US5604443A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Probe test apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1995-05-23
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Granted: 1997-02-18
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Expires: 2015-05-23
Abstract
Abstract A probe test apparatus comprising a test section for testing a wafer, a cassette having an opening at one side through which the wafer is taken into and out of the cassette, grooves formed in inner faces of both sides of the cassette to hold wafers therein, and a convex member projected downward from the underside of the cassette, a stage on which the cassette is mounted keeping the wafers therein substantially horizontal, and holder members projected upward from the top of the cassette-mounted stage and having a recess into which the convex member of the cassette falls, wherein when the convex member is not fitted into the recess but contacted with the holder members, the wafers in the cassette are tilted and when it is fitted into the recess, they can be kept substantially horizontal in the cassette to thereby position the cassette relative to the test section.
Inventors
- 👤 Yoshisuke Kitamura
- 👤 Munetoshi Nagasaka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 20:43
CPC Classifications
G; G01; G01R; G01R1/00; G01R31/00; G01R31/28; G01R31/282; G01R31/2831; G01R31/2851; G01R31/2886; G01R31/2887; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137; Y10S414/14
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
198 words
A probe test apparatus comprising: a test section for testing a substrate; a cassette having an opening at one side through which the substrate is taken into and out of the cassette, grooves formed in inner faces of both sides of the cassette to hold substrates therein, and a convex portion projected downward from an underside of the cassette; a stage on which the cassette is mounted keeping the substrates therein substantially horizontal; and holder means having plural projection members projecting upward from a top of the cassette-mounted stage and forming a recess into which the convex portion of the cassette falls, each of said projection members having a curved smooth guide top and extending such that, when the cassette is moved along the projection members while keeping said convex portion in contact with said guide top, the convex portion of the cassette falls in said recess, wherein when the convex portion is not fitted into the recess but contacted with the projection members, substrates in the cassette are tilted, and when the convex portion falls in the recess, the substrates are kept substantially horizontal in the cassette to thereby position the cassette relative to the test section.
Claim 2
Dependent Claim
198 words
A probe test apparatus comprising: a test section for testing a substrate; a cassette having an opening at one side through which the substrate is taken into and out of the cassette, grooves formed in inner faces of both sides of the cassette to hold substrates therein, and a convex portion projected downward from an underside of the cassette; a stage on which the cassette is mounted keeping the substrates therein substantially horizontal; and holder means having plural projection members projecting upward from a top of the cassette-mounted stage and forming a recess into which the convex portion of the cassette falls, each of said projection members having a curved smooth guide top and extending such that, when the cassette is moved along the projection members while keeping said convex portion in contact with said guide top, the convex portion of the cassette falls in said recess, wherein when the convex portion is not fitted into the recess but contacted with the projection members, substrates in the cassette are tilted, and when the convex portion falls in the recess, the substrates are kept substantially horizontal in the cassette to thereby position the cassette relative to the test section.
Claim 3
Dependent Claim
40 words
The probe test apparatus according to claim 1, wherein the projection member extends on the center line of the cassette-mounted stage, when viewed in the width direction of the stage, and along a direction in which the cassette is moved.
Claim 4
Dependent Claim
25 words
The probe test apparatus according to claim 1, further comprising means for tilting the cassette-mounted stage to tilt the opening of the mounted cassette upward.
Claim 5
Dependent Claim
23 words
The probe test apparatus according to claim 1, wherein the cassette has legs for supporting it and the legs include the convex portion.
Claim 6
Dependent Claim
16 words
The probe test apparatus according to claim 1, wherein the projection member has a round top.
Claim 7
Dependent Claim
26 words
The probe test apparatus according to claim 1, wherein each of the convex portions extends from an end to the other opposite end of the cassette.
Claim 8
Dependent Claim
39 words
The probe test apparatus according to claim 1, wherein the holder plural projection members includes first and second members arranged in series and separated from each other and the recess is formed between the first and the second member.
Claim 9
Dependent Claim
41 words
The probe test apparatus according to claim 7, wherein the convex portions are three parallel rectangular rods and an interval L 2 between adjacent ones is made longer than a length L 1 of each of the first and second members.
