Patent US5616438A successfully refreshed from Google Patents.
US5616438A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reticle and a method for measuring blind setting accuracy using the same
Assignee: SK Hynix Inc
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Filing: 1995-04-03
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Granted: 1997-04-01
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Expires: 2015-04-03
Abstract
Abstract A method for setting the blind of a stepper comprising the steps of: forming a first pattern which is made on a wafer by said blind, and a second pattern which is made on the wafer by chrome patterns of a reticle; comparing said first pattern with said second pattern; and measuring a setting error of said blind from the difference between said first pattern and second pattern.
Inventors
- 👤 Joon Hwang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 08:30
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/38; G03F1/44; G03F7/00; G03F7/70; G03F7/70058; G03F7/70066; G03F7/70483; G03F7/70605; G03F7/70616; G03F7/70633
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
165 words
A method for measuring the setting error of a blind of a stepper, said blind having a shape, comprising the steps of: providing said blind and a reticle having a linear pattern, said linear pattern having the same shape as is formed by said blind; setting the reticle and the blind to expose a photoresist layer so that one of a first case and a second case occur, said first case occurring when a first pattern formed by the blind and a second pattern formed by the reticle are apparent when the photoresist is developed, said second case occurring when light passing through the blind overexposes the photoresist and the second pattern is not shown the photoresist is developed; observing the photoresist when developed to distinguish which of the first and second cases has occurred and in the first case, measuring the setting error of said blind from any difference in size between said first pattern and said second pattern to obtain blind setting error.
Claim 2
Independent Claim
165 words
A method for measuring the setting error of a blind of a stepper, said blind having a shape, comprising the steps of: providing said blind and a reticle having a linear pattern, said linear pattern having the same shape as is formed by said blind; setting the reticle and the blind to expose a photoresist layer so that one of a first case and a second case occur, said first case occurring when a first pattern formed by the blind and a second pattern formed by the reticle are apparent when the photoresist is developed, said second case occurring when light passing through the blind overexposes the photoresist and the second pattern is not shown the photoresist is developed; observing the photoresist when developed to distinguish which of the first and second cases has occurred and in the first case, measuring the setting error of said blind from any difference in size between said first pattern and said second pattern to obtain blind setting error.
Claim 3
Dependent Claim
15 words
The method in accordance with claim 1, wherein said linear pattern has a square shape.
Claim 4
Dependent Claim
22 words
The method in accordance with claim 1, wherein said linear pattern of said reticle has width of 10 μm to 200 μm.
Claim 5
Independent Claim
170 words
A method for measuring the setting error of a blind of a stepper, said blind having a shape, comprising the steps of: providing said blind and a reticle having a plurality of linear patterns, said linear patterns having the same shape as is formed by said blind; setting the reticle and the blind to expose a photoresist layer so that one of a first case and a second case occur, said first case occurring when a first pattern formed by the blind and second patterns formed by the reticle are apparent when light passing photoresist is developed, said second case occurring when light passing through the blind overexposes the photoresist and the second patterns are not shown when the photoresist is developed; observing the photoresist when developed to distinguish which of the first and second cases has occurred and in the first case, measuring the setting error of said blind from any difference in size between said first pattern and one of said second patterns to obtain blind setting error.
Claim 6
Independent Claim
170 words
A method for measuring the setting error of a blind of a stepper, said blind having a shape, comprising the steps of: providing said blind and a reticle having a plurality of linear patterns, said linear patterns having the same shape as is formed by said blind; setting the reticle and the blind to expose a photoresist layer so that one of a first case and a second case occur, said first case occurring when a first pattern formed by the blind and second patterns formed by the reticle are apparent when light passing photoresist is developed, said second case occurring when light passing through the blind overexposes the photoresist and the second patterns are not shown when the photoresist is developed; observing the photoresist when developed to distinguish which of the first and second cases has occurred and in the first case, measuring the setting error of said blind from any difference in size between said first pattern and one of said second patterns to obtain blind setting error.
Claim 7
Dependent Claim
15 words
The method in accordance with claim 4, wherein said linear patterns have a square shape.
Claim 8
Dependent Claim
20 words
The method in accordance with claim 4, wherein said linear patterns have a width of 10 μm to 200 μm.
References Cited (Backward Citations)
US5444538A
Cited
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2000-03-31 | 2000-09-30 | 2001-04-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-31 | 2004-09-30 | 2005-04-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-31 | 2008-09-30 | 2009-04-01 | $7700.00 | Window Closed / Lapsed |