US5614435A
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Quantum dot fabrication process using strained epitaxial growth
Assignee: University of California
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Filing: 1994-10-27
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Granted: 1997-03-25
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Expires: 2014-10-27
Abstract
Abstract A process for production of self-assembled quantum dots is described which does not entail any processing steps before or after growth of the quantum dots. The process uses in situ formation of three dimensional islands which occurs during epitaxy of material with a different lattice parameter than the substrate. Further deposition of the substrate material then produces single or multiple buried two dimensional layers of randomly distributed or selectively positioned and substantially uniform sized quantum dots. These layers are free of defects and interface states. The lateral dot diameters vary between 140 to 300 Angstroms by appropriate choice of deposition parameters.
Inventors
- 👤 Pierre Petroff
- 👤 Devin Leonard
- 👤 Mohan Krishnamurthy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 21:37
CPC Classifications
B; B82; B82Y; B82Y30/00; H; H10; H10P; H10P14/00; H10P14/20; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3421; B82Y10/00; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2911; Y; Y10; Y10S; Y10S438/00; Y10S438/962
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
98 words
A method of forming quantum dots comprising: deposing a material having a first lattice spacing on a substrate having a second unequal lattice spacing to produce self-assembled quantum dots; continuously observing surface texture of said first material as it is being disposed on said substrate; and immediately terminating deposition of said first material on said substrate as soon as a predetermined number of said self-assembled quantum dots form as determined by observation of said surface texture during deposition of said first material, whereby a plurality of quantum dots of predetermined size and density are controllably and reliably fabricated.
Claim 2
Independent Claim
98 words
A method of forming quantum dots comprising: deposing a material having a first lattice spacing on a substrate having a second unequal lattice spacing to produce self-assembled quantum dots; continuously observing surface texture of said first material as it is being disposed on said substrate; and immediately terminating deposition of said first material on said substrate as soon as a predetermined number of said self-assembled quantum dots form as determined by observation of said surface texture during deposition of said first material, whereby a plurality of quantum dots of predetermined size and density are controllably and reliably fabricated.
Claim 3
Dependent Claim
37 words
The method of claim 1 where observing said surface texture of said first material comprises exposing said surface of said first material to high energy electrons and detecting a reflection high energy electron diffraction pattern produced therefrom.
Claim 4
Dependent Claim
36 words
The method of claim 1 where deposition of said first material on said substrate comprises cycles of disposing a fractional monolayer of said first material followed by a no growth pause of a predetermined time period.
Claim 5
Dependent Claim
27 words
The method of claim 3 where deposition of said fractional monolayer of said first material is at a rate of the order of 0.1 monolayer per second.
Claim 6
Dependent Claim
17 words
The, method of claim 4 where said no growth pause has a period of approximately three seconds.
Claim 7
Dependent Claim
24 words
The method of claim 1 further comprising deposing a capping layer on said self-assembled quantum dots composed of a second material on said substrate.
Claim 8
Dependent Claim
32 words
The method of claim 1 where deposing said first material on said substrate deposes said first material having a greater lattice spacing than said substrate thereby placing said first material under compression.
Claim 9
Independent Claim
129 words
A method of forming quantum dots comprising: deposing a first material havings a first lattice spacing on a substrate having a second unequal lattice spacing to produce self-assembled quantum dots, where deposing said first material on said substrate deposes a first material having a lattice spacing less than said lattice spacing of said substrate thereby placing said first material under tension; continuously observing surface texture of said first material as it is being deposed on said substrate; and immediately terminating deposition of said first material on said substrate as soon as a predetermined number of self-assembled quantum dots form as determined by observation of said surface texture during deposition of said first material, whereby a plurality of quantum dots of predetermined size and density are controllably and reliably fabricated.
Claim 10
Independent Claim
129 words
A method of forming quantum dots comprising: deposing a first material havings a first lattice spacing on a substrate having a second unequal lattice spacing to produce self-assembled quantum dots, where deposing said first material on said substrate deposes a first material having a lattice spacing less than said lattice spacing of said substrate thereby placing said first material under tension; continuously observing surface texture of said first material as it is being deposed on said substrate; and immediately terminating deposition of said first material on said substrate as soon as a predetermined number of self-assembled quantum dots form as determined by observation of said surface texture during deposition of said first material, whereby a plurality of quantum dots of predetermined size and density are controllably and reliably fabricated.
Claim 11
Dependent Claim
25 words
The method of claim 1 wherein deposing said first material on said substrate deposes InAs on a GaAs substrate thereby forming InGaAs self-assembled quantum dots.
Claim 12
Dependent Claim
29 words
The method of claim 1 wherein deposing said first material on said substrate deposes InAIAs as said first material on an AlGaAs substrate thereby forming InAIAs self-assembled quantum dots.
