Method and apparatus for detecting photoacoustic signal

Claim 2

A photoacoustic signal detection method for detecting information about a characteristic of a surface of a sample and a subsurface of the sample, comprising the steps of: splitting a light beam from a single light source into an excitation/probe light beam and a reference light beam; intensity-modulating the excitation/probe light beam at a desired intensity modulation frequency to produce an intensity-modulated excitation/probe light beam for exciting and probing the surface of the sample and the subsurface of the sample; producing an optical frequency difference between the intensity-modulated excitation/probe light beam and the reference light beam; focusing the intensity-modulated excitation/probe light beam on the surface of the sample to generate a photoacoustic effect or a photothermal effect at the surface of the sample, thereby producing thermal distortions in the sample, wherein the intensity-modulated excitation/probe light beam is reflected from the surface of the sample to produce a reflected intensity-modulated excitation/probe light beam representative of the thermal distortions in the sample; causing heterodyne interference to occur between the reflected intensity-modulated excitation/probe light beam and the reference light beam to produce heterodyne interference light including a frequency component having a frequency equal to twice the intensity modulation frequency, the heterodyne interference occurring as a result of the optical frequency difference between the excitation/probe light beam and the reference light beam; converting the heterodyne interference light to an electric signal including a frequency component having a frequency equal to twice the intensity modulation frequency; extracting from the electric signal at least one of an amplitude and a phase of the frequency component having the frequency equal to twice the intensity modulation frequency; and detecting information about the characteristic of the surface of the sample and the subsurface of the sample based on the extracted at least one of the amplitude and the phase.

Claim 3

A method according to claim 1, wherein the single light source includes a laser source for emitting a linearly-polarized light beam.

Claim 4

A method according to claim 1, wherein the step of producing an optical frequency difference between the intensity-modulated excitation/probe light beam and the reference light beam includes shifting an optical frequency of the intensity-modulated excitation/probe light beam with an acousto-optical modulator to produce the optical frequency difference.

Claim 5

A method according to claim 1, wherein the step of extracting from the electric signal at least one of an amplitude and a phase is performed with a lock-in amplifier operating based on the electric signal and a signal having a frequency equal to twice the intensity modulation frequency.

Claim 6

A method according to claim 1, wherein the optical frequency difference between the intensity-modulated excitation/probe light beam and the reference light beam is higher than the intensity modulation frequency.

Claim 7

A method according to claim 1, wherein the step of producing an optical frequency difference between the intensity-modulated excitation/probe light beam and the reference light beam includes shifting an optical frequency of only one of the intensity-modulated excitation/probe light beam and the reference light beam to produce the optical frequency difference.

Claim 8

A method according to claim 1, wherein the step of producing an optical frequency difference between the intensity-modulated excitation/probe light beam and the reference light beam includes shifting respective optical frequencies of the intensity-modulated excitation/probe light beam and the reference light beam by mutually different amounts to produce the optical frequency difference.

Claim 9

A method according to claim 1, wherein the step of focusing the intensity-modulated excitation/probe light beam on the surface of the sample is performed with focusing means; wherein the step of causing heterodyne interference to occur is performed with means for causing heterodyne interference to occur; and wherein the focusing means and the means for causing heterodyne interference to occur are formed as a confocal optical system.

Claim 10

A photoacoustic signal detection apparatus for detecting information about a characteristic of a surface of a sample and a subsurface of the sample, comprising: a single light source for emitting a light beam; means for splitting the light beam into an excitation/probe light beam and a reference light beam; intensity modulating means for intensity-modulating the excitation/probe light beam at a desired intensity modulation frequency to produce an intensity modulated excitation/probe light beam for exciting and probing a surface of a sample and a subsurface of the sample; means for producing an optical frequency difference between the intensity-modulated excitation/probe light beam and the reference light beam; means for focusing the intensity-modulated excitation/probe light beam on the surface of the sample to generate a photoacoustic effect or a photothermal effect at the surface of the sample, thereby producing thermal distortions in the sample, wherein the excitation/probe light beam is reflected from the surface of the sample to produce a reflected intensity-modulated excitation/probe light beam representative of the thermal distortions in the sample; means for causing heterodyne interference to occur between the reflected intensity-modulated excitation/probe light beam and the reference light beam to produce heterodyne interference light including a frequency component having a frequency equal to twice the intensity modulation frequency, the heterodyne interference occurring as a result of the optical frequency difference between the excitation/probe light beam and the reference light beam; means for converting the heterodyne interference light to an electric signal including a frequency component having a frequency equal to twice the intensity modulation frequency; means for extracting from the electric signal at least one of an amplitude and a phase of the frequency component having the frequency equal to twice the intensity modulation frequency; and means for detecting information about the characteristic of the surface of the sample and the subsurface of the sample based on the extracted at least one of the amplitude and the phase.

