US4950982A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electric probing test machine
Assignee: Tokyo Electron Ltd
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Filing: 1990-01-26
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Granted: 1990-08-21
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Expires: 2010-01-26
Abstract
Abstract An electric probing test machine including a test stage unit which is constructed as an independent component of at least one system and used to test the electrical characteristics of a wafer by having the wafer on the stage contacted by a multitude of probes and a loading/unloading unit which is constructed as an independent component of at least one system and used to bring a wafer from a wafer cassette to the stage of the test stage unit or from the stage of the test stage unit to the wafer cassette. The loading/unloading unit is combined with the test stage unit in such a way that the loading/unloading unit can be separated and moved away from the test stage unit.
Inventors
- 👤 Tadashi Obikane
- 👤 Hisashi Koike
- 👤 Sumi Tanaka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 07:25
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07364; G01R1/07371; G01R31/00; G01R31/28; G01R31/282; G01R31/2831; H; H10; H10P; H10P74/00; H10P74/20; H10P74/207; H10P74/27
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
148 words
An electric probing test machine comprising: a pair of test stage units constructed as independent components of respective systems and used for testing the electrical characteristics of wafers under test while the wafers are mounted on said test stage units; and a loading/unloading unit constructed as an independent component of one system and used to load the wafers from a cassette and to unload the tested wafers one by one from one of said test stage units, said loading/unloading unit being combined with a side section of said one of said test stage units and disposed between said test stage units of said two systems, and said loading/unloading unit further comprising, means for separating and moving said loading/unloading unit away from said one of said test stage units, and means for pre-aligning wafers before the wafers are transferred from said wafer cassette to said one test stage unit.
Claim 2
Dependent Claim
148 words
An electric probing test machine comprising: a pair of test stage units constructed as independent components of respective systems and used for testing the electrical characteristics of wafers under test while the wafers are mounted on said test stage units; and a loading/unloading unit constructed as an independent component of one system and used to load the wafers from a cassette and to unload the tested wafers one by one from one of said test stage units, said loading/unloading unit being combined with a side section of said one of said test stage units and disposed between said test stage units of said two systems, and said loading/unloading unit further comprising, means for separating and moving said loading/unloading unit away from said one of said test stage units, and means for pre-aligning wafers before the wafers are transferred from said wafer cassette to said one test stage unit.
Claim 3
Dependent Claim
43 words
The electric probing test machine according to claim 1, wherein said test stage unit is capable of a probing test of semiconductor wafers and comprises handling arms capable of bringing a semiconductor wafer to and from the stage of said test stage unit.
Claim 4
Dependent Claim
40 words
The electric probing test machine according to claim 1, wherein said means for separating and moving comprises: means for sliding said loading/unloading unit away from said test stage unit, comprising ball guides, and rail members to guide the ball guides.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-08-20 | 1994-02-19 | 1994-08-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-08-20 | 1998-02-19 | 1998-08-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-08-20 | 2002-02-19 | 2002-08-21 | $7700.00 | Window Closed / Lapsed |