US5600880A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for forming vertical gap in a thin film magnetic transducer
Assignee: International Business Machines Corp
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Filing: 1995-05-12
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Granted: 1997-02-11
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Expires: 2015-05-12
Abstract
Abstract In the manufacture of a thin-film magnetic head having a vertical gap, auxiliary support is provided at the ends of a gap wall prior to formation of the magnetic poles. In a preferred embodiment, a pit is defined in a substrate and a release layer is deposited on the substrate followed by a layer of alumina. A recess is then etched through the alumina layer to the release layer in the pit. A partial layer of polymer or metal is deposited with a vertical edge across the median of the pit and recess. A layer of nonmagnetic wall material such as silicon oxide is deposited which after etching leaves a wall against the vertical edge of the partial layer. After removal of the partial layer, a vertical wall extends transversely across the recess and pit with the ends of the wall anchored and supported at the recess sidewalls. Alternatively, a pedestal may be provided in the recess to support each end of the wall. The magnetic poles are then formed simultaneously on either side of the wall. Other thin film layers are then deposited in an appropriate sequence of steps to complete the desired vertical gap, horizontal head structure. The substrate is separated from the completed thin film structure by dissolving the release layers.
Inventors
- 👤 Hugo A. E. Santini
- 👤 Clinton D. Snyder
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 08:52
CPC Classifications
G; G11; G11B; G11B5/00; G11B5/127; G11B5/31; G11B5/3163; G11B5/3176; G11B5/3179; G11B5/3183; G11B5/187; G11B5/23; G11B5/232; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/4902; Y10T29/49021; Y10T29/49032; Y10T29/49036; Y10T29/49043; Y10T29/49044; Y10T29/49046
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
113 words
A method for fabricating a magnetic transducer comprising the steps of: providing a substrate having a release layer formed on a surface thereof, said substrate and release layer defining a pit having sidewalls; forming a vertical wall of a nonmagnetic material in said pit with its ends supported by the sidewalls of the pit; forming first and second pole pieces of a magnetic material, said pole pieces each having a pole tip disposed in the pit in opposing relationship to each other separated by said vertical wall disposed therebetween defining a magnetic gap; magnetically coupling the pole pieces; and separating the substrate from the magnetic transducer formed thereon by removing the release layer.
Claim 2
Independent Claim
113 words
A method for fabricating a magnetic transducer comprising the steps of: providing a substrate having a release layer formed on a surface thereof, said substrate and release layer defining a pit having sidewalls; forming a vertical wall of a nonmagnetic material in said pit with its ends supported by the sidewalls of the pit; forming first and second pole pieces of a magnetic material, said pole pieces each having a pole tip disposed in the pit in opposing relationship to each other separated by said vertical wall disposed therebetween defining a magnetic gap; magnetically coupling the pole pieces; and separating the substrate from the magnetic transducer formed thereon by removing the release layer.
Claim 3
Dependent Claim
21 words
The method as in claim 1 wherein said pit includes a recess formed therein in which said pole tips are disposed.
Claim 4
Dependent Claim
103 words
The method as in claim 1 wherein the step of forming said vertical wall comprises the steps of: depositing a layer of a first material with a vertical edge formed transversely across the pit; depositing a layer of a second material over said vertical edge of the layer of the first material; and removing horizontal portions of said layer of second material and said layer of first material thereby leaving the portion of said layer of second material deposited over said vertical edge thus forming said vertical wall extending transversely across said pit with its ends supported by said sidewalls of the pit.
Claim 5
Dependent Claim
106 words
The method as in claim 1 wherein the step of forming said vertical wall comprises the steps of: depositing a first layer of a first material with a vertical edge formed transversely across said pit; depositing a layer of a second material over said layer of first material, said second material being deposited over said vertical edge; removing horizontal portions of said layer of second material leaving that portion of said second material deposited over said vertical edge thereby forming said vertical wall; and depositing a second layer of said first material over said release layer and pit including said first layer of said first material.
