US5397448A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for generating a plasma by means of cathode sputtering and microwave-irradiation
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1993-08-17
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Granted: 1995-03-14
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Expires: 2013-08-17
Abstract
Abstract The invention relates to a device for generating a plasma by means of cathode sputtering and microwave irradiation. This device comprises a magnetron cathode over which is placed a microwave cavity resonator at the atmosphere side. At the vacuum side the device comprises laterally delimiting shielding sheets which on their inside are provided with a magnet which generates a magnetic field perpendicular to the surface of the target of the magnetron cathode.
Inventors
- 👤 Roland Gesche
- 👤 Rudolf Latz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:26
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/3266; H01J37/32669; H01J37/32009; H01J37/32192; H01J37/32211; H01J37/32229; H01J37/32623; H01J37/32651; H01J37/34; H01J37/3402; H01J37/3405; H01J37/3411; H01J37/345; H01J37/3452; H01J37/3461
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
104 words
A device for generating a plasma by means of cathode sputtering and microwave irradiation, comprising a) a plasma chamber; b) a sputtering target in the plasma chamber connected via an electrode to a power supply; c) a magnetron magnet structure positioned behind the sputtering target whose magnetic field exits from the target and again enters it; d) a microwave transmitter which transmits microwaves via a waveguide into the region in front of the target, whereat parallel shielding sheets are provided opposite the target surface; and e) a magnet provided on the shielding sheets for generating a field which extends essentially perpendicular to the target.
Claim 2
Independent Claim
104 words
A device for generating a plasma by means of cathode sputtering and microwave irradiation, comprising a) a plasma chamber; b) a sputtering target in the plasma chamber connected via an electrode to a power supply; c) a magnetron magnet structure positioned behind the sputtering target whose magnetic field exits from the target and again enters it; d) a microwave transmitter which transmits microwaves via a waveguide into the region in front of the target, whereat parallel shielding sheets are provided opposite the target surface; and e) a magnet provided on the shielding sheets for generating a field which extends essentially perpendicular to the target.
Claim 3
Dependent Claim
25 words
A device as in claim 1, wherein the magnet is an electromagnet comprising a coil wound around the inner space defined by said shielding sheets.
Claim 4
Dependent Claim
13 words
A device as in claim 1, wherein the magnet is a dc magnet.
Claim 5
Dependent Claim
13 words
A device as in claim 1, wherein the magnet is an ac magnet.
Claim 6
Dependent Claim
35 words
A device as in claim 1, wherein the plasma chamber is disposed in a housing on whose outside is disposed the waveguide connected with the plasma volume via microwave-permeable seals and at least one gap.
Claim 7
Dependent Claim
17 words
A device as in claim 5, wherein the seals comprise Teflon elements each with a sealing ring.
Claim 8
Dependent Claim
15 words
A device as in claim 6, wherein the Teflon elements function as a lower resonator.
Claim 9
Dependent Claim
26 words
A device as in claim 1, wherein the shielding sheets comprise integrated gas feed lines which comprise a plurality of holes directed into the plasma volume.
Claim 10
Dependent Claim
18 words
A device as in claim 1, wherein the shielding sheets comprise gas feed lines surrounded by shield angles.
References Cited (Backward Citations)
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US5230784A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-03-13 | 1998-09-12 | 1999-03-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-03-13 | 2002-09-12 | 2003-03-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-03-13 | 2006-09-12 | 2007-03-14 | $7700.00 | Window Closed / Lapsed |