US5624304A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Techniques for assembling polishing pads for chemi-mechanical polishing of silicon wafers
Assignee: LSI Corp
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Filing: 1994-08-23
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Granted: 1997-04-29
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Expires: 2014-08-23
Abstract
Abstract A technique for mounting polishing pads to a platen in chemi-mechanical semiconductor wafer polishing apparatus is disclosed. A lower pad is mounted to the platen, and is trimmed to the size of the platen. An upper pad is mounted to the lower pad, and is sized so that an extreme outer edge portion of the upper pad extends beyond the trimmed outer edge of the lower pad. The outer edge portion of the upper pad is deformed downwardly, towards the lower pad. In this manner, polishing slurry is diverted from the pad-to-pad interface. Additionally, an integral annular lip can be formed on the front face of the upper pad, creating a reservoir for slurry to be retained on the face of the upper pad for enhancing residence time of the polishing slurry prior to the slurry washing over the face of the upper pad.
Inventors
- 👤 Nicholas F. Pasch
- 👤 Thomas G. Mallon
- 👤 Mark A. Franklin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 15:54
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/11; B24B37/20; B24B37/22; Y; Y10; Y10S; Y10S438/00; Y10S438/959; Y10S451/00; Y10S451/921; Y10T; Y10T156/00; Y10T156/10; Y10T156/1002; Y10T156/1026; Y10T156/1034; Y10T156/1052
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
188 words
Apparatus for chemi-mechanical polishing of semiconductor wafers using polishing slurry, comprising: a rotating platen having a front face, an edge, and a diameter "d"; a stack of two polishing pads, an upper pad and a lower pad, each pad having a front face and a back face, the back face of the upper pad mounted to the front face of the lower pad, the back face of the lower pad mounted to the front face of the platen, the front face of the upper pad exposed for polishing a wafer, the upper pad having a diameter greater than the diameter of the lower pad so that an outer edge portion of the upper pad extends beyond an outer edge of the lower pad, and an outer edge portion of the upper polishing pad bent downward in the direction of the lower polishing pad, wherein an annular portion of the upper polishing pad, adjacent to and inward of the outer edge portion of the upper pad, is deformed away from the lower polishing pad to form a reservoir for polishing slurry on the face of the upper polishing pad.
Claim 2
Dependent Claim
188 words
Apparatus for chemi-mechanical polishing of semiconductor wafers using polishing slurry, comprising: a rotating platen having a front face, an edge, and a diameter "d"; a stack of two polishing pads, an upper pad and a lower pad, each pad having a front face and a back face, the back face of the upper pad mounted to the front face of the lower pad, the back face of the lower pad mounted to the front face of the platen, the front face of the upper pad exposed for polishing a wafer, the upper pad having a diameter greater than the diameter of the lower pad so that an outer edge portion of the upper pad extends beyond an outer edge of the lower pad, and an outer edge portion of the upper polishing pad bent downward in the direction of the lower polishing pad, wherein an annular portion of the upper polishing pad, adjacent to and inward of the outer edge portion of the upper pad, is deformed away from the lower polishing pad to form a reservoir for polishing slurry on the face of the upper polishing pad.
Claim 3
Dependent Claim
22 words
Apparatus according to claim 1, wherein the outer edge portion of the upper pad extends concentrically beyond the edge of the platen.
Claim 4
Dependent Claim
18 words
Apparatus according to claim 1, wherein the lower pad is trimmed to substantially the size of the platen.
Claim 5
Dependent Claim
77 words
A chemical-mechanical polishing apparatus using a slurry mixture, said polishing apparatus comprising: a generally circular platen having a generally flat surface of a defined diameter; and a generally circular top polishing pad concentrically mounted to said platen and having a defined diameter D, wherein D is greater than said defined platen diameter and wherein an edge portion of said top polishing pad extending beyond the platen flat surface is bent downward to at least the flat surface.
Claim 6
Dependent Claim
77 words
A chemical-mechanical polishing apparatus using a slurry mixture, said polishing apparatus comprising: a generally circular platen having a generally flat surface of a defined diameter; and a generally circular top polishing pad concentrically mounted to said platen and having a defined diameter D, wherein D is greater than said defined platen diameter and wherein an edge portion of said top polishing pad extending beyond the platen flat surface is bent downward to at least the flat surface.
