junctions so that an interface between one surface and one of the junctions and another interface between the other surface and the other junction are formed in a stack; an actuator coupled to the sensor head for positioning the sensor head across both surfaces of the disk simultaneously; and a stepping motor coupled to the actuator for linearly driving the actuator.
Claim 35
Dependent Claim
95 words
A sensor device comprising: an integrated circuit comprising a plurality of trilayer devices, each having a junction with a resistance, in a matrix array forming binary bits, wherein each device comprises: a first film layer having a first magnetization direction, a second film layer having a second magnetization direction, and an electrical insulator layer between the first and the second film layers, wherein applying a small magnitude of electromagnetic energy to the junction reverses at least one of the magnetization directions and causes a change in the resistance by at least 10% at room temperature.
Claim 36
Dependent Claim
95 words
A sensor device comprising: an integrated circuit comprising a plurality of trilayer devices, each having a junction with a resistance, in a matrix array forming binary bits, wherein each device comprises: a first film layer having a first magnetization direction, a second film layer having a second magnetization direction, and an electrical insulator layer between the first and the second film layers, wherein applying a small magnitude of electromagnetic energy to the junction reverses at least one of the magnetization directions and causes a change in the resistance by at least 10% at room temperature.
Claim 37
Dependent Claim
36 words
The sensor device of claim 30, wherein the first and the second film layers are ferromagnetic, and the first film layer has a coercive magnetic field of different magnitude than that of the second film layer.
Claim 38
Dependent Claim
31 words
The sensor device of claim 30, wherein the first and the second film layers have melting points greater than 1000 degrees Celsius and conduction electron spin polarization values greater than 0.3.
Claim 39
Dependent Claim
23 words
The sensor device of claim 30, wherein the insulator layer forms a tunnel barrier layer between the first and the second film layers.
Claim 40
Dependent Claim
38 words
The sensor device of claim 30, wherein the resistance of each junction indicates a binary state such that the change in the resistance correspondingly changes the binary state, and such state can be maintained without the electromagnetic energy.
Claim 41
Dependent Claim
14 words
The sensor device of claim 30, wherein each trilayer junction forms a tunnel junction.
Claim 42
Dependent Claim
47 words
The sensor device of claim 30 further comprising a signal transducer coupled to the integrated circuit for transducing a plurality of electrical signals into electromagnetic energy directed to the matrix array, wherein the electromagnetic energy affects the magnetization direction to cause a change in the binary bits.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-05-12 | 2000-11-11 | 2001-05-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-05-12 | 2004-11-11 | 2005-05-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-05-12 | 2008-11-11 | 2009-05-13 | $7700.00 | Window Closed / Lapsed |