Claim 11

A photoacoustic signal detection apparatus for detecting information about a characteristic of a surface of a sample and a subsurface of the sample, comprising: a single light source for emitting a light beam; means for splitting the light beam into an excitation/probe light beam and a reference light beam; intensity modulating means for intensity-modulating the excitation/probe light beam at a desired intensity modulation frequency to produce an intensity modulated excitation/probe light beam for exciting and probing a surface of a sample and a subsurface of the sample; means for producing an optical frequency difference between the intensity-modulated excitation/probe light beam and the reference light beam; means for focusing the intensity-modulated excitation/probe light beam on the surface of the sample to generate a photoacoustic effect or a photothermal effect at the surface of the sample, thereby producing thermal distortions in the sample, wherein the excitation/probe light beam is reflected from the surface of the sample to produce a reflected intensity-modulated excitation/probe light beam representative of the thermal distortions in the sample; means for causing heterodyne interference to occur between the reflected intensity-modulated excitation/probe light beam and the reference light beam to produce heterodyne interference light including a frequency component having a frequency equal to twice the intensity modulation frequency, the heterodyne interference occurring as a result of the optical frequency difference between the excitation/probe light beam and the reference light beam; means for converting the heterodyne interference light to an electric signal including a frequency component having a frequency equal to twice the intensity modulation frequency; means for extracting from the electric signal at least one of an amplitude and a phase of the frequency component having the frequency equal to twice the intensity modulation frequency; and means for detecting information about the characteristic of the surface of the sample and the subsurface of the sample based on the extracted at least one of the amplitude and the phase.

Claim 12

An apparatus according to claim 9, wherein the single light source includes a laser source for emitting a linearly-polarized light beam.

Claim 13

An apparatus according to claim 9, wherein the means for producing an optical frequency difference between the intensity-modulated excitation/probe light beam and the reference light beam includes means for shifting an optical frequency of the intensity-modulated excitation/probe light beam with the intensity modulating means to produce the optical frequency difference.

Claim 14

An apparatus according to claim 9, wherein the means for extracting from the electric signal at least one of an amplitude and a phase includes a lock-in amplifier operating based on the electric signal and a signal having a frequency equal to twice the intensity modulation frequency.

Claim 15

An apparatus according to claim 9, wherein the optical frequency difference between the intensity-modulated excitation/probe light beam and the reference light beam is higher than the intensity modulation frequency.

Claim 16

An apparatus according to claim 9, wherein the means for producing an optical frequency difference between the intensity-modulated excitation/probe light beam and the reference light beam includes means for shifting an optical frequency of only one of the intensity-modulated excitation/probe light beam and the reference light beam to produce the optical frequency difference.

Claim 17

An apparatus according to claim 9, wherein the means for producing an optical frequency difference between the intensity-modulated excitation/probe light beam and the reference light beam includes means for shifting respective optical frequencies of the intensity-modulated excitation/probe light beam and the reference light beam by mutually different amounts to produce the optical frequency difference.

Claim 18

An apparatus according to claim 9, wherein the means for focusing and the means for causing heterodyne interference to occur are formed as a confocal optical system.

Claim 19

A photoacoustic signal detection method for detecting information about a characteristic of a surface of a sample and various depths in a subsurface of the sample, comprising the steps of: intensity-modulating a light beam at a desired intensity modulation frequency to produce an intensity-modulated light beam, the intensity modulation frequency being selected in accordance with a thermal diffusion length in the sample corresponding to a depth in the subsurface of the sample about a characteristic of which information is to be detected; focusing the intensity-modulated light beam on the surface of the sample to generate a photoacoustic effect or a photothermal effect at the surface of the sample, thereby producing thermal distortions in the sample; detecting the thermal distortions in the sample and producing a thermal distortion signal representative of the thermal distortions in the sample, the thermal distortion signal including a component having a frequency related to the intensity modulation frequency, wherein variations in the intensity modulation frequency produce variations in an amplitude of the component having a frequency related to the intensity modulation frequency; compensating for the variations in the amplitude of the component having a frequency related to the intensity modulation frequency such that the amplitude of the component having a frequency related to the intensity modulation frequency is unaffected by the variations in the intensity modulation frequency; and extracting from the thermal distortion signal the amplitude of the component having a frequency related to the intensity modulation frequency which is unaffected by the variations in the intensity modulation frequency.