Claim 10
Dependent Claim
102 words
A probe test apparatus comprising: a test section for testing a substrate; load means for taking the substrate, which is to be tested, out of a cassette; a sensor having an optical axis crossing a space through which the substrate taken out by the load means passes; calculating means for calculating the size of the substrate responsive to light detection signal applied from the sensor; alignment means for positioning the substrate relative to the test section on the basis of the substrate size calculated; and unload means for returning the substrate, which has been tested, from the test section into the cassette.
Claim 11
Dependent Claim
102 words
A probe test apparatus comprising: a test section for testing a substrate; load means for taking the substrate, which is to be tested, out of a cassette; a sensor having an optical axis crossing a space through which the substrate taken out by the load means passes; calculating means for calculating the size of the substrate responsive to light detection signal applied from the sensor; alignment means for positioning the substrate relative to the test section on the basis of the substrate size calculated; and unload means for returning the substrate, which has been tested, from the test section into the cassette.
Claim 12
Dependent Claim
24 words
The probe test apparatus according to claim 9, wherein the sensor has light-emitting and -receiving elements, which are arranged adjacent to the alignment means.
Claim 13
Dependent Claim
52 words
The probe test apparatus according to claim 9, wherein the load means has a first arm for supporting the substrate, the unload means has a second arm for supporting the substrate, and each of the first and second arms has a cut-away portion not to shield the optical axis of the sensor.
Claim 14
Dependent Claim
18 words
The probe test apparatus according to claim 11, wherein the first arm is arranged above the second one.
Claim 15
Dependent Claim
34 words
The probe test apparatus according to claim 9, wherein the sensor has plural light-emitting and -receiving elements and it also has means for changing over light beam emitted from each of the light-emitting elements.
Claim 16
Dependent Claim
19 words
The probe test apparatus according to claim 9, wherein the load means carries the substrate at a certain speed.
Claim 17
Dependent Claim
28 words
The probe test apparatus according to claim 9, wherein the load means has a first belt drive mechanism and the unload means has a second belt drive mechanism.
Claim 18
Dependent Claim
23 words
The probe test apparatus according to claim 15, wherein the first belt drive mechanism is driven independently of the second belt drive mechanism.
Claim 19
Dependent Claim
45 words
The probe test apparatus according to claim 9, further comprising a second sensor provided with an optical axis crossing just before the cassette opening, through which the substrate is taken into and out of the cassette, to detect the substrate coming out of the cassette.
Claim 20
Dependent Claim
140 words
A probe test apparatus comprising: a test section for testing a substrate; load means for taking the substrate, which is to be tested, out of a cassette; a first sensor having an optical axis crossing a space through which the substrate taken out by the load means passes; operational means for calculating the size of the substrate responsive to light detection signal applied from the first sensor; alignment means for positioning the substrate relative to the test section on the basis of the substrate size calculated; unload means for returning the substrate, which has been tested, from the test section into the cassette; and a second sensor having an optical axis crossing just before the cassette opening, through which the substrate is loaded into and unloaded from the cassette, to detect any of the substrate coming out of the cassette.
Claim 21
Dependent Claim
140 words
A probe test apparatus comprising: a test section for testing a substrate; load means for taking the substrate, which is to be tested, out of a cassette; a first sensor having an optical axis crossing a space through which the substrate taken out by the load means passes; operational means for calculating the size of the substrate responsive to light detection signal applied from the first sensor; alignment means for positioning the substrate relative to the test section on the basis of the substrate size calculated; unload means for returning the substrate, which has been tested, from the test section into the cassette; and a second sensor having an optical axis crossing just before the cassette opening, through which the substrate is loaded into and unloaded from the cassette, to detect any of the substrate coming out of the cassette.
Claim 22
Dependent Claim
96 words
The probe test apparatus according to claim 18, wherein an interval P between the optical axis of the second sensor and the center of the alignment means is made certain, the load means carries the substrate at a certain speed v, and the operational means counts a time T during which the substrate taken out of the cassette crosses over the optical axis of the second sensor and aligns the center of the substrate with that of the alignment means on the basis of the counted time T, the carrying speed v and the interval P.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-18 | 2000-08-19 | 2001-02-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-18 | 2004-08-19 | 2005-02-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-18 | 2008-08-19 | 2009-02-18 | $7700.00 | Window Closed / Lapsed |