Claim 13
Dependent Claim
18 words
The method of claim 1 where deposing said first material on said substrate is by moleuclar beam epitaxy.
Claim 14
Dependent Claim
20 words
The method of claim 1 where deposing said first material on said substrate is by metal organic chemical vapor deposition.
Claim 15
Dependent Claim
18 words
The method of claim 1 where deposing said first material on said substrate is by vapor phase epitaxy.
Claim 16
Dependent Claim
18 words
The method of claim 1 where deposing said first material on said substrate is by chemical beam epitaxy.
Claim 17
Dependent Claim
20 words
The method of claim 1 where deposing said first material on said substrate is by gas source molecular beam epitaxy.
Claim 18
Dependent Claim
24 words
The method of claim 1 where deposing said first material on said substrate deposes semiconductors from Groups llla and Va of the periodic table.
Claim 19
Independent Claim
117 words
A method of forming quantum dots comprising: deposing a first material having a first lattice spacing on a substrate having a second unequal lattice spacing to produce self-assembled quantum dots. where deposing said first material on said substrate deposes semiconductors from Groups IIb and VIa of the periodic table; continuously observing surface texture of said first material as it is being deposed on said substrate; and immediately terminating deposition of said first material on said substrate as soon as a predetermined number of self-assembled quantum dots form as determined by observation of said surface texture during deposition of said first material, whereby a plurality of quantum dots of predetermined size anti density are controllably and reliably fabricated.
Claim 20
Independent Claim
117 words
A method of forming quantum dots comprising: deposing a first material having a first lattice spacing on a substrate having a second unequal lattice spacing to produce self-assembled quantum dots. where deposing said first material on said substrate deposes semiconductors from Groups IIb and VIa of the periodic table; continuously observing surface texture of said first material as it is being deposed on said substrate; and immediately terminating deposition of said first material on said substrate as soon as a predetermined number of self-assembled quantum dots form as determined by observation of said surface texture during deposition of said first material, whereby a plurality of quantum dots of predetermined size anti density are controllably and reliably fabricated.
Claim 21
Independent Claim
118 words
A method of forming quantum dots comprising: deposing a first material having a first lattice spacing on a substrate having a second unequal lattice spacing to produce self-assembled quantum dots, where deposing said first material on said substrate deposes semiconductors from different elements from Group IVa of the periodic table; continuously observing surface texture of said first material as it is being deposed on said substrate; and immediately terminating deposition of said first material on said substrate as soon as a predetermined number of self-assembled quantum dots form as determined by observation of said surface texture during deposition of said first material, whereby a plurality of quantum dots of predetermined size and density are controllably and reliably fabricated.
Claim 22
Independent Claim
118 words
A method of forming quantum dots comprising: deposing a first material having a first lattice spacing on a substrate having a second unequal lattice spacing to produce self-assembled quantum dots, where deposing said first material on said substrate deposes semiconductors from different elements from Group IVa of the periodic table; continuously observing surface texture of said first material as it is being deposed on said substrate; and immediately terminating deposition of said first material on said substrate as soon as a predetermined number of self-assembled quantum dots form as determined by observation of said surface texture during deposition of said first material, whereby a plurality of quantum dots of predetermined size and density are controllably and reliably fabricated.
Claim 23
Independent Claim
120 words
A method of forming quantum dots comprising: deposing a first material having a a first lattice spacing on a substrate having a second unequal lattice spacing to produce self-assembled quantum dots, where deposing said first material on said substrate deposes semiconductors from consecutively grown epitaxial metals and oxides with a lattice mismatch; continuously observing surface texture of said first material as it is being deposed on said substrate; and immediately terminating deposition of said first material on said substrate as soon as a predetermined number of self-assembled quantum dots form as determined by observation of said surface texture during deposition of said flint material, whereby a plurality of quantum dots of predetermined size and density are controllably and reliably fabricated.
Claim 24
Independent Claim
120 words
A method of forming quantum dots comprising: deposing a first material having a a first lattice spacing on a substrate having a second unequal lattice spacing to produce self-assembled quantum dots, where deposing said first material on said substrate deposes semiconductors from consecutively grown epitaxial metals and oxides with a lattice mismatch; continuously observing surface texture of said first material as it is being deposed on said substrate; and immediately terminating deposition of said first material on said substrate as soon as a predetermined number of self-assembled quantum dots form as determined by observation of said surface texture during deposition of said flint material, whereby a plurality of quantum dots of predetermined size and density are controllably and reliably fabricated.
Claim 25
Dependent Claim
42 words
The method of claim 1 further comprising forming selected regions of preferred nucleation for said self-assembled quantum dots on said substrate prior to deposing said first material on said substrate to align said self-assembled quantum dots in a predetermined two dimensional pattern.
