US5085080A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Temperature and pressure measuring technique using the photoacoustic effect and mechanical resonance
Assignee: Micron Technology Inc
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Filing: 1990-10-05
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Granted: 1992-02-04
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Expires: 2010-10-05
Abstract
Abstract A method of measuring the temperature of a sample or alternately, the pressure surrounding a sample, consists of using the photoacoustic effect to measure the resonant frequency of the sample. By measuring the resonant frequency of an object, which varies with changes in the temperature of the sample and the pressure surrounding the sample, a greater signal-to-noise ratio is achieved, thereby increasing the accuracy and robustness of the disclosed method over previous methods of measurement using the photoacoustic effect. To determine the desired parameter, the resulting resonant frequency is compared to values on like samples (or on the sample itself) under known environmental conditions.
Inventors
- 👤 Chang Yu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 05:50
CPC Classifications
G; G01; G01K; G01K11/00; G01K11/22; G01K11/26; G01H; G01H13/00; G01L; G01L11/00; G01L11/02; G01L9/00; G01L9/0001; G01L9/0008; G01L9/001; G01L9/0011
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
96 words
A method of measuring a physical aspect of an object using a laser source and an interdigital capacitor, comprising: a) focusing a modulated laser beam on the object; b) measuring the resulting vibration amplitude of the object with said interdigital capacitor; c) determining the resonant frequency of the object by adjusting the modulation frequency of said laser beam until said resulting vibration amplitude of the object is maximized; and d) comparing said resonant frequency to known resonant frequencies calibrated from similar objects with respect to said physical aspect, thereby obtaining a measurement of said physical aspect.
Claim 2
Independent Claim
96 words
A method of measuring a physical aspect of an object using a laser source and an interdigital capacitor, comprising: a) focusing a modulated laser beam on the object; b) measuring the resulting vibration amplitude of the object with said interdigital capacitor; c) determining the resonant frequency of the object by adjusting the modulation frequency of said laser beam until said resulting vibration amplitude of the object is maximized; and d) comparing said resonant frequency to known resonant frequencies calibrated from similar objects with respect to said physical aspect, thereby obtaining a measurement of said physical aspect.
Claim 3
Dependent Claim
24 words
A method of measuring a physical aspect of an object, as recited in claim 1, wherein said laser source is a continuous wave laser.
Claim 4
Dependent Claim
25 words
A method of measuring a physical aspect of an object, as recited in claim 1 or 2 wherein the physical aspect measured is the temperature.
Claim 5
Independent Claim
90 words
A method of measuring an environmental parameter surrounding an object using a laser source and an interdigital capacitor, comprising: a) focusing a modulated laser beam on the object; b) measuring the resulting vibration amplitude of the object; c) determining the resonant frequency of the object by adjusting the modulation frequency of said laser beam until said resulting vibration amplitude of the object is maximized; and d) comparing said resonant frequency to known resonant frequencies calibrated from known environmental parameters from similar objects, thereby obtaining a measurement of said environmental parameter.
Claim 6
Independent Claim
90 words
A method of measuring an environmental parameter surrounding an object using a laser source and an interdigital capacitor, comprising: a) focusing a modulated laser beam on the object; b) measuring the resulting vibration amplitude of the object; c) determining the resonant frequency of the object by adjusting the modulation frequency of said laser beam until said resulting vibration amplitude of the object is maximized; and d) comparing said resonant frequency to known resonant frequencies calibrated from known environmental parameters from similar objects, thereby obtaining a measurement of said environmental parameter.
Claim 7
Dependent Claim
24 words
A method of measuring an environmental parameter surrounding an object, as recited in claim 4, wherein said laser source is a continuous wave laser.
Claim 8
Dependent Claim
25 words
A method of measuring an environmental parameter surrounding an object, as recited in claim 4 or 5, wherein the environmental parameter measured is the pressure.
References Cited (Backward Citations)
US3726129A
Cited
US4448525A
Cited
US4557607A
Cited
US4379226A
Cited
US4529319A
Cited
US4468136A
Cited
US4521118A
Cited
US4683750A
Cited
US4713540A
Cited
US4655608A
Cited
US4806760A
Cited
US4724314A
Cited
FR2636744A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-02-03 | 1995-08-05 | 1996-02-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-02-03 | 1999-08-05 | 2000-02-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-02-03 | 2003-08-05 | 2004-02-04 | $7700.00 | Window Closed / Lapsed |