Claim 7
Dependent Claim
19 words
The chemical-mechanical polishing apparatus of claim 4 wherein said top polishing pad comprises polyester felt doped with polyurethane resin.
Claim 8
Dependent Claim
55 words
The chemical-mechanical polishing apparatus of claim 4 further comprising a lower pad concentrically affixed to the generally flat surface of said platen on one side and concentrically affixed to the top polishing pad on the other side, wherein the lower pad has a defined diameter d which is less than the top pad diameter D.
Claim 9
Dependent Claim
17 words
The chemical-mechanical polishing apparatus of claim 6 wherein d is about equal to the defined platen diameter.
Claim 10
Dependent Claim
16 words
The chemical-mechanical polishing apparatus of claim 6 wherein d is less than the defined platen diameter.
Claim 11
Dependent Claim
16 words
The chemical-mechanical polishing apparatus of claim 6 wherein said top polishing pad includes an annular hillock.
Claim 12
Dependent Claim
14 words
The chemical-mechanical polishing apparatus of claim 6 wherein said lower pad comprises polyurethane foam.
Claim 13
Dependent Claim
51 words
The chemical-mechanical polishing apparatus of claim 6 wherein an annular portion of the top polishing pad, adjacent to and inward of the edge portion of the top polishing pad, is deformed away from the lower pad to form a reservoir for polishing slurry on the face of the top polishing pad.
Claim 14
Dependent Claim
143 words
A chemical-mechanical polishing apparatus comprising: a generally circular platen having a generally flat surface of a defined diameter; a generally circular top polishing pad concentrically mounted to said platen and having a defined diameter D, wherein D is greater than said defined platen diameter and wherein an edge portion of said top polishing pad extending beyond the platen flat surface is bent downward toward or below the flat surface; and a lower pad concentrically affixed to the generally flat surface of said platen on one side and concentrically affixed to said top polishing pad on the other side, said lower pad having a thickness t and a defined diameter d which is less than the diameter D of said top polishing pad, and the edge portion of said top polishing pad extends beyond said lower pad by a distance of at least 2πt/4.
Claim 15
Dependent Claim
143 words
A chemical-mechanical polishing apparatus comprising: a generally circular platen having a generally flat surface of a defined diameter; a generally circular top polishing pad concentrically mounted to said platen and having a defined diameter D, wherein D is greater than said defined platen diameter and wherein an edge portion of said top polishing pad extending beyond the platen flat surface is bent downward toward or below the flat surface; and a lower pad concentrically affixed to the generally flat surface of said platen on one side and concentrically affixed to said top polishing pad on the other side, said lower pad having a thickness t and a defined diameter d which is less than the diameter D of said top polishing pad, and the edge portion of said top polishing pad extends beyond said lower pad by a distance of at least 2πt/4.
Claim 16
Dependent Claim
19 words
The chemical-mechanical polishing apparatus of claim 12 wherein said top polishing pad comprises polyester felt doped with polyurethane resin.
Claim 17
Dependent Claim
17 words
The chemical-mechanical polishing apparatus of claim 12 wherein d is about equal to the defined platen diameter.
Claim 18
Dependent Claim
16 words
The chemical-mechanical polishing apparatus of claim 12 wherein d is less than the defined platen diameter.
Claim 19
Dependent Claim
16 words
The chemical-mechanical polishing apparatus of claim 12 wherein said top polishing pad includes an annular hillock.
Claim 20
Dependent Claim
14 words
The chemical-mechanical polishing apparatus of claim 12 wherein said lower pad comprises polyurethane foam.
Claim 21
Dependent Claim
51 words
The chemical-mechanical polishing apparatus of claim 12 wherein an annular portion of the top polishing pad, adjacent to and inward of the edge portion of the top polishing pad, is deformed away from the lower pad to form a reservoir for polishing slurry on the face of the top polishing pad.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-04-28 | 2000-10-28 | 2001-04-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-04-28 | 2004-10-28 | 2005-04-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-04-28 | 2008-10-28 | 2009-04-29 | $7700.00 | Window Closed / Lapsed |