Claim 26
Dependent Claim
22 words
The method of claim 20 wherein said selected regions of preferred nucleation are formed by locally modulating surface orientation of said substrate.
Claim 27
Dependent Claim
48 words
The method of claim 21 wherein said substrate has a primary surface upon which said first material is directed, and wherein locally modulating the surface orientation of said substrate comprises forming facets in said substrate inclined at an angle with respect to said primary surface of said substrate.
Claim 28
Dependent Claim
21 words
The method of claim 20 where forming said selected regions of preferred nucleation comprises locally modulating surface strain of said substrate.
Claim 29
Independent Claim
201 words
A method of forming quantum dots comprising: deposing a first material having a first lattice spacing on a substrate having a second unequal lattice spacing to produce self-assemble quantum dots; forming selected regions of preferred nucleation for said self-assembled quantum dots on said substrate prior to deposing said first material on said substrate to alien said self-assembled quantum dots in a predetermined two dimensional pattern, where forming said selected regions of preferred nucleation comprises locally modulating surface strain of said substrate, and where said substrate has a primary surface upon which said self-assembled quantum dots are formed and where locally modulating surface strain of said substrate comprises selectively forming a third material having a lattice mismatch with said second material of said substrate selectively underlying surface portions of said primary surface of said substrate; continuously observing surface texture of said first material as it is being deposed on said substrate; and immediately termination deposition of said first material on said substrate as soon as a predetermined number self-assembled quantum dots form as determined by observation of said surface texture during deposition of said first material, whereby a plurality of quantum dots of predetermined size and density are controllably and reliably fabricated.
Claim 30
Independent Claim
201 words
A method of forming quantum dots comprising: deposing a first material having a first lattice spacing on a substrate having a second unequal lattice spacing to produce self-assemble quantum dots; forming selected regions of preferred nucleation for said self-assembled quantum dots on said substrate prior to deposing said first material on said substrate to alien said self-assembled quantum dots in a predetermined two dimensional pattern, where forming said selected regions of preferred nucleation comprises locally modulating surface strain of said substrate, and where said substrate has a primary surface upon which said self-assembled quantum dots are formed and where locally modulating surface strain of said substrate comprises selectively forming a third material having a lattice mismatch with said second material of said substrate selectively underlying surface portions of said primary surface of said substrate; continuously observing surface texture of said first material as it is being deposed on said substrate; and immediately termination deposition of said first material on said substrate as soon as a predetermined number self-assembled quantum dots form as determined by observation of said surface texture during deposition of said first material, whereby a plurality of quantum dots of predetermined size and density are controllably and reliably fabricated.
Claim 31
Independent Claim
173 words
A method of forming quantum dots comprising: deposing a first material having a first lattice spacing on a substrate having a second unequal lattice spacing to produce self-assembled quantum dots; forming selected regions of preferred nucleation for said self-assembled quantum dots on said substrate odor to deposing said first material on said substrate to align said self-assembled quantum dots in a predetermined two dimensional pattern, where said substrate has a primary surface onto which said first material of said self-assembled quantum dots is formed and where forming selected regions of preferred nucleation comprises providing a fluctuating material composition in said primary surface of said substrate; continuously observing surface texture of said first material as it is being deposed on said substrate; and immediately terminating deposition of said first material on said substrate as soon as a predetermined number of self-assembled quantum dots form as determined by observation of said surface texture during deposit of said first material, whereby a plurality of quantum dots of predetermined size and density are controllably and reliably fabricated.
Claim 32
Independent Claim
173 words
A method of forming quantum dots comprising: deposing a first material having a first lattice spacing on a substrate having a second unequal lattice spacing to produce self-assembled quantum dots; forming selected regions of preferred nucleation for said self-assembled quantum dots on said substrate odor to deposing said first material on said substrate to align said self-assembled quantum dots in a predetermined two dimensional pattern, where said substrate has a primary surface onto which said first material of said self-assembled quantum dots is formed and where forming selected regions of preferred nucleation comprises providing a fluctuating material composition in said primary surface of said substrate; continuously observing surface texture of said first material as it is being deposed on said substrate; and immediately terminating deposition of said first material on said substrate as soon as a predetermined number of self-assembled quantum dots form as determined by observation of said surface texture during deposit of said first material, whereby a plurality of quantum dots of predetermined size and density are controllably and reliably fabricated.
Claim 33
Dependent Claim
59 words
The method of claim 25 where providing said fluctuating material composition in said primary surface of said substrate comprises defining a lateral superlattice into said primary surface of said substrate, said superlattice having two distinct regions, a first region having a lattice mismatch with said first material and said second region being substantially lattice matched with said first material.
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