US4786867A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer prober
Assignee: Canon Inc
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Filing: 1987-09-01
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Granted: 1988-11-22
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Expires: 2007-09-01
Abstract
Abstract A wafer prober for use in the examination of electric characteristics of semiconductor chips formed on a semiconductor wafer is disclosed. Foe examination, probing needles provided on a probe card are press-contacted to electrode pads of an individual chip. Prior to the examination, the probing needles are press-contacted to a non-chip region of the wafer, in which portion no chip is formed, so that traces of tips of the probing needles are formed on this non-chip region. The positional relation between the traces of the needle tips and the electrode pads is detected and, on the basis of the detection, the probing needles are relatively aligned with the electrode pads. Thus, the alignment of the probing needles and the electrode pads can be made fully automatically. In another aspect, by the formation of the traces of the needle tips, the measurement necessary for the alignment can be made easily and accurately, with the result that the alignment can be made efficiently. Also, during the needle alignment, any chip on the wafer is not damaged.
Inventors
- 👤 Yasuyoshi Yamatsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 07:32
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07342
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
116 words
A wafer prober usable with a probe card having probing needles and a wafer having chips formed thereon, comprising: pressing means for pressing the probing needles relative to a non-chip portion of the wafer in which portion no chip is formed, so that traces of tips of the probing needles are formed on the non-chip portion of the wafer; detecting means for detecting the positional relation between electrode pads of a chip on the wafer and the traces of the needle tips formed on the nonchip portion of the wafer; and control means for controlling the positional relation between the electrode pads and the probing needles on the basis of the detection by said detecting means.
Claim 2
Dependent Claim
116 words
A wafer prober usable with a probe card having probing needles and a wafer having chips formed thereon, comprising: pressing means for pressing the probing needles relative to a non-chip portion of the wafer in which portion no chip is formed, so that traces of tips of the probing needles are formed on the non-chip portion of the wafer; detecting means for detecting the positional relation between electrode pads of a chip on the wafer and the traces of the needle tips formed on the nonchip portion of the wafer; and control means for controlling the positional relation between the electrode pads and the probing needles on the basis of the detection by said detecting means.
Claim 3
Dependent Claim
81 words
A wafer prober according to claim 1, wherein said pressing means includes a card holder for holding thereon the probe card at a first position, an X-Y stage movable between the first position and a second positon spaced from the first position by a predetermined distance, a wafer holder for holding the wafer, and a Z stage for moving the wafer holder relative to said X-Y stage so that the probing needles are presscontacted to the non-chip portion of the wafer.
Claim 4
Dependent Claim
52 words
A wafer prober according to claim 2, wherein said detecting means includes image recognizing means supported at the second position and calculating means for detecting the positional relation between the electrode pads and the traces of the needle tips on the basis of an imagewise signal produced by said image recognizing means.
Claim 5
Dependent Claim
30 words
A wafer prober according to claim 3, wherein said control means includes driving means operable to rotationally move said card holder in accordance with the detection by said calculating means.
Claim 6
Independent Claim
118 words
A method, usable in a wafer prober, for aligning probing needles of a probe card with a chip on a wafer, said method comprising the steps of: pressing the probing needles relative to a non-chip portion of a wafer in which portion no chip is formed, so that traces of tips of the probing needles are formed on the non-chip portion of the wafer; detecting the positional relation between electrode pads of the chip on the wafer and the traces of the needle tips formed on the non-chip portion of the wafer; and controlling the positional relation between the probing needles of the probe card and the electrode pads of the chip, on the basis of the detection.
Claim 7
Independent Claim
118 words
A method, usable in a wafer prober, for aligning probing needles of a probe card with a chip on a wafer, said method comprising the steps of: pressing the probing needles relative to a non-chip portion of a wafer in which portion no chip is formed, so that traces of tips of the probing needles are formed on the non-chip portion of the wafer; detecting the positional relation between electrode pads of the chip on the wafer and the traces of the needle tips formed on the non-chip portion of the wafer; and controlling the positional relation between the probing needles of the probe card and the electrode pads of the chip, on the basis of the detection.
Claim 8
Dependent Claim
27 words
A method according to claim 5, wherein the non-chip portion of the wafer is a marginal portion surrounding chips formed on the wafer in a grid-like fashion.
Claim 9
Dependent Claim
29 words
A method according to claim 5, wherein the non-chip portion of the wafer is a marginal portion surrounding a test chip which is defined between chips on the wafer.
Claim 10
Independent Claim
156 words
A method, usable in a wafer prober, for aligning probing needles of a probe card with a chip on a wafer, said method comprising the steps of: pressing the probing needles relative to a non-chip portion of a wafer in which portion no chip is formed, so that traces of tips of the probing needles are formed on the non-chip portion of the wafer; detecting the positional relation between electrode pads of the chip on the wafer and the traces of the needle tips formed on the non-chip portion of the wafer; controlling the positional relation between the probing needles of the probe card and the electrode pads of the chip on the basis of the detection; and measuring the size of at least one of the traces of the needle tips and checking, on the basis of the measurement, the pressing force of the probing needles applied relative to the non-chip portion of the wafer.
Claim 11
Independent Claim
156 words
A method, usable in a wafer prober, for aligning probing needles of a probe card with a chip on a wafer, said method comprising the steps of: pressing the probing needles relative to a non-chip portion of a wafer in which portion no chip is formed, so that traces of tips of the probing needles are formed on the non-chip portion of the wafer; detecting the positional relation between electrode pads of the chip on the wafer and the traces of the needle tips formed on the non-chip portion of the wafer; controlling the positional relation between the probing needles of the probe card and the electrode pads of the chip on the basis of the detection; and measuring the size of at least one of the traces of the needle tips and checking, on the basis of the measurement, the pressing force of the probing needles applied relative to the non-chip portion of the wafer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-11-22 | 1992-05-23 | 1992-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-11-22 | 1996-05-23 | 1996-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-11-22 | 2000-05-23 | 2000-11-22 | $7700.00 | Window Closed / Lapsed |