US5614071A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering shield
Assignee: B&H Manufacturing Co Inc
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Filing: 1995-06-28
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Granted: 1997-03-25
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Expires: 2015-06-28
Abstract
Abstract A shield for use in a sputtering system. The shield includes a support having an inner expanse defining a two-dimensional array of cavities. The cavities are formed of two-dimensionally concave wall surfaces, where the intersections of the wall surfaces of adjacent cavities form a two-dimensional array of edges on the expanse. The shield minimizes the tendency of material deposited on the shield surface, such as sputtered carbon material, from flaking off during a sputtering operation. Also disclosed is a sputtering assembly that employs the shield.
Inventors
- 👤 Nader Mahvan
- 👤 David Wilkinson
- 👤 Koji Ichikawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:30
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32798; H01J37/32853; H01J37/32871; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/56; C23C14/564; H01J37/34; H01J37/3411; H01J37/3441; H01J37/3447; H01J2237/00; H01J2237/02; H01J2237/022
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
57 words
A sputtering apparatus shield for capturing sputtered material said shield comprising a support having an inner expanse adapted to capture such sputtered material, said expanse defining a two-dimensional array of cavities, each formed of two-dimensionally concave wall surfaces, where the intersections of the wall surfaces of adjacent cavities form a two-dimensional array of edges on the expanse.
Claim 2
Dependent Claim
57 words
A sputtering apparatus shield for capturing sputtered material said shield comprising a support having an inner expanse adapted to capture such sputtered material, said expanse defining a two-dimensional array of cavities, each formed of two-dimensionally concave wall surfaces, where the intersections of the wall surfaces of adjacent cavities form a two-dimensional array of edges on the expanse.
Claim 3
Dependent Claim
17 words
The shield of claim 1, wherein the support is an annular support defining an annular inner expanse.
Claim 4
Dependent Claim
15 words
The shield of claim 1, wherein the support defines one or more substantially planar expanses.
Claim 5
Dependent Claim
19 words
The shield of claim 1, wherein the wall expanse of the support defines a honeycomb array of such cavities.
Claim 6
Dependent Claim
27 words
The shield of claim 1, wherein said array increases the surface area of the expanse at least about 50% over a smooth-surfaced expanse having the same dimensions.
Claim 7
Dependent Claim
104 words
A sputter-gun assembly for use in sputtering a deposition material from a target, onto a substrate, comprising a sputter gun adapted to hold the target adjacent a plane occupied by the substrate, in operative conditions, and disposed between the target and such substrate plane, a shield for capturing sputtered material not deposited on the substrate, said shield including a support having an inner expanse adapted to capture such sputtered material, said expanse defining a two-dimensional array of cavities, each formed of two-dimensionally concave wall surfaces, where the intersections of the wall surfaces of adjacent cavities form a two-dimensional array of edges on the expanse.
Claim 8
Dependent Claim
104 words
A sputter-gun assembly for use in sputtering a deposition material from a target, onto a substrate, comprising a sputter gun adapted to hold the target adjacent a plane occupied by the substrate, in operative conditions, and disposed between the target and such substrate plane, a shield for capturing sputtered material not deposited on the substrate, said shield including a support having an inner expanse adapted to capture such sputtered material, said expanse defining a two-dimensional array of cavities, each formed of two-dimensionally concave wall surfaces, where the intersections of the wall surfaces of adjacent cavities form a two-dimensional array of edges on the expanse.
Claim 9
Dependent Claim
17 words
The apparatus of claim 6, wherein the support is an annular support defining an annular inner expanse.
Claim 10
Dependent Claim
27 words
The apparatus of claim 7, wherein said array increases the surface area of the expanse at least about 75% over a smooth-surfaced expanse having the same dimensions.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-03-24 | 2000-09-23 | 2001-03-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-24 | 2004-09-23 | 2005-03-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-24 | 2008-09-23 | 2009-03-25 | $7700.00 | Window Closed / Lapsed |