Claim 20

A photoacoustic signal detection method for detecting information about a characteristic of a surface of a sample and various depths in a subsurface of the sample, comprising the steps of: intensity-modulating a light beam at a desired intensity modulation frequency to produce an intensity-modulated light beam, the intensity modulation frequency being selected in accordance with a thermal diffusion length in the sample corresponding to a depth in the subsurface of the sample about a characteristic of which information is to be detected; focusing the intensity-modulated light beam on the surface of the sample to generate a photoacoustic effect or a photothermal effect at the surface of the sample, thereby producing thermal distortions in the sample; detecting the thermal distortions in the sample and producing a thermal distortion signal representative of the thermal distortions in the sample, the thermal distortion signal including a component having a frequency related to the intensity modulation frequency, wherein variations in the intensity modulation frequency produce variations in an amplitude of the component having a frequency related to the intensity modulation frequency; compensating for the variations in the amplitude of the component having a frequency related to the intensity modulation frequency such that the amplitude of the component having a frequency related to the intensity modulation frequency is unaffected by the variations in the intensity modulation frequency; and extracting from the thermal distortion signal the amplitude of the component having a frequency related to the intensity modulation frequency which is unaffected by the variations in the intensity modulation frequency.

Claim 21

A method according to claim 17, wherein the amplitude of the component having a frequency related to the intensity modulation frequency has a sensitivity characteristic which is a function of the intensity modulation frequency; and wherein the step of compensating for the variations in the amplitude of the component having a frequency related to the intensity modulation frequency includes adjusting an intensity of the intensity-modulated light in accordance with the intensity modulation frequency such that the sensitivity characteristic of the amplitude of the component having a frequency related to the intensity modulation frequency is substantially constant at each intensity modulation frequency.

Claim 22

A method according to claim 17, wherein the amplitude of the component having a frequency related to the intensity modulation frequency has a sensitivity characteristic which is a function of the intensity modulation frequency; and wherein the step of compensating for the variations in the amplitude of the component having a frequency related to the intensity modulation frequency includes adjusting a level of the thermal distortion signal in accordance with the intensity modulation frequency such that the sensitivity characteristic of the amplitude of the component having a frequency related to the intensity modulation frequency is substantially constant at each intensity modulation frequency.

Claim 23

A method according to claim 17, wherein the step of detecting the thermal distortions in the sample and producing a thermal distortion signal representative of the thermal distortions in the sample includes detecting the thermal distortions in the sample with thermal distortion detecting means having a detection sensitivity characteristic which is a function of the intensity modulation frequency; wherein the thermal distortion signal has a sensitivity characteristic which is a function of the intensity modulation frequency; and wherein the step of compensating for the variations in the amplitude of the component having a frequency related to the intensity modulation frequency includes compensating for the detection sensitivity characteristic of the thermal distortion detecting means such that the sensitivity characteristic of the thermal distortion signal is substantially constant at each intensity modulation frequency.

Claim 24

A method according to claim 17, wherein the step of detecting the thermal distortions in the sample and producing a thermal distortion signal representative of the thermal distortions in the sample includes detecting the thermal distortions in the sample on the surface of the sample with optical interference detecting means.

Claim 25

A method according to claim 21, wherein the optical interference detecting means is formed as a confocal optical system for detecting the thermal distortions in the sample on the surface of the sample.

Claim 26

A method according to claim 17, wherein the step of detecting the thermal distortions in the sample and producing a thermal distortion signal representative of the thermal distortions in the sample includes detecting the thermal distortions in the sample on the surface of the sample with a piezoelectric transducer.

Claim 27

A method according to claim 17, wherein the step of focusing the intensity-modulated light beam on the surface of the sample to generate a photoacoustic effect or a photothermal effect at the surface of the sample includes focusing the intensity-modulated light beam on the surface of the sample with focusing means which is formed as a confocal optical system.

