US5278494A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer probing test machine
Assignee: Tokyo Electron Ltd
•
Filing: 1992-02-19
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Granted: 1994-01-11
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Expires: 2012-02-19
Abstract
Abstract A wafer probing test machine including a loading/unloading section defined by a first frame to enclose plurality of cassette stages therein, a test section defined by a second frame for enclosing a test stage therein, an elevator for moving at least one of the cassette stages up and down, and a wafer transfer system having a multi-jointed arm for taking out the wafer from a cassette and transferring the wafer onto the test stage.
Inventors
- 👤 Tadashi Obigane
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 20:41
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/34; H10P72/3411
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
126 words
A wafer probing test machine comprising: a loading/unloading section having a first frame enclosing a plurality of cassette stages therein; a test section defined by a second frame enclosing a test stage therein; an elevator for moving at least one of the cassette stages up and down; a wafer transferor having an expansion arm for taking out the wafer form a cassette and transferring the wafer onto the test stage; and a door attached to a top portion of the first frame such that in testing operation, said door is opened, followed by moving the cassette stage upward, then loading the cassette on the cassette stage, moving the cassette stage downward, and then closing the door so as to position the cassette within the loading/unloading section.
Claim 2
Dependent Claim
126 words
A wafer probing test machine comprising: a loading/unloading section having a first frame enclosing a plurality of cassette stages therein; a test section defined by a second frame enclosing a test stage therein; an elevator for moving at least one of the cassette stages up and down; a wafer transferor having an expansion arm for taking out the wafer form a cassette and transferring the wafer onto the test stage; and a door attached to a top portion of the first frame such that in testing operation, said door is opened, followed by moving the cassette stage upward, then loading the cassette on the cassette stage, moving the cassette stage downward, and then closing the door so as to position the cassette within the loading/unloading section.
Claim 3
Dependent Claim
20 words
The wafer probing test machine according to claim 1, wherein said elevator is attached to each of the cassette stages.
Claim 4
Dependent Claim
18 words
The wafer probing test machine according to claim 1, wherein said test stage has an XY directions mover.
Claim 5
Dependent Claim
20 words
The wafer probing test machine according to claim 1, wherein said wafer transfer means has a lifting and swinging member.
Claim 6
Dependent Claim
52 words
A wafer probing test machine according to claim 1, wherein said plurality of cassette stages and said wafer transferor are arranged in series in an XY plane within the loading/unloading section, and wherein an opening is provided for taking out the wafer from each cassette, said opening facing toward said wafer transferor.
References Cited (Backward Citations)
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JPS6381941A
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JPS641476A
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JPS6410640A
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JPH02270341A
Cited
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Cited
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-01-10 | 1997-07-12 | 1998-01-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-10 | 2001-07-12 | 2002-01-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-10 | 2005-07-12 | 2006-01-11 | $7700.00 | Window Closed / Lapsed |