Claim 6
Dependent Claim
33 words
The method of claim 4 including the further step of patterning and etching said first and second layers of first material for forming a plating frame for said first and second pole pieces.
Claim 7
Dependent Claim
41 words
The method as in claim 1 further comprising the steps of: forming magnetic induction coils and electrical leads for said coils, said coils inductively coupled to said pole pieces; and forming a suspension member integral and unitary to said pole pieces.
Claim 8
Dependent Claim
31 words
The method as in claim 1 wherein said magnetic material comprises a material selected from the group consisting of nickel, iron, cobalt, nickel-iron and magnetic alloys of nickel, iron or cobalt.
Claim 9
Dependent Claim
12 words
The method as in claim 7 wherein said magnetic material comprises nickel-iron.
Claim 10
Dependent Claim
14 words
The method as in claim 4 wherein said first material comprises a metallic material.
Claim 11
Dependent Claim
13 words
The method of claim 4 wherein said first material comprises a polymeric material.
Claim 12
Dependent Claim
13 words
The method of claim 4 wherein said second material comprises a dielectric material.
Claim 13
Dependent Claim
21 words
The method of claim 4 wherein said second material is selected from the group consisting of aluminum oxide and silicon oxide.
Claim 14
Independent Claim
158 words
A method for manufacturing a magnetic disk storage system comprising the steps of: providing at least one magnetic storage disk; providing a drive mechanism for rotating said magnetic storage disk; providing an actuator mechanism for moving a magnetic transducer supported on a suspension member close to the surface of said magnetic storage disk; manufacturing said magnetic transducer by the steps of: forming a release layer formed on a substrate, said substrate and release layer defining a pit having sidewalls; forming a vertical wall of nonmagnetic material in said pit with its ends supported by the sidewalls of the pit; forming first and second pole pieces of a magnetic material, said pole pieces each having a pole tip disposed in the pit in opposing relationship to each other separated by said vertical wall disposed therebetween defining a magnetic gap; magnetically coupling the pole pieces; and separating the substrate from the magnetic transducer formed thereon by removing the release layer.
Claim 15
Independent Claim
158 words
A method for manufacturing a magnetic disk storage system comprising the steps of: providing at least one magnetic storage disk; providing a drive mechanism for rotating said magnetic storage disk; providing an actuator mechanism for moving a magnetic transducer supported on a suspension member close to the surface of said magnetic storage disk; manufacturing said magnetic transducer by the steps of: forming a release layer formed on a substrate, said substrate and release layer defining a pit having sidewalls; forming a vertical wall of nonmagnetic material in said pit with its ends supported by the sidewalls of the pit; forming first and second pole pieces of a magnetic material, said pole pieces each having a pole tip disposed in the pit in opposing relationship to each other separated by said vertical wall disposed therebetween defining a magnetic gap; magnetically coupling the pole pieces; and separating the substrate from the magnetic transducer formed thereon by removing the release layer.
Claim 16
Dependent Claim
21 words
A method as in claim 13 wherein said pit includes a recess formed therein in which said pole tips are disposed.
Claim 17
Dependent Claim
108 words
A method as in claim 13 wherein the step of forming said vertical wall comprises the steps of: depositing a layer of a first material with a vertical edge formed transversely across the pit; depositing a layer of a second material over said vertical edge of said layer of first material; removing horizontal portions of said layer of second material thereby leaving the portion of said layer of second material deposited over said vertical edge thus forming said vertical wall extending transversely across said pit; and depositing a second layer of said first material over said release layer and said pit including said first layer of first material.
Claim 18
Dependent Claim
34 words
A method as in claim 15 including the further step of patterning and etching said first and second layers of first material for forming a plating frame for said first and second pole pieces.
Claim 19
Dependent Claim
19 words
A method as in claim 13 wherein said magnetic transducer is manufactured integral and unitary with said suspension member.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-11 | 2000-08-12 | 2001-02-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-11 | 2004-08-12 | 2005-02-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-11 | 2008-08-12 | 2009-02-11 | $7700.00 | Window Closed / Lapsed |