US5619326A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of sample valuation based on the measurement of photothermal displacement
Assignee: Kobe Steel Ltd
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Filing: 1995-03-24
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Granted: 1997-04-08
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Expires: 2015-03-24
Abstract
Abstract A sample evaluation method based on the measurement of photothermal displacement in which two exciting light beams and two measuring light beams are produced by a laser source, the exciting beams are rendered intensity modulation in opposite phase relationship by an acoustic-optic modulator and illuminated to different positions of a sample, the measuring beams are provided with different oscillation frequencies by acoustic-optic modulators and illuminated to the irradiation positions of the exciting beams correspondingly, the reflected lights of measuring beams from the sample are merged so as to interfere with each other, and the sample is evaluated based on the phase of the interference light. The method is capable of measuring the photothermal displacement accurately and stably without implementing intricate signal processings.
Inventors
- 👤 Hiroyuki Takamatsu
- 👤 Tsutomu Morimoto
- 👤 Shingo Sumie
- 👤 Naoyuki Yoshida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 05:18
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/171
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
115 words
A sample evaluation method based on the measurement of a photothermal displacement on a sample caused by the illumination of an excitation light beam, said method comprising the steps of: generating two exciting beams and two measuring beams; implementing intensity modulation for the two exciting beams in different phase relationship and illuminating the modulated light beams to different positions of a sample; providing different oscillation frequencies for the two measuring beams; illuminating the two measuring beams to the irradiation positions of the exciting beams correspondingly; and merging reflected lights of the measuring beams from the sample so as to interfere with each other and evaluating the sample based on the phase of the interference light.
Claim 2
Dependent Claim
115 words
A sample evaluation method based on the measurement of a photothermal displacement on a sample caused by the illumination of an excitation light beam, said method comprising the steps of: generating two exciting beams and two measuring beams; implementing intensity modulation for the two exciting beams in different phase relationship and illuminating the modulated light beams to different positions of a sample; providing different oscillation frequencies for the two measuring beams; illuminating the two measuring beams to the irradiation positions of the exciting beams correspondingly; and merging reflected lights of the measuring beams from the sample so as to interfere with each other and evaluating the sample based on the phase of the interference light.
Claim 3
Dependent Claim
21 words
A sample valuation method according to claim 1, wherein said two exciting beams are rendered intensity modulation in opposite phase relationship.
Claim 4
Dependent Claim
30 words
A sample evaluation method according to claim 1 or 2, wherein the exciting beams are provided with an oscillation frequency that is different from oscillation frequencies of the measuring beams.
Claim 5
Dependent Claim
37 words
A sample evaluation method according to claim 1, wherein said two exciting beams are rendered intensity modulation by means of an acoustic-optic modulator, and a resulting diffracted and non-diffracted light beams are illuminated on to the sample.
Claim 6
Dependent Claim
46 words
A sample evaluation method according to claim 1, wherein the photothermal displacement is measured based on a phase variation of a beat signal included in the opto-electric conversion output of the interference light and having a component of oscillation frequency difference of the two measuring beams.
Claim 7
Dependent Claim
21 words
A sample evaluation method according to claim 1, wherein the exciting beams are generated by means of a variable-wavelength light source.
Claim 8
Dependent Claim
126 words
A sample evaluation method based on the measurement of a photothermal displacement on a sample caused by the illumination of an excitation light beam, said method comprising the steps of: intensity-modulating a light beam then splitting the intensity-modulated light beam into first and second beams, and illuminating the first split beam on to a sample; sampling the light beam and splitting the sampled light beam into third and fourth beams; measuring a first phase of the reflected light of the first split beam from the sample relative to the phase of the third split beam; measuring a second phase of the second split beam relative to the phase of the fourth split beam; and measuring the photothermal displacement based on the measured first and second phases.
Claim 9
Dependent Claim
126 words
A sample evaluation method based on the measurement of a photothermal displacement on a sample caused by the illumination of an excitation light beam, said method comprising the steps of: intensity-modulating a light beam then splitting the intensity-modulated light beam into first and second beams, and illuminating the first split beam on to a sample; sampling the light beam and splitting the sampled light beam into third and fourth beams; measuring a first phase of the reflected light of the first split beam from the sample relative to the phase of the third split beam; measuring a second phase of the second split beam relative to the phase of the fourth split beam; and measuring the photothermal displacement based on the measured first and second phases.
Claim 10
Dependent Claim
88 words
A sample evaluation method according to claim 7, wherein the first and second light beams have a light frequency that is different from a light frequency of the third and fourth split light beams, the third light beam is merged with the reflected light so as to interfere with each other separately, the fourth light beam is merged with the reflected light so as to interfere with each other separately, and the photothermal displacement is measured based on the first and second phase difference of the interference lights.
Claim 11
Dependent Claim
35 words
A sample valuation method according to claim 8, wherein the interference lights are received by separate opto-electric transducers, and the photothermal displacement is measured based on the phase difference of output signals of said transducers.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-04-07 | 2000-10-07 | 2001-04-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-04-07 | 2004-10-07 | 2005-04-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-04-07 | 2008-10-07 | 2009-04-08 | $7700.00 | Window Closed / Lapsed |