US5605576A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High frequency magnetron plasma apparatus
Assignee: Alps Alpine Co Ltd
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Filing: 1994-11-09
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Granted: 1997-02-25
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Expires: 2014-11-09
Abstract
Abstract An object of the present invention is to increase the energy efficiency of a plasma apparatus and provide a high-frequency magnetron plasma apparatus which can precisely control plasma. The plasma apparatus has a susceptor electrode, a plasma exciting electrode, magnets mounted on the plasma exciting electrode, and a magnetic shield provided around the plasma exciting electrode, all of which are arranged in a vacuum chamber. The magnetic shield has a high impedance for a high frequency. The magnetic shield is preferably earthed with a direct current, more preferably earthed through an inductance.
Inventors
- 👤 Makoto Sasaki
- 👤 Hirofumi Fukui
- 👤 Masami Aihara
- 👤 Tadahiro Ohmi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:14
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3441; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; C23C16/00; C23C16/44; C23C16/50; C23C16/505; C23C16/509; H01J37/3402; H01J37/3405
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
58 words
A high-frequency magnetron plasma apparatus comprising a susceptor electrode, a plasma exciting electrode, magnets mounted on said plasma exciting electrodes, and a magnetic shield formed from a high-permeability material disposed around said plasma exciting electrode, all of which are arranged in a vacuum chamber, wherein said magnetic shield has a high impedance relative to earth at high frequencies.
Claim 2
Dependent Claim
58 words
A high-frequency magnetron plasma apparatus comprising a susceptor electrode, a plasma exciting electrode, magnets mounted on said plasma exciting electrodes, and a magnetic shield formed from a high-permeability material disposed around said plasma exciting electrode, all of which are arranged in a vacuum chamber, wherein said magnetic shield has a high impedance relative to earth at high frequencies.
Claim 3
Dependent Claim
19 words
A high-frequency magnetron plasma apparatus according to claim 1, wherein said magnetic shield is earthed with a direct current.
Claim 4
Dependent Claim
62 words
A high frequency magnetron plasma apparatus comprising a susceptor electrode, a plasma exciting electrode, magnets mounted on said plasma exciting electrodes, and a magnetic shield disposed around said plasma exciting electrode, all of which are arranged in a vacuum chamber, wherein said magnetic shield has a high impedance for a high frequency, and wherein said magnetic shield is earthed through an inductance.
Claim 5
Dependent Claim
62 words
A high frequency magnetron plasma apparatus comprising a susceptor electrode, a plasma exciting electrode, magnets mounted on said plasma exciting electrodes, and a magnetic shield disposed around said plasma exciting electrode, all of which are arranged in a vacuum chamber, wherein said magnetic shield has a high impedance for a high frequency, and wherein said magnetic shield is earthed through an inductance.
Claim 6
Dependent Claim
26 words
A high-frequency magnetron plasma apparatus according to claim 1, wherein said magnetic shield includes a cylindrical magnetic shield plate having at least one notch formed therein.
Claim 7
Dependent Claim
17 words
A high-frequency magnetron plasma apparatus according to claim 1, wherein said magnetic shield has a meshed structure.
Claim 8
Dependent Claim
18 words
A high-frequency magnetron plasma apparatus according to claim 1, wherein said magnetic shield is earthed through a coil.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-25 | 2000-08-26 | 2001-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-25 | 2004-08-26 | 2005-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-25 | 2008-08-26 | 2009-02-25 | $7700.00 | Window Closed / Lapsed |