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US5615224A
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US
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Apparatus and method for stabilization of the bandgap and associated properties of semiconductor electronic and optoelectronic devices
Assignee: University of California
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Filing: 1995-01-04
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Granted: 1997-03-25
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Expires: 2015-01-04
Abstract
Abstract A structure for stabilizing the wavelength and output power of uncooled diode semiconductor lasers using stress caused by differential expansion to counteract the effects of temperature fluctuation is realized by restraining the thermal expansion of the active region. The thermal expansion is restrained first by encapsulating the active region of the laser within a low expansion cap, and second, by applying stress to the active region by means of a high thermal expansion stress element mechanically coupled to the active region and restrained within the low expansion cap. As the temperature of the laser increases and it would normally attempt to expand, the stress element expands to even a greater degree with the combination of the active region and stress element both being contained within the low thermal expansion cap. The result is that physical thermal expansion of the active region is substantially eliminated or reduced and it operates under higher internal pressure. The structure for counteracting the effects of thermal expansion in active regions is applicable not only to lasers but all optoelectronic devices, to semiconductor devices, and in general, to any device having a energy band gap or any other parameter of operation dependant on thermal expansion.
Inventors
- 👤 Daniel A. Cohen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 22:20
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/02; H01S5/06; H01S5/0607; H01S5/068; H01S5/0206; H01S5/0215; H01S5/024; H01S5/02469; H01S5/20; H01S5/22; H01S5/2205; H01S5/2213; H01S5/223; H01S5/2231; H01S5/227; H01S5/2275
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
77 words
An improvement in a semiconductor device having an active region whose operational parameters are temperature-dependent as a function of a coefficient of thermal expansion of materials from which said semiconductor device is composed, said improvement comprises: a restraining structure mechanically coupled to said active region of said semiconductor device, which restraining structure confines thermal expansion of said active region in at least one direction, whereby operational variation due to temperature dependence of said active region is reduced.
Claim 2
Dependent Claim
77 words
An improvement in a semiconductor device having an active region whose operational parameters are temperature-dependent as a function of a coefficient of thermal expansion of materials from which said semiconductor device is composed, said improvement comprises: a restraining structure mechanically coupled to said active region of said semiconductor device, which restraining structure confines thermal expansion of said active region in at least one direction, whereby operational variation due to temperature dependence of said active region is reduced.
Claim 3
Dependent Claim
50 words
The improvement of claim 1 further comprising an expansion member mechanically coupled to said active region and to said restraining structure, said expansion member applies stress to said active region in said at least one direction and is restrained by said restraining structure opposite to said at least one direction.
Claim 4
Dependent Claim
26 words
The improvement of claim 1 wherein said restraining structure has a coefficient of thermal expansion less than the coefficient of thermal expansion of said active region.
Claim 5
Dependent Claim
26 words
The improvement of claim 2 wherein said restraining structure has a coefficient of thermal expansion less than the coefficient of thermal expansion of said active region.
Claim 6
Dependent Claim
20 words
The improvement of claim 4 wherein said expansion member has a coefficient of thermal expansion greater than said active region.
Claim 7
Dependent Claim
26 words
The improvement of claim 2 wherein said restraining structure has a coefficient of thermal expansion less than the coefficient of thermal expansion of said expansion member.
Claim 8
Dependent Claim
21 words
The improvement of claim 1 wherein said restraining structure restrains thermal expansion of said active region in a plurality of directions.
Claim 9
Dependent Claim
20 words
The improvement of claim 2 wherein said expansion member applies stress to said active region in a plurality of directions.
Claim 10
Dependent Claim
21 words
The improvement of claim 8 wherein said restraining structure restrains thermal expansion of said active region in a plurality of directions.
Claim 11
Dependent Claim
31 words
The improvement of claim 9 wherein said restraining structure and expansion member provide an approximately hydrostatic restraining pressure and said expansion member provides an approximately hydrostatic pressure on said active region.
Claim 12
Dependent Claim
19 words
The improvement of claim 1 wherein said restraining structure provides an approximately hydrostatic restraining pressure on said active region.
Claim 13
Dependent Claim
30 words
The improvement of claim 1 wherein said restraining structure is disposed adjacent to and is directly or indirectly in mechanical contact with said active region on at least three sides.
Claim 14
Dependent Claim
30 words
The improvement of claim 1 wherein said expansion member is disposed adjacent to and is directly or indirectly in mechanical contact with said active region on at least three sides.
Claim 15
Dependent Claim
30 words
The improvement of claim 12 wherein said expansion member is disposed adjacent to and is directly or indirectly in mechanical contact with said active region on at least three sides.
Claim 16
Dependent Claim
73 words
The improvement of claim 1 wherein said semiconductor device is disposed within a substrate and said active region is disposed within a mesa defined on said substrate, said restraining structure comprising a cap disposed about said mesa, said cap having a substantially lower coefficient of thermal expansion than said mesa, said cap being mechanically coupled to and adjacent to at least three sides of said mesa to restrain thermal expansion of said mesa.
Claim 17
Dependent Claim
108 words
The improvement of claim 2 wherein said semiconductor device is disposed within a substrate having a mesa, and said active region is disposed within said mesa, said restraining structure comprising a cap disposed about said mesa, said expansion member disposed on and mechanically coupled to said mesa, said expansion member being disposed within said cap and restrained thereby, said expansion member having a substantially greater coefficient of thermal expansion than said mesa, said restraining structure having a coefficient of thermal expansion substantially lower than said expansion member so that said expansion member applies stress to said mesa in response to temperature increases of said mesa and expansion member.
Claim 18
Dependent Claim
43 words
The improvement of claim 16 wherein said restraining structure is comprised of silicon dioxide or material having similar or smaller thermal coefficients of expansion, and wherein said expansion member is comprised of gold or material having similar or greater thermal coefficients of expansion.
Claim 19
Dependent Claim
13 words
The improvement of claim 1 wherein said semiconductor device is an optoelectronic device.
Claim 20
Dependent Claim
14 words
The improvement of claim 1 wherein said semiconductor device is a semiconductor electrical device.
Claim 21
Dependent Claim
59 words
The improvement of claim 16 wherein said mesa has a first predetermined dimension in a predetermined direction and wherein said expansion member has second predetermined dimension in said predetermined direction, said second dimension of said expansion member being greater than said first dimension of said mesa so that stress exerted by said expansion member on said mesa is increased.
Claim 22
Dependent Claim
36 words
The improvement of claim 15 wherein said mesa is dovetail shaped in a least one cross section so that stress applied to said mesa tends to be hydrostatically applied to said active region within said mesa.
Claim 23
Dependent Claim
37 words
The improvement of claim 16 wherein said mesa is dovetail shaped in a least one cross section so that stress applied to said mesa is tends to be hydrostatically applied to said active region within said mesa.
References Cited (Backward Citations)
US3303432A
Cited
US5422901A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-03-24 | 2000-09-23 | 2001-03-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-24 | 2004-09-23 | 2005-03-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-24 | 2008-09-23 | 2009-03-25 | $7700.00 | Window Closed / Lapsed |