Claim 28

A photoacoustic signal detection apparatus for detecting information about a characteristic of a surface of a sample and various depths in a subsurface of the sample, comprising: means for intensity-modulating a light beam at a desired intensity modulation frequency to produce an intensity-modulated light beam, the intensity modulation frequency being selected in accordance with a thermal diffusion length in a sample corresponding to a depth in a subsurface of the sample about a characteristic of which information is to be detected; means for focusing the intensity-modulated light beam on the surface of the sample to generate a photoacoustic effect or a photothermal effect at the surface of the sample, thereby producing thermal distortions in the sample; means for detecting the thermal distortions in the sample and producing a thermal distortion signal representative of the thermal distortions in the sample, the thermal distortion signal including a component having a frequency related to the intensity modulation frequency, wherein variations in the intensity modulation frequency produce variations in an amplitude of the component having a frequency related to the intensity modulation frequency; means for compensating for the variations in the amplitude of the component having a frequency related to the intensity modulation frequency such that the amplitude of the component having a frequency related to the intensity modulation frequency is unaffected by the variations in the intensity modulation frequency; and means for extracting from the thermal distortion signal the amplitude of the component having a frequency related to the intensity modulation frequency which is unaffected by the variations in the intensity modulation frequency.

Claim 29

A photoacoustic signal detection apparatus for detecting information about a characteristic of a surface of a sample and various depths in a subsurface of the sample, comprising: means for intensity-modulating a light beam at a desired intensity modulation frequency to produce an intensity-modulated light beam, the intensity modulation frequency being selected in accordance with a thermal diffusion length in a sample corresponding to a depth in a subsurface of the sample about a characteristic of which information is to be detected; means for focusing the intensity-modulated light beam on the surface of the sample to generate a photoacoustic effect or a photothermal effect at the surface of the sample, thereby producing thermal distortions in the sample; means for detecting the thermal distortions in the sample and producing a thermal distortion signal representative of the thermal distortions in the sample, the thermal distortion signal including a component having a frequency related to the intensity modulation frequency, wherein variations in the intensity modulation frequency produce variations in an amplitude of the component having a frequency related to the intensity modulation frequency; means for compensating for the variations in the amplitude of the component having a frequency related to the intensity modulation frequency such that the amplitude of the component having a frequency related to the intensity modulation frequency is unaffected by the variations in the intensity modulation frequency; and means for extracting from the thermal distortion signal the amplitude of the component having a frequency related to the intensity modulation frequency which is unaffected by the variations in the intensity modulation frequency.

Claim 30

An apparatus according to claim 25, wherein the amplitude of the component having a frequency related to the intensity modulation frequency has a sensitivity characteristic which is a function of the intensity modulation frequency; and wherein the means for compensating for the variations in the amplitude of the component having a frequency related to the intensity modulation frequency includes means for adjusting an intensity of the intensity-modulated light in accordance with the intensity modulation frequency such that the sensitivity characteristic of the amplitude of the component having a frequency related to the intensity modulation frequency is substantially constant at each intensity modulation frequency.

Claim 31

An apparatus according to claim 25, wherein the amplitude of the component having a frequency related to the intensity modulation frequency has a sensitivity characteristic which is a function of the intensity modulation frequency; and wherein the means for compensating for the variations in the amplitude of the component having a frequency related to the intensity modulation frequency includes means for adjusting a level of the thermal distortion signal in accordance with the intensity modulation frequency such that the sensitivity characteristic of the amplitude of the component having a frequency related to the intensity modulation frequency is substantially constant at each intensity modulation frequency.

Claim 32

An apparatus according to claim 25, wherein the means for detecting the thermal distortions in the sample and producing a thermal distortion signal representative of the thermal distortions in the sample includes thermal detecting distortion means for detecting the thermal distortions in the sample, the thermal distortion detecting means having a detection sensitivity characteristic which is a function of the intensity modulation frequency; wherein the thermal distortion signal has a sensitivity characteristic which is a function of the intensity modulation frequency; and wherein the means for compensating for the variations in the amplitude of the component having a frequency related to the intensity modulation frequency includes means for compensating for the detection sensitivity characteristic of the thermal distortion detecting means such that the sensitivity characteristic of the thermal distortion signal is substantially constant at each intensity modulation frequency.

Claim 33

An apparatus according to claim 25, wherein the means for detecting the thermal distortions in the sample and producing a thermal distortion signal representative of the thermal distortions in the sample includes optical interference detecting means for detecting the thermal distortions in the sample on the surface of the sample.

Claim 34

An apparatus according to claim 29, wherein the optical interference detecting means is formed as a confocal optical system for detecting the thermal distortions in the sample on the surface of the sample.

Claim 35

An apparatus according to claim 25, wherein the means for detecting the thermal distortions in the sample and producing a thermal distortion signal representative of the thermal distortions in the sample includes a piezoelectric transducer for detecting the thermal distortions in the sample on the surface of the sample.

Claim 36

An apparatus according to claim 25, wherein the means for focusing the intensity-modulated light beam on the surface of the sample to generate a photoacoustic effect or a photothermal effect at the surface of the sample is formed as a